VZS

8, 1/4 VQ7 ( ): Rc 1/8 EVS L plug connector 2 position double: VZS3250-L(Z)-01 02 3 position closed center: VZS3350-L(Z)-01 02 3 position exhaust center: VZS3450-L(Z)-01 02 3 position pressure center: VZS3550-L(Z)-01 02 K plug connector 2 position double: VZS3250-KZ-01 02 3 position closed center: VZS3350-KZ-01 02 3 position exhaust center: VZS3450-KZ-01 02 3 position pressure center: VZS3550

Fieldbus System

C6: 6 (SMC) N7: 1/4" (SMC) One-touch fitting [PE: Pilot EXH port] Applicable tube O.D. C6: 6 (SMC) N7: 1/4" (SMC) Applicable tube O.D.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

C6 (6 Onetouch fitting) C8 (8 Onetouch fitting) Rc(PT)1/8 C6 (6 One-touch fitting) C8 (8 One-touch fitting) Port size A, B port Rc(PT)1/8 Rc(PT)1/8: 11 (0.6) C6: 8.6 (0.48) C8: 9.9 (0.55) Body ported SYJ7l2l __ __ __ (1) Valve effective area mm2(Cv) Base mounted SYJ7l4l __ 11.9 (0.66) 9.5 (0.53) C6: 8.5 (0.47) C8: 9.7 (0.54) __ Note 1) Value for a single solenoid 2 position valve mounted

5 Port Solenoid Valve SY Series

1/8 27.2 32.5 20.5 23 32.3 L plug connector: L SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector: M SY5120-M(-F ) DIN terminal (D): C4, N3 C6, N7 C8, N9 SY5120-W0(-F ) 1 2 M8 connector (W0): C4, N3 C6, N7 C8, N9 1 2 C4, N3 C6, N7 C8, N9 1 2 SY5120-D(-F ) 60.9 Applicable cable O.D. 3.5 to 7 (Lead wire length) Approx. 300 95.8 [98] 53.4 28.1 [35.1] 104.9 Max. 10 42.1 12.7 27 32.6 M8

Valve Single Unit

fitting for 6 One-touch fitting for 6 One-touch fitting for 8 C8 C4 C6 C6 Cylinder port size SX3000 C6: With One-touch fittings for 6 Manifold base (5 stations) SX5000 SS5X3-41-05-C6 One-touch fitting (Inch size) Symbol Port size Applicable series One-touch fitting for 5/32" N3 SX3000 One-touch fitting for 1/4" N7 SS5X3-41-05-C6 1 set (Type 41, 5-station manifold base part no.)

SYJ300/500/700

Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

28.5 G 1/2 VQC VQZ SQ 163.3 VFS 3 1 5 64 52.5 VFR 45 27 VQ7 48 48 1/8" (Bleed port) (Double, 3 position: PE port) 1/8" (PE port) 69.5 69.5 2 position double: VFR621 -E, VFR621 -D(Z) 0 1 0 1 3 position closed center: VFR631 -E, VFR631 -D(Z) 3 position exhaust center: VFR641 -E, VFR641 -D(Z) 3 position pressure center: VFR651 -E, VFR651 -D(Z) 0 1 0 1 0 1 0 1 0 1 0 1 196.1 232 Electrical entry

VZ3000

2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc 1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting

Rubber seal 5 Port Solenoid Valve Series SYJ5000

8 1/8 1/4 1/8, C6 (One-touch fitting for 6) P, R port M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

4 Rc (PT)1/8 Rc (PT)1/8 Rc (PT)1/4 Rc(PT)1/4 P/R port Rc(PT)1/8 VZ R c(PT)1/8 Rc (PT)1/8 6 One-touch fitting Rc (PT)1/8 Rc (PT)1/8 A port C6 Port size C8 8 One-touch fitting VT M5 X 0.8 M5 X 0.8 X port (1) M3 X 0.8 VT Body ported SYJ7l2/SYJ7l2R Valve effective area (mm2) (Cv) (2) 10.6 (0.59) VP 1/8: 9.2 (0.51) C6: 8.8 (0.49) C8: 10 (0.56) Base mounted SYJ7l4/SYJ7l4R 10.2 (0.57) 10.2 (0.57

Rubber seal 5 Port Solenoid Valve Series SYJ7000

2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74 for internal pilot Type SS5YJ7-42-C6 Type SS5YJ7-42-C8 Note)

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1.6 2.1 0.34 0.39 0.35 0.35 0.27 0.32 0.24 0.55 0.59 0.59 0.59 0.47 0.39 0.51 2.3 2.4 2.3 2.4 2.2 2.2 2.3 0.27 0.32 0.27 0.36 0.32 0.27 0.31 Body ported for internal pilot 0.59 0.62 0.54 0.66 0.56 0.54 0.59 1/8 1/4 1/8 1/4 10-SYJ72M 1/8 1/8 1/8 1/8 C6 C8 Type 10-SS3YJ7-40 Type 10-SS3YJ7-41 Base mounted for internal pilot 10-SYJ74M 1/4 1/4 Type 10-SS3YJ7-42-01 Type 10-SS3YJ7-42-C6 1/4 Type

Fieldbus System

SS5Y3-12S6Q42-05B 1 set (Type 12 5-station manifold base part no.) SY3130-5U1-C6 3 sets (2-position single part no.) SY3230-5U1-C6 2 sets (2-position double part no.)

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

Fieldbus System

How to Order Valves (With mounting screw) Series EX600 Series SY Series SV Series S0700 Series VQC SY 3 5 1 C6 1 0 3 q w r e t y u i o !0 !1 !2 !3 Top ported y Pilot valve option !

Manifold Specifications

2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc 1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting

A

X B 5 _ C D N R O D T H R E A D R O D B O R E S I Z E S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 6 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/8 2 2-1/2 Inches Example: 04 = 4 Stroke E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z S T R O K E Hundredths Of An Inch

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note 3) Refer to page 6 for DIN rail weight. 1 Cassette Type Manifold Series SY3000/5000/7000 How to Order Valves SY 3 1 60 5 L C6 Series 3 5 7 Symbol M5 C4 C6 01 C4 C6 C8 02 C8 C10 SY3000 SY5000 SY7000 A, B port size Port size M5 x 0.8 4 One-touch fitting 6 One-touch fitting Rc(PT)1/8 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Rc(PT)1/4 8 One-touch fitting 10 One-touch

VZ100/300/500

1/8 1/8 1/8 1/8 C6 Base mounted For internal pilot VZ54 VV3Z5-41-1 1/4 1/4 C8 Body ported For external pilot VV3Z5-21R-1 VZ52R 2.2 0.34 0.55 2.4 0.32 0.62 1/4 1/8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VV3Z5-41R-2 1/4 1/4 1/8 1/8 C6 C8 2.2 2.0 1.6 2.1 0.35

3 Port Solenoid Valve Metal Seal Series VZ200 1

4 Rc 1/8 C6, C8 C6, C8 Rc 1/4 VZ415VZ425Base mounted (Without sub-plate) VVZ400-32A-2 VVZ400-31A-2 VP Port size Rc 1/4 VZ412-01 VZ422-01 Body ported Applicable valve model VG Blanking plate VVZ400-31A-1 VVZ400-32A-1 VP VV3Z4-50-061-C8 Screws and Gasket Assembly Part No.