Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve)
Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve)
Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve
Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve
Model: 10S6 (Side Ported), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A, B Port Size: C6 (ø6 One-touch Fitting)
Model: 10S6 (Side Ported), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 12 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A, B Port Size: C6 (ø6 One-touch Fitting)
Model: 10S6 (Side Ported), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: 7 Stations, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: AA (Direct Mounting, Name Plate w/Station Number)
Model: 10S6 (Side Ported), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: 9 Stations, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: AA (Direct Mounting, Name Plate w/Station Number)
Model: 10S6 (Side Ported), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 5 (Negative Common, 7/8" Connector), I/O Unit Stations: None, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: AA (Direct Mounting, Name Plate w/Station Number)
Model: 10S6 (Side Ported), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 6 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A, B Port Size: C6 (ø6 One-touch Fitting)
Model: 10S6 (Side Ported), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 10 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A, B Port Size: C6 (ø6 One-touch Fitting)
Enclosure: W (IP67), SI Unit: WS (Wireless Remote), End Plate Type: 3 (Power Supply with 7/8" Connector, Max. Supplied Current 8 A), SI Unit Common: N (Negative Common), I/O Unit Stations: None, Valve Stations: 4 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assy: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting)
Enclosure: W (IP67), SI Unit: WS (Wireless Remote), End Plate Type: 3 (Power Supply with 7/8" Connector, Max. Supplied Current 8 A), SI Unit Common: N (Negative Common), I/O Unit Stations: None, Valve Stations: 10 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assy: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting)
Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 6 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting)
Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 3 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name
Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 16 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name
Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)]
: IP40, Lead Wire: With lead wire with connector (2 m), Handling Instructions: With Instruction Manual (Japanese and English), Calibration Certificate included: Without calibration certificate, Flow rate control valve: Available, Custom-made Specifications: None, Rating Flow Range(L/min): 0.2 to 10 (5), Accessory: None, Option: None, Analog Current Output(mA): 4 to 20
HRZ Series 8.1 Specification 8-5 8-5 HRX-OM-X010 Chapter 8 Appendix 8.1.2 Cooling capacity Fluid : Fluorinated Fluid Flow rate : Rated flow Facility water temp. : 25deg.C HRZ***-WS-F 12 HRZ010-WS-F 10 HRZ008-WS-F Cooling capacitykW 8 HRZ004-WS-F 6 4 HRZ002-WS-F 2 0 -20 -10 0 10 20 30 40 50 60 70 80 90 Circulating fluid setting temp.deg.C Figure 8-1 Cooling capacity (HRZ-WS-F) *Common to 50
) Table 8-1 Specification for fluorinated fluid (wide temperature) double inverter (HRZD020-WS-WS) Model HRZD020-WS-WS Channel 1 2 Cooling method Water cooled refrigerant type Temperature control system PID control PID control Cooling capacity*1 kW 9.5 (Circulating fluid at 20C) 9.5 (Circulating fluid at 20C) Operating temperature range C -30 to 90 -30 to 90 Temperature stability C 0.1*2