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_~M~a~jo~r~D~im~e~n~s~io~n~s~_ ___ (mm) Clamp Cylinder: Series CK1 SpCpd controller Cushion valve N s-t-Strok.e ___ _ -, ...!t ,r' M -1 6X 1. 5 \ ~~-.~. . I~r ~ 1~ -~ -~t l -,? ~ . ~ I 'S " .. ! /'Vvf..>---'---r-'-~ /i . -l ,~ -0 I .. .i ~ l d1h across flatsl]" 4M6 Screw depth 1 3 ~J:"!-~/ _ H _ O _ '"_ ' _ ' 2 -.< ",, ' +"."

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(For M8: 0.05 Nm, For M12: 0.1 Nm) EX9-AW ES 11 14 Connector type ES M8 connector (For socket), 10 pcs.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

1

U S Z NS NZ Non-polar r Pilot type Positive common Nil R Internal pilot External pilot !

Shock Absorbers and Rate Controls

(SMAII BORE} UFM10 x t ) UF r/220 uF s/16 18 + UF I-72 [ ' Dtr_ C l' I j rIl l l T F I r H o .L 8 a.22 & _l -! g.3t g 1 R r I -1 .2( 20 F G (otolog llo.

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Vacuum

Black wire: Connect with power source ground. a2 Z$Ml $eni zsMl-T115/-T121 ) 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?rgts' css"e d;s,x{f,#&fx rfse $.lp&q ssllal e*xec9**i*xa:l {see ?"

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Vacuum

Black wire: Connect with power source ground. a2 Z$Ml $enie zsMl-T115/-T121 I 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?

Compact

,.);:-| I Driver unit lt lllnm --i -"r I ' I r_coo-r l]jj ,Tt-r f#posi,ioninsi I | *.!{l ). I direction \ j '--r:_ _ _ System diagram Supply by Lrser comFcrnecFic rouilo|'s $.0nie$ ll( Proilrd tooumr 30 :t0.03. 08; 2mm lead o5 stepping a a a a 80 08; 5mm lead 100 08; 6mm lead t0.05 200 @8; 12mm lead :a]8:?lrrin:Faq l: ':l ' :S? sleptrr.lS 19!1{11n]!

Title not found

TYPe d beains 3 tandard s 'qo ' okd ( fYnI ro r r 2.9r 2 3 . 40' I lo , ?

Air Cylinder MGQ Series Compact Guide Cylinder

TYPe d beains 3 tandard s 'qo ' okd ( fYnI ro r r 2.9r 2 3 . 40' I lo , ?

Title not found

USB cable Contents q Controller setting software (CD-ROM) e Conversion unit w Communication cable (Cable between the controller and the conversion unit) PC e Conversion unit r USB cable (Cable between the PC and the conversion unit) Hardware Requirements PC/AT compatible machine installed with Windows XP and equipped with USB1.1 or USB2.0 ports.

LEJ-OM004xx

(reference value) 11-LEJS40* Speed 600mm/sec Speed 1200mm/sec 100,000,000 100,000,000 10,000,000 10,000,000 ISOclass8 ISOclass8 0/mi n( AN R ) ISOclass6 1,000,000 1,000,000 ISOclass7 ISOclass7 Particl concentration[Particls/m 3] Particl concentration[Particls/m 3] 100,000 100,000 0/mi n( AN R ) ISOclass6 10,000 10,000 ISOclass5 ISOclass5 50/mi n( AN R ) 20/mi n( AN R ) 1,000 1,000 ISOclass4