2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Compatibility with the PFG300 digital flow monitor 0.01 0.02 0.05 1 2 0.1 0.3 0.5 5 10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 PF2M7(-L) 0.001 L/min 0.01 1 0.02 2 0.01 L/min 0.05 5 Dry air N2 Ar CO2 0.1 10 Thermal type (MEMS) 0.3 25 0.1 L/min 0.5 50 1 100 1 L/min 2 200 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PFMC

Air Cylinder Series CS1

, 16 ) (n = 4, 8, 12, 16 ) 2 (Different surfaces, Same surface) 1 120 20 115 D-M9AL 115 + 40 (n2) 2 120 + 40 (n2) 2 (n = 2, 4, 6, 8 ) 20 + 40 (n2) 2 n (n = 2, 4, 6, 8 ) (n = 2, 4, 6, 8 ) 2 (Different surfaces, Same surface) 1 95 15 90 D-M9AVL 90 + 30 (n2) 2 95 + 30 (n2) 2 (n = 2, 4, 6, 8 ) 15 + 30 (n2) 2 n (n = 2, 4, 6, 8 ) (n = 2, 4, 6, 8 ) D-A5/A6 D-A59W D-F5/J5 D-F5W D-J59W D-F5BAL D-F59F

C85

Same side Different sides Different sides 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-C7 D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7 50 15 10 50 + 45(n 2) D-C80 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF ) 10 + 35 (n = 2, 4...) ( n2 2 15 + 45 (n = 2, 4...) ( n 2 ) 2 10 5 65 15 10 65 + 50(n 2) D-F7V D-J79 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-J79C D-A79W 60 + 55(n 2) 60 15 10 D-F7W D-J79W ) 15 + 35 (n

C85

Same side Different sides Different sides 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-C7 D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7 50 15 10 50 + 45(n 2) D-C80 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF ) 10 + 35 (n = 2, 4...) ( n2 2 15 + 45 (n = 2, 4...) ( n 2 ) 2 10 5 65 15 10 65 + 50(n 2) D-F7V D-J79 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-J79C D-A79W 60 + 55(n 2) 60 15 10 D-F7W D-J79W ) 15 + 35 (n

Cylinder with Lock Series CLS

150 Same surface 110 + 30 (n2) (n = 2, 4, 6, 8) 150 + 30 (n2) (n = 2, 4, 6, 8) 35 + 30 (n2) Different surfaces D-A44 110 + 50 (n2) (n = 2, 4, 6, 8) 150 + 50 (n2) (n = 2, 4, 6, 8) 55 + 55 (n2) Same surface 15 1 pc. 110 150 2 pcs.

7.5

L1 = M x 12.5 + 23 L2 = L1 10.5 L4 = (L1 L3)/2 2 15.6 30.6 3/5 2 2 2 2 2 1 4 4 4 4 4 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" D D D D D One-touch fitting [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" n1: Piece of the SJ2000 n2: Piece of the SJ3000 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" The dimensions

Series AP500

) Connections 1/2, 3/4 inch face seal, 1/2, 3/4 inch tube weld 3.

CA2

D-K39C 20 + 35(n 2) n = 2, 3, 4 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2) n = 2, 4, 6, 8 Different sides n 100 + 100(n 2) n = 2, 3, 4 Same side 100 + 100 (n2), n = 2, 4, 6, 8 80 90 80 90 80 90 10 20 55 1 Different sides 2 Same side 20 + 35(n 2) n = 2, 3, 4 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2) n = 2, 4, 6, 8 55 + 50(n 2) n = 2, 3, 4 80 + 50(n 2) n = 2, 4, 6, 8 90 + 50(n 2) n =

CM2

(n=2, 4, 6) 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 10 65 20 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 20+50( ) (n=2, 4, 6) 10 75 15 75+55(n2) n2 2 D-B59W 15 75 20 D-A3lA D-G39A D-K39A D-A44A 35+30(n2) 10 100 35 100+100(n2) Mounting Bracket Auto Switch Mounting Band Refer to p.1.4-35 for part numbers of the mounting brackets.

