Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -
Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket
Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment
Piping length [m] Air consumption Q [Nl/min.] 4 3 100 cylinder [mm] 40 50 63 80 2 2 100 100 Stroke [mm] Air consumption Q [Nl/min.]
Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve)
Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve
to 16 stations (EX120) 2 to 24 stations (EX180) Valve stations 2 to 24 stations 2 to 18 stations 2 to 8 stations 2 to 24 stations 2 to 20 stations 2 to 24 stations 2 to 16 stations 2 to 24 stations Flat ribbon cable connector with strain relief Conforming to MIL-C-83503 (Refer to page 57.)
2 2 2 2 4 2 2 1 1 6 2 No. !
axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products
precision guide type (Single axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates
2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.
N.O. 12 12 12 12 1 2 Nozzle Vacuum pump Supply coolant Air operated type 2 3 1 1 2 3 1 3 2 1 2 w Application example, Selector type 12 12 12 12 12 External pilot solenoid type Supply coolant with low pressure Supply coolant with high pressure 1 2 3 1 2 3 1 2 1 2 1 2 Nozzle 3 3 Series SGH How to Order Pilot Valve V116 1 5 T Z q w e q Rated voltage w Electrical entry e Light/surge voltage suppressor
connection for NPN output Brown Brown Black Blue Load Brown Black Blue Load Black Blue Relay Switch 1 Switch 1 Switch 1 Load Relay contact Brown Black Blue Brown Brown Black Blue Black Blue Switch 2 Switch 2 Switch 2 Relay The indicator lights will illuminate when both auto switches are turned ON. 2-wire with 2-switch AND connection 2-wire with 2-switch OR connection When two switches are
Note 2) The orientation of the connector can be changed by 180 degrees depending on the mounting direction of housing (2) and terminal box (3).
swj\phes l With n switches With 1 swi1C~ ~~:::t Sane slrlct;e IDifferent surface Same $u.rfpce 50.5 43.5 ~ HS 38 2 A 0.5 2 D-B1 B8 type 1><>1K11ype 45+ 40(n2) 1 5+ 40 ('=<') 15 (n >2) 45 23.5 25 25 bAs B6.type B (n ~ 2.4 _ l) 0.5 50.5 :"'Hs 43.5 15 +50( 0" ) 75 +55(n2) 15 75 ~ ' B6lype I><>S'KSlype 3.5 3.5 A 2 ( n ~ 2 . 4.~--' ) 10 26.5 25 26.5 D-G5 K5 type G 35+30(n-2) 35 100 100+ loo(n2