VCS

LVH LVD LVQ LQ LVN TI/ TIL PA PAX PB 17-2-41 4 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Hygienic Design Cylinder Series HY

16.5 20 26 32 38 50 60 8 10 12 16 20 20 25 30 18 18 20 26 32 32 37 42 12 14 18 25 30 32 40 50 3 3 3 3 3 3 3 3 2 2 2 2 2 2 3 3 13 13 10 10 10 10 12 12 16 16 10 10 10 15 15 15 20 20 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 11 10 14 12 17 17 12 13 14 14 20 20 CJ5

Cylinder

Tel :03-3502-2740 Fax:03-5251-7240 August 1996, 14(RP)

LVQ

Insert bushing Insert bushing LQ-2B07 Nut LQ-2B03 Nut LQ-2N07 LQ-2N03 Tubing Collar Tubing Tubing O.D. 1/4" LQ-2U07 (standard size) Tubing O.D. 1/8" LQ-2U03 (reducer type) How to order fitting parts LQ 2 U 03 Type U is recommended when changing tubing sizes.

VCB

LVH LVD LVQ LQ LVN TI/ TIL PA PAX PB 17-2-23 4 For details about certified products conforming to international standards, visit us at www.smcworld.com.

70pvvna

LVH LVD LVQ LQ LVN Component Parts No.

VVXA21/22

VN LVC LVA LVH Variations LVD LVQ Valve Material Base, Body Seal Aluminum NBR, FKM, EPDM LQ Common SUP Individual SUP Common SUP Individual SUP Port A Port A Normally closed (N. C.) LVN Port P TI/ TIL Port P Port P PA Port A PAX Port A Port A PB Normally open (N. O.)

VXA21/22

Note) Refer to page 17-3-14 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications.

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

Fluoropolymer Piping Equipment

Applications Pressure feed of chemical liquids Water trap Fluid temperature control Fluid outlet Discharge of chemical liquids N2 Mounting to the piping and/ or fluid passage Fluid inlet LQ series Male connector LQHB series Bore through connector LQ series Male connector LQHB series Bore through connector LQHB series Bore through connector Temperature sensor Fluid LQ series Male connector

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

High Purity Fluoropolymer Fittings/Needle Valve/Tubing HYPER FITTING Series LQ 1 2 HYPER FITTING Series LQ 1 2 V Quadruple seal construction (PAT.)

VND

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 Body material: Bronze, Stainless steel VXA Cylinder actuation by external pilot air VN LVC LVA Large valve capacity PTFE seal LVH LVD LVQ LQ LVN Wide variations TI/ TIL 2 types N.C., N.O.

Title not found

Zuazobidea 14, Pol. Ind. Jundiz, E-01015 Vitoria Phone: 945-184 100, Fax: 945-184 124 Belgium SMC Pneumatics N.V./S.A. Nijverheidsstraat 20, B-2160 Wommelgem Phone: 03-355-1464, Fax: 03-355-1466 Greece S.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

Insert bushing LQ-2B07 Nut LQ-2N07 Insert bushing LQ-2B03 Nut LQ-2N03 Tubing Collar Tubing Tubing O.D. 1/4" LQ-2U07 (Basic size) Tubing O.D. 1/8" LQ-2U03 (Reducer type) How to order fitting parts Type U is recommended when changing tubing sizes.

High Purity Chemical Valve

Insert bushing LQ-2B07 Nut LQ-2N07 Insert bushing LQ-2B03 Nut LQ-2N03 Tubing Collar Tubing Tubing O.D. 1/4" LQ-2U07 (Basic size) Tubing O.D. 1/8" LQ-2U03 (Reducer type) How to order fitting parts Type U is recommended when changing tubing sizes.

Digital Flow Switch (Remote type sensor unit)

If the PF2D5 and LQ fluoropolymer fittings series are ordered separately, it is not possible to assemble them with the tubing insertion tool of the LQ series. Please send them back to SMC. After assembling it, it will be delivered to you. -6No.PF-OMG0006-F Wiring Do not pull the lead wires. In particular, never lift a product equipped with fitting and piping by holding the lead wires.

High Purity Fluoropolymer Needle Valve Series LVN 1

S) D H VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN A port LVC 2-G LVA LVH SMC LVD SMC (J) C LVQ LQ E LVN TI/ TIL PA F K B port E PAX PB A B C D E F G H J K S LVN20 LVN30 LVN40 Model 48 60 72 2.4 7.5 8.0 18 24 30 20 26 33 14 25 25 4 5 6 6 9 11 34.5

VVX31/32/33

$ ) VX3 Series VVX32 VXA VN LVC LVA LVH Series VVX31 LVD Variations LVQ Electrical entry Valve LQ * + * %( * #, * %( % LVN " . " . TI/ TIL " " Material PA " $ % % .(( !"

Table of Contents

17 14 17 19 14 17 19 17 19 Connection thread 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 1 4 3 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 26.1 18.0 14 8 18.5 KQ2F16 Applicable tubing 17 41.5 29.5 21 10 Connection thread 19 14 12 58.3 46.1 22 19 18 15 19 24 81 (81) 113 (96) 24 25.7 16 24 25 Note 1) D2: Max. diameter Note 2) ( ): Values for soft nylon 15-2-14 6 One-touch Fittings Series KQ2

Thermo-chiller/Rack Mount Type

L/min) For Option MT: 0.32 (at 10 L/min)/0.32 (at 14 L/min) Circulating fluid system Rated flow (50/60 Hz)7 [L/min] 7/7 For Options T, MT: 10/14 Flow display range20 [L/min] 2 to 16 Electric conductivity display range [S/cm] 0.1 to 48 (Only for Option DM) Electric conductivity setting range [S/cm] 0.5 to 45 (Only for Option DM) Particle filter nominal filtration rating19 [m] 5 Bypass valve19