Air Slide Table

Stroke A [mm] Shock Absorber/RJ Model A B C D E Applicable shock absorber unit model MXQ12(A, C) MXQ8B 47.3 29 19 28 18 RJ0805U-X2300 MXQ16(A) MXQ12B 52.8 31 19 30 18 RJ1006U-X2300 MXQ20(A) MXQ16B 52.8 23 11 26 14 RJ1007HU-X2300 MXQ25(A) MXQ20B 77.1 46 31 45 30 RJ1410U-X2300 [mm] Metal Stopper Model A B C D E MXQ6(A) 40 25 20 23 18 MXQ8(A, C) MXQ6B MXQ12(A, C) MXQ8B 45 27 20 26 19 MXQ16(

JIS Standard Hydraulic Cylinder

(mm) With rod boot Stroke range (mm) Bore size (mm) e f B C F GA GB J M NA NB P R S T l Q B-rod C-rod B-rod C-rod 32 21.5 15 52 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 25 to 1400 40 12 15 52 52 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 25 to 1400 1/3.5 stroke 50 15 15 52 55 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 25 to 1400 63 15 20 55 65 90 63 15 42 19 M12 x 1.5

IDG

(Maintenance space 100 mm or more) Purge air discharge tubing port for dehumidification Applicable tubing I.D. : 19 (NPT threads: 3/4 inch) With float type auto-drain With drain guide Port size A B C D E F G H K L M N Model P 255 276 Q 241 262 IDG60M/60HM IDG75M/75HM/100M/100HM 191 186 101 80 365 204 202 104 90 368 241 262 16 19 129 147 7 9 95 108 50 55 22 25 3/8, 1/2 1/2 14-19-42 39 Series

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT (3) Outline drawing (a) EMC filter HF3010A-UN [Unit: mm] 3-M4 4-5.5 7 3-M4 M4 32 2 110 4 85 2 IN Approx.41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN HF-3040A-UN 6-K 3-L 3-L G 1 F 2 E 1 D 2 M J 2 C 1 C 1 H 2 B 2 A 5 Dimensions [mm] Model A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25, M5 M4 length 8 HF3040A-UN 260 210 85 155 140 125

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

26 Width across flats 36 40 40 62 62 2-19 through 182 226 3 5.5 With flat washer 4 pcs.

Table of Contents

4 2 Special resin Scraper Piston seal Cushion seal Tube gasket O-ring O-ring 2 2 2 2 NBR NBR NBR NBR NBR NBR #0 #1 #2 #3 #4 #5 GMY50 GMY63 MC-16 P53 8.3 x 4.5 x 1.9 C-14 GMY100 MC-30 P90 GMY80 MC-25 P70 P44 MC-20 C-12.5 C-4 C-6 C-6 4 2 P24 P22 Note) Two types of dust seal band are available.

Compact 5-Port Solenoid Valve

SUP/EXH (Common for the 3/5 port) Valve stations 2 to 24 stations 2 to 18 stations 2 to 8 stations 2 to 24 stations 2 to 18 stations 2 to 8 stations Flat ribbon cable connector conforming to MIL-C-83503 (Refer to page 41.)

ZP

C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2-6020W ZP2-8020W ZP2-4030W ZP2-5030W ZP2-6030W ZP2-8030W 2 x 1.5 0.5 0.5 0.5 10 2 x 2.5 11 2.5 0.8 0.8 Adapter Mounting Dimensions If an adapter

0.4

B A C B A C B A C B A C B A C B A C B A C kit 98.6 (Double, Dual 3 port valve) P 94.1 (Single) 107.6 (3 position) 9 kit 5.5 67.9 35 J 47.1 34.3 kit 28.1 12.7 T kit 2 x M4 DIN rail clamp screw EXH outlet 49.4 L U side D side Stations n 8 7 6 5 4 3 2 1 kit One-touch fitting 9 60 [3(R), 1(P) port] Applicable tubing O.D.: 8 For top ported S kit 4 4 4 4 4 4 4 4 3 R (49.4) 2 P 1 2 2 2 2 2 2 2 37

