Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor)
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor)
Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -
Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 1/2, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -
Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -
Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -
Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1/2, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -
1 15 17 15 7.5 19.5 21 33 14.4 26.4 65 101 106 16 18.3 20 18.3 7.5 24.5 21 38 14.4 31.4 66 104 112 INDEX 374 Series CJ2 Dimensions Double-side bossed (E) CJ2E Bore size Stroke Z NDh8 Mounting nut Section Y detail NDh8 GB YY GA Piping port 2 x M5 x 0.8 NN Y Rod end nut NN MM C B 0 0.3 NB A F NA B 0 0.3 D Section YY detail F H S + Stroke Z + Stroke With air cushion: CJ2E Bore size Stroke AZ
-AZ-PS 100 MGP100-AZ-PS *: Seal kit includes @6 to #0.
AZ Note) MV6 is bar stock body.
PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.
Outboard leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume Mass 1) 14 to 194F (10 to 90 C) for Vespel seat. 2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). 3) Mass, including individual boxed weight, may vary depending on connections or options. 2 Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ
PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.
Contents 16 MGP16-AZ-PS Set of left nos. @6, @7, @8, @9, #0 50 MGP50-AZ-PS Set of left nos. @6, @7, @8, @9, #0 20 MGP20-AZ-PS 25 MGP25-AZ-PS 32 MGP32-AZ-PS 40 MGP40-AZ-PS 63 MGP63-AZ-PS 80 MGP80-AZ-PS 100 MGP100-AZ-PS * Seal kit includes @6 to #0. Order the seal kit, based on each bore size. * Since the seal kit does not include a grease pack, order it separately.
(P.124) 100 Series AP3500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish
PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.
Please contact SMC. 3) Mass, including individual boxed weight, may vary depending on connections or options. 46 Series AK1000 Single Stage Regulator for General Applications Low to intermediate flow AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Option High flow Higher flow capacity
PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.
PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.
Y Z 6 15 3 8 14.5 5 28 15 4.5 9 65.5 1.6 24 16.5 32 M3 x 0.5 16 9.5 M6 x 1.0 51.5 3 5 7 91.5 10 15 4 8 8 5 28 15 4.5 9 60 1.6 24 16.5 32 M4 x 0.7 12.5 9.5 M8 x 1.0 46 5 7 86 16 15 5 8 8 5 28 23 5.5 14 65 2.3 33 25 42 M5 x 0.8 12.5 9.5 M10 x 1.0 47 6 9 90 54 Air Cylinder: Standard Type Double Acting, Single Rod CJ2 Series Dimensions Double foot (M) Stroke With air cushion: CJ2M 10 16 AZ