Clean Regulator

air, N2 Clean air, N2, Ar, CO2, Pure water Fluid Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Grade B Air, N2, Ar, CO2, Water Air, N2 Port size Proof pressure 1.5 MPa Grade A Clean air, N2 Clean air, N2, Ar, CO2, Pure water Max. operating pressure 1.0 MPa Fluid Grade B Air, N2 Low pressure type High pressure type Air, N2, Ar, CO2, Water 0.02 to 0.2 MPa Set

Table of Contents

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

Air Cylinder Series MB

) 2 (Different surfaces, same surface), 1 15 D-M9 D-M9W D-M9AL 15 + 55 (n2) 2 (n=2, 4, 6, 8) 25 + 55 (n2) 2 (n=2, 4, 6, 8) n (Same surface) 15 + 40 (n2) 2 (n=2, 4, 6, 8) n 1 10 25 2 (Different surfaces, same surface), 1 2 (Different surfaces, same surface), 1 15 10 D-M9V D-M9WV D-M9AVL 10 + 30 (n2) 2 (n=2, 4, 6, 8) 15 + 40 (n2) 2 (n=2, 4, 6, 8) n n 2 (Different surfaces) 2 (Same surface)

Series AK1000

pressure (mm Hg abs) -21 600 Delivery pressure (kPa) -35 500 -48 400 -61 300 -75 200 -88 100 -101 0 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Compact Vacuum Ejector Series ZA

HEP Vacuum (V) port Applicable tubing O.D.: 3.2 Vacuum (V) port Applicable tubing O.D.: 4 Related 15.3 15.6 KJL04-M5 KJL23-M5 KJS04-M5 KJS23-M5 Equipment 8.4 10.6 9.3 Applicable tubing O.D.: 3.2 Applicable tubing O.D.: 4 10 15.5 16.5 Vacuum (V) port Vacuum (V) port Q2 N2 ZA1 1 1 Q2 N2 ZA1 1 2 Q2 N2 ZA1 1 4 Q2 N2 ZA1 1 5 Dimensions of the vacuum (V) port fittings after installation 9.3 13.7

2

(See Fig. 2.)

5 Port Solenoid Valve

2n x C2, C3, C4, N1, N3 <4(A), 2(B) port> C2: 2 one-touch fitting C3: 3.2 one-touch fitting C4: 4 one-touch fitting N1: 1/8" one-touch fitting N3: 5/32" one-touch fitting L2 = L1 10.5 L3 = 8.5 x n1 + 46 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)/2 L6 = 8.5 x n1 + 31 L7 = 47 x n2 + 86.1 DIN rail clamping screw L1: DIN Rail Overall Length Valve stations (n1) I/O unit stations (n2) 1 2 3 4 5 6

Series SV

voltage suppressor (Station 1) (Station n2) n1 = Valve stations n2 = Input block stations L2 = L1 10.5 L3 = 20.5 x n1 + 70.5 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 20.5 x n1 + 56 L7 = 21 x n2 + 83.5 82.7 63.8 60 12 (for DIN rail mounting) (10) 14.7 L1: DIN rail overall length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block stations (n2) 0 1 2 3

SV

x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 A A A A B A B A B A B A L1: DIN Rail Overall Length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block Stations(n2) 0 1 2 3 4 5 6 7 8 198 223 248 260.5 285.5 310.5 323 348 373 223 235.5 260.5 285.5 298 323 348 360.5 385.5 235.5 260.5 273 298 323 335.5 360.5 385.5 398 248

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

2-Color Display Digital Flow Switch Series PFM

10 l/min Applicable fluid 0.5 to 25 l/min 2 to 100 l/min 1 to 50 l/min Rated flow range (Flow rate range) Dry air, N2, Ar 0.5 to 12.5 l/min 2 to 50 l/min 0.2 to 5 l/min 1 to 25 l/min CO2 0.5 to 26.3 l/min 2 to 105 l/min 0.2 to 10.5 l/min 1 to 52.5 l/min Dry air, N2, Ar Displayable range Note 1) 0.5 to 13.1 l/min 2 to 52 l/min 0.2 to 5.2 l/min 1 to 26.2 l/min CO2 0 to 26.3 l/min 0 to 105 l