20

Specifications Table 1: Piping connection type Table 2: Piping connection type Port size Rc1/4 Rc 3/8 NPR 1/4 NPT 3/8 G 1/4 G 3/8 Part No. VMG11-02-X35 VMG11-03-X35 VMG11-N02-X35 VMG11-N03-X35 VMG11-F02-X35 VMG11-F03-X35 Pipe part no. P5670127-100-X33 P5670127-300-X33 P5670127-600-X33 Part No.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1 !2 !3 !4 !5 !6 !7 !8 !

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size Model Port size Pilot port 6 8 10 12 1/4" 5/16" 3/8" 1/2" ASP330F-01 ASP430F-02 ASP530F-03 ASP630F-04 ASP430F-F02 ASP530F-F03 ASP630F-F04 ASP330F-N01 ASP430F-N02 ASP530F-N03 ASP630F-N04 R 1/8 M5 x 0.8 R 1/4 Rc 1/8 R 3/8 Rc 1/8 R 1/2 Rc 1/4 R 1/4 G 1/8 R 3/8 G 1/8 R 1/2 G 1/4 NPT 1/8 10-32 UNF NPT 1/4 NPT 1/8 NPT 3/8 NPT 1/8 AS NPT 1/2 NPT 1/4 Note

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: F03 (Screw-in G3/8), VAC: F03 (Screw-in G3/8), EXH: F03 (Screw-in G3/8)

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: S (-90 kPa), SUP: F03 (Screw-in G3/8), VAC: F03 (Screw-in G3/8), EXH: F03 (Screw-in G3/8), Accessories: N (w/o Bracket, w/o Silencer)

CATALOG

S I Z E Symbol Cylinder Side Pilot Port 01 R(PT)1/8 M5x0.8 02 R(PT)1/4 Rc(PT)1/8 03 R(PT)3/8 Rc(PT)1/8 04 R(PT)1/2 Rc(PT)1/4 F02 R(PT)1/4 G(PF)1/8 F03 R(PT)3/8 G(PF)1/8 F04 R(PT)1/2 G(PF)1/4 N01 NPT1/8 10-32UNF N02 NPT1/4 NPT1/8 N03 NPT3/8 NPT1/8 N04 NPT1/2 NPT1/4 Courtesy of Steven Engineering, Inc. !

Made to Order

Intermediate strokes (1 to 99 mm) are available in 1 mm increments.

V

S I Z E Symbol Cylinder Side Pilot Port 01 R(PT)1/8 M5x0.8 02 R(PT)1/4 Rc(PT)1/8 03 R(PT)3/8 Rc(PT)1/8 04 R(PT)1/2 Rc(PT)1/4 F02 R(PT)1/4 G(PF)1/8 F03 R(PT)3/8 G(PF)1/8 F04 R(PT)1/2 G(PF)1/4 N01 NPT1/8 10-32UNF N02 NPT1/4 NPT1/8 N03 NPT3/8 NPT1/8 N04 NPT1/2 NPT1/4 Courtesy of Steven Engineering, Inc. !

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

70pvpump

Port size on the side of main fluid Rc 3/8 G 3/8 NPT 3/8 NPTF 3/8 3/8" tubing 3/8" tubing 3/8" tubing 3/8" tubing 1/2" tubing 1/2" tubing 1/2" tubing 1/2" tubing Connection size in the side of air 03 F03 Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads PA331 (Assembled in normal environment) PAP331 (Assembled in clean room) For areas where it is not possible to manually operate the reset button

pa

Port size on the side of main fluid Rc 3/8 G 3/8 NPT 3/8 NPTF 3/8 3/8" tubing 3/8" tubing 3/8" tubing 3/8" tubing 1/2" tubing 1/2" tubing 1/2" tubing 1/2" tubing Connection size in the side of air 03 F03 Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads PA331 (Assembled in normal environment) PAP331 (Assembled in clean room) For areas where it is not possible to manually operate the reset button

C95

Rod end nut Tie-rod nut Tie-rod Cushion ring B Cushion ring A 1 6-1 1 6-2 4 u i o !

MNB

8 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/8 1/8 1/8 1/8 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 13 13 14 14 20 20 25 31 38.5 39.5 45.5 54 7 9 9 9 12 14 3 3 2 2 4 4 10 10 12 12 16 16 72 83 100 115 126 150 38 46 52 62 63 75 87 101 120 135 153 178 56 65 77 92 100 120 54 63 75 90 102 116 Bore size (mm) 32 40 50 63 80 100 K MM N P Q H S T V W ZZ VA GA GB GC GD J GL GL1 GR GE GF 8.5 10 12.5 17.5 22 25

C95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Precision Regulator

. 0.8 MPa 2 AP100 Connection Rc 1/8 01 Connection Rc 1/4 02 Connection Rc 3/8 03 Connection Rc 1/2 04 Bracket B Accessory Pressure gauge G Bracket, name plate reverse mounted R Connection NPT 1/8 IR2000 series N01 Connection NPT 1/4 N02 Connection NPT 3/8 N03 Connection NPT 1/2 N04 Connection G 1/8 F01 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 IR1000 series

ITV

Return 0.5 0.4 0.2 0 0 Out 0.2 0.4 0.5 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

Precision Regulator Series IR1000/2000/3000

IR3000 Connection Rc 1/8 01 Connection Rc 1/4 02 Connection Rc 3/8 03 Connection Rc 1/2 04 Bracket B Accessory Pressure gauge G Pressure gauge reverse mounted R Connection NPT 1/8 N01 Series IR2000 Connection NPT 1/4 N02 Connection NPT 3/8 N03 Connection NPT 1/2 N04 Connection G 1/8 F01 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 Series IR1000 Modular and Accessory Combinations