SX

Speed controller Silencer Tube x Length Speed controller Silencer SX3140-01 SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02

Compact Vacuum Ejector Series ZA

Vacuum (V) port Applicable tubing O.D.: 3.2 Vacuum (V) port Applicable tubing O.D.: 4 15.3 15.6 KJL04-M5 KJL23-M5 KJS04-M5 KJS23-M5 9.3 8.4 Applicable tubing O.D.: 3.2 Applicable tubing O.D.: 4 10.6 10 15.5 16.5 Vacuum (V) port Vacuum (V) port Q1 N1 ZA1 1 1 Q1 N1 ZA1 1 2 Q1 N1 ZA1 1 4 Q1 N1 ZA1 1 5 Dimensions of the vacuum (V) port fittings after installation 9.3 13.7 Air pressure supply

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

type(R)) 34.5 53 5.5 (Lead wire length) 39.5 7.8 (N1, N3, N7) 300 (M5) Cover diameter 1.4 Cross sectional area 0.2mm2 42.5 (11) R P 15 1 3 8 1/8 NPTF R(EXH) port 16.3 13.4 2-M5 x 0.8 PE port 41.2 46.5 1/8 NPTF P(SUP) port L type plug connector (L) M type plug connector (M) 55.5 300 (Lead wire length) 66 300 (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light

CATALOG

m m 0 . 0 1 m m 0 . 0 1 m m 0 . 0 1 m m 0 . 0 1 m m 0 . 0 1 m m Fluid A i r A i r A i r A i r A i r A i r Operating Pressure 0.2~0.6MPa 0.15~0.6MPa 0.2~0.6MPa 0.15~0.6MPa (29~87PSI) 22~87PSI 29~87PSI 22~87PSI Ambient and Fluid Temperature 0 ~ 6 0 C ( 3 2 ~ 1 4 0 F ) 0 ~ 6 0 C ( 3 2 ~ 1 4 0 F ) Max Operating Frequency 1 8 0 c . p . m 1 8 0 c . p . m Lubrication N o n l u b e N o n l u

Compact Vacuum Unit

None Supply valve (1) (1) (2) (2) Release valve (4) Supply valve (1) (1) (2) (2) Release valve (4) Supply valve (1) (1) Release valve (4) Supply valve (1) (1) Release valve (4) Supply valve (3) (3) Release valve (4) K1 J1 Q1 Q2 VQ110 Rated voltage (4) ZB1 (4) (4) 5 6 24 VDC 12 VDC Connector assembly Table 2 Connector entry direction Note 1) AXT661 L LO M MO L-type plug connector, with lead

5 Port Solenoid Valve Series SY3000/5000/7000/9000

x 1 m T1209 x 1 m SY7120-02 SY7140-03 AS4001F-10 AS3001F-06 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 T0604 x 1 m T1075 x 1 m SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN200-02 AN200-02 AN202-02 Conditions [When using SGP (steel pipe)] Conditions [When using SGP (steel pipe)] Body ported Base mounted Series CS1

SZ3000

4 (A), 2 (B) port C4, C6, M5 Weight W (g) (2) n1: Stations n2: Number of SUP/EXH blocks m: Weight of DIN rail W = 3.2n1 + 53n2 + m + 126.5 Note 1) In cases such as those where many valves are operated simultaneously, use type B (double side SUP/EXH), applying pressure to the 1(P) ports on both sides and exhausting from the 3(R) ports on both sides.

SZ3000

4 (A), 2 (B) port C4, C6, M5 Weight W (g) (2) n1: Stations n2: Number of SUP/EXH blocks m: Weight of DIN rail W = 3.2n1 + 53n2 + m + 126.5 Note 1) In cases such as those where many valves are operated simultaneously, use type B (double side SUP/EXH), applying pressure to the 1(P) ports on both sides and exhausting from the 3(R) ports on both sides.

Valve Single Unit

EXH port EXH port Flat Ribbon Cable Assembly Cable length (L) 10 pins 20 pins 26 pins 1.5 m 3 m 5 m AXT100-FC10-1 AXT100-FC10-2 AXT100-FC10-3 17.2 AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 30 AXT100-FC26-1 AXT100-FC26-2 AXT100-FC26-3 37.5 Series Assembly part no. Port size Series Assembly part no.

Valve Single Unit

EXH port EXH port Flat Ribbon Cable Assembly Cable length (L) 10 pins 20 pins 26 pins 1.5 m 3 m 5 m AXT100-FC10-1 AXT100-FC10-2 AXT100-FC10-3 17.2 AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 30 AXT100-FC26-1 AXT100-FC26-2 AXT100-FC26-3 37.5 Series Assembly part no. Port size Series Assembly part no.

CM2

Axial foot style (2) Rod side flange style (1) Head side flange style (1) CJ1 Clevis integrated style (1) (1) Single clevis style CJP (1) (3) Double clevis style Rod side trunnion style (1) (2) CJ2 (2) Head side trunnion style (1) CM2 Boss-cut basic style (1) Boss-cut flange style (1) CG1 Boss-cut trunnion style (1) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

1 q Body type U M For single unit For manifold w Solenoid valve combination (Refer to Table (1).) r Solenoid valve rated voltage (Refer to Table (1).) e Pilot valve (Refer to Table (1).)

ISO Cylinder

: 20, 25 0.3 35 24 22 17 37 47 100.0 Head ( side ) 0.5 26 18 16 12 27 35 0.7 21 14 13 10 22 28 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G M Lateral load applied to the rod end fR [N] (40)1 (40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7

PSE530/200

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

SMC Pneumatic Clean Series

/m3) Standard product 105 105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

on the D side, regardless of the position of supply/exhaust assemblies. 1 2 3 m 1 2 n Layout (for special specifications) Valve stations In case of special specifications, station No. 1 is always on the D side.

V

S Y M B O L S 1 2 3 4 5 Courtesy of Steven Engineering, Inc. !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

N1, N2, F1, F2 Straight Symbol Port size Rated flow range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight w Flow adjustment valve/Piping entry direction valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight

Table of Contents

M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

Modular F.R.L. Units

Drain cock with barb fitting B B B B B B Dimensions Barb fitting applicable tubing: T0604 Width across flats 17 1/4 Width across flats 17 1/4 Width across flats 17 1/4 Standard specifications Model P1 P2 A B C E F G J K Bracket mount M N Q1 Q2 R S U V AC20C-B 1/8, 1/4 1/8 126.4 87.6 26.5 41.6 40 28.5 2 1 30 43.2 24 33 5.5 12 3.5 29 AC25C-B 1/4, 3/8 1/8 167.4 115.1 28 30 55.1 50 27.5 0 41