SV

B 2 B 2 B 2 B 1 P 1 P V 5 V 1 P 3 E (Station n) (Station 1) Light/Surge voltage suppressor Individual SUP spacer MAX.21 (DIN rail dimension) SV2000-00Interface regulator SV2000-M1Interface regulator Individual EXH spacer 71.5 7.5 68.2 56.5 19.7 Block separation lever B B B B 145.6 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 148 137.5 122.5 13 3 173 162.5 138.5 17.5 4 185.5

0.4

VQ 2 x Rc 3/4 1 2 3 4 5 6 7 8 n Stations D-side U-side VQ4 3(R) port 2 x Rc 1/2 4 x G 1/2 1(P) port VQ5 Conduit port SMC SMC SMC SMC SMC SMC SMC VQC 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 13 VQZ 55.5 42.7 43.5 20.5 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A SQ 33.5 12 11.5 15.7 2 x Rc 1/8 Pilot EXH port (6.5) 21.5 2 x Rc 1/8 VFS External pilot port 27 31 2n x Rc 1/4, 3/8, C8, C10, C12 Rc 1/

SX

A: Orange B: Green (n) (2) (1) stations (Press and turn for the locking type.)

Valve Single Unit

A: Orange B: Green (n) (2) (1) stations (Press and turn for the locking type.)

Valve Single Unit

A: Orange B: Green (n) (2) (1) stations (Press and turn for the locking type.)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

7.5

34.3 23.6 15.4 15.6 3/5 3/5 2 2 2 2 2 30.6 32.1 1 1 4 4 4 4 4 D D One-touch fitting One-touch fitting [4(A), 2(B) port] M5 x 0.8 [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" L4 L3 U side D side Valve lock switch Switch for locking a connector C6: 18.1 N7: 20.6 C6: 9.6 N7: 12.1 (9.1) 8 (1.8) 20.8 5.5 21 7.5 COM 6 PWR

45

M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M

45

M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

/surge voltage suppressor) (Station 1) (Station n) (Station 1) (Station n) (Light/surge voltage suppressor) + + + + + + + + + + B B 20 15 5 B B 20 A A 15 A A 5 2 2 (Pitch) P = 10.5 (Pitch) P = 10.5 15 One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" M5 x 0.8 (A, B port) 15 Stations n L1 L2 3 50 42 6 81.5 73.5 8 102.5 94.5 10 123.5 115.5 4 60.5 52.5 5 71 63 7 92 84 9 113 105

42

, C12, N7, N9, N11 4(A), 2(B) port 148.9 (Double) 71.7 96.2 Electrical entry from U side (FU) 139.9 (Single) 16.2 43.2 49.7 106 47 U side 11.7 9 9 1/8" External pilot port Manual override 15 27 38 n X 12 X B 2 A 4 7 B 2 A 4 A 6 SMC SMC SMC SMC A A A A A B B A A B A B A B P2: 3/8" Indicator light B 2 A 4 5 L1 L2 B 2 A 4 4 B Pressure switch (IS1000P-2) P = 25 44 B 2 A 4 3 P1: 1/8" B 2 A 4 2

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

34.3 23.6 15.4 15.6 3/5 3/5 2 2 2 2 2 30.6 32.1 1 1 4 4 4 4 4 D D One-touch fitting One-touch fitting [4(A), 2(B) port] M5 x 0.8 [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" L4 L3 U side D side Valve lock switch Switch for locking a connector C6: 18.1 N7: 20.6 C6: 9.6 N7: 12.1 (9.1) 8 (1.8) 20.8 5.5 21 7.5 COM 6 PWR

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

SY3000-37-81A-2-N SY3000-37-81A-2-5 SY3000-37-81A-1-N SY3000-37-81A-1-4 SY3000-37-81A-2-N SY3000-37-81A-2-5 SY3000-37-81A-3-N SY3000-37-81A-3-6 SY3000-37-81A-3-7 Single : For 1 to 4 stations Double/3 position : For 1 to 4 stations Single : For 5 to 8 stations Double/3 position: For 5 to 8 stations Single : For 1 to 8 stations Double/3 position : For 1 to 8 stations Single : For 1 to 8 stations

Fieldbus System

D side 1 2 3 Stations U side y P, E port size (One-touch fittings) Nil N 10 3/8" For N, sizes are in inches. SS5Y5-M12F1-05D1 set (Type M12 5-station manifold base part no.) SY5230-5U1-C8..3 sets (2-position double part no.)

CATALOG

2.48 1.75 4 7/8 2.19 1 1/8 9/16 3/8 325 (3.25) 1 1/8 3.9 1 1/2 1/2 3/8-24 3 3/4 0 1.57 1 1 1 3/8 1 1.18 4 1/4 2.72 2.34 5 53/64 2.76 1 1/2 3/4-16 7/8 1/2 400 (4) 1 1/8 4.7 1 1/2 1/2 3/8-24 4 1/2 0 1.57 1 1 1 3/8 1 1.18 4 1/4 2.72 2.34 5 53/64 3.32 1 1/2 3/4-16 7/8 1/2 D I M E N S I O N S C E N T E R T R U N N I O N T Y P E NC A1T 0 0.001 BA BORE (INCH) KK A AA B C DD E EA G TD TL WF MM D

V

Station 26 2~20 B 20 2~16 H 10 2~8 24VDC 12V 12 VDC * Mixed Porting Available by Special Order SUP/EXH B L O C K A S S E M B LY M O U N T I N G P O S I T I O N S U U Side 2 ~ 10 Stations D D Side 2 ~ 10 Stations B Both Sides 2 ~ 20 Stations *M Special Specifications (by Special Order) C O N N E C T O R M O U N T I N G P O S I T I O N U U Side D D Side V A LV E S TAT I O N S (BLANKING PLATE

0.4

45 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 L n Dimensions Formula L1 = 22n + 24 n: Station B B B 2 2 2 A A A 1 46 75 85.5 2 68 87.5 98 3 90 112.5 123 4 112 137.5 148 5 134 162.5 173 6 156

SQ1000/2000

Stations 1 2 3 4 5 6 7 8 n Lead wire length: L0/Approx. 600mm L1/Approx. 1500mm L2/Approx. 3000mm C8: SUP port C8: EXH port For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (A, B port) C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 threads Formulas: L1 = 11.5n + 44.5, L2 = 11.5n + 59 n:

Metal Seal/Rubber Seal Series VQ Body Ported

(5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2-4-84 Built-in silencer Built-in silencer 2-4-5 2-4-6 Cylinder Speed Chart Use as a guide for selection.