5 Port Solenoid Valve Series SV1000/2000/3000/4000

(With 2 input blocks) With External Pilot Specifications 46.5 (Pitch) Ground terminal 16.5 13.5 P=10.5 14.1 8.4 18.3 2 x M12 8.6 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 17.7 24.6 23 59.5 3 PWR 3 3 3 3 5 E 5 3 E 3 5 E 5 3 E 42.7 PWR 43 T T 56.5 2 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P 1 1 1 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" BUS

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure

1

16 20 25 c + Stroke 378.5 115 132.5 45 37.5 45 50 80 M42 x 1.5 NCA (61.1) 56.1 (27) 22 14 19 7 11 5 3.5 378.5 115 132.5 45 37.5 50 50 80 M42 x 1.5 5 to 30 h + Stroke + Adjustment (61.5) 56.5 (27) 22 14 19 7 11 5 3.5 476 140 175 55 50 60 70 110 M56 x 2 ZZ + 2 x Stroke + Adjustment (A: 25 mm, B: 50 mm) D(77.5) 67.5 (36) 26 20 22.5 10 17 8 4.5 496 140 175 55 50 70 70 110 M56 x 2 5 to 50 (81

MG

st to 100 st 68 78 93 98.5 Bore size (mm) FB B Over 100 st 117 117.5 30 st or less 56 62 76 82.5 18 18 19 19 55 59 66 66.5 12 16 20 25 2.

ISO Cylinder

45 + 15 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 Band mounting Band mounting (n 2) 2 15 + 40 D-C7l D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6) D-C7l D-C80 10 15 50 50 + 20 (n 2) (n = 2, 4, 6) (n = 2, 4, 6) (n = 2, 4, 6) D-H7l D-H7lW D-H7BA D-H7NF D-H7l D-H7lW D-H7BA D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) 10 15 60 60 + 22.5 (n 2) (n = 2, 4, 6) (n=2, 4, 6) (n 2) 2 15

CQ2

2 !3 !

ZP

(M6: 8, M8: 12) Hexagon width across flats I Elliptic Hexagon width across flats G Hexagon width across flats e Flat with ribs c a d b Flat/Thin Flat/Thin Flat with Ribs Flat/Flat with Ribs H: M6 x 1 H: M8 x 1 Y E G D E H: M5 x 0.8 H: M6 x 1 G B C E F G I C E F G I Flat Flat with ribs D Model A Model A B C Y D ZPT02U 2 4 6 8 U C U C U C 2.6 4.8 7 9 1.2 1.6 ZPT20 1.7 23 20 14 19 8 3.5 45

M-E05-1-LQ1

-5N12 LQ1-5B12 Tubing extensions 19 x 16 5-19 LQ1-5N19 LQ1-5B19 LQ1T51-TT1-R13 5 2-06 LQ1-2N06 LQ1-2B06 5-19 LQ1-5N19 LQ1-5B19 LQ1T51-TT1-R37 5 6-19 LQ1-6N19 LQ1-6B19 Tubing extensions 25 x 22 6-19 LQ1-6N19 LQ1-6B19 LQ1T51-TT1-R38 5 2-06 LQ1-2N06 LQ1-2B06 5-19 LQ1-5N19 LQ1-5B19 LQ1T51-TT2-R4 5 Tubing extensions 19 x 16 2-06 LQ1-2N06 LQ1-2B06 5-19 LQ1-5N19 LQ1-5B19 LQ1T61-TT1-R1 6 6-25 LQ1

ZP

C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2-6020W ZP2-8020W ZP2-4030W ZP2-5030W ZP2-6030W ZP2-8030W 2 x 1.5 0.5 0.5 0.5 10 2 x 2.5 11 2.5 0.8 0.8 Adapter Mounting Dimensions If an adapter

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l B C F GA GB J M NA NB P R S T e f Q 32 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 52 21.5 15 25 to 1400 1/3.5 stroke 40 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 52 12 15 25 to 1400 50 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 55 15 15 25 to 1400 63 90 63 15 42 19 M12 x 1.5 14 43 35 1/2 52 163 15 65 15 20 25 to 1500

High Purity Fluoropolymer

Class Size combination Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Connection threads Symbol 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Connection threads A A B C D E F A B C D A B C D A B C D A B C D Applicable tubing size (inch) No.