2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Compact

(1100), (1200), (1300), (1400), (1500) Page 170 2000 20 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 25 10 LEMHT Linear guide double axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000), (1100), (1200), (1300), (1400), (1500) Page 170 32 2000 20 Strokes shown in ( ) are produced upon

CLS

75 133 406 Up to 1400 98 298 383 393 433 507 532 406 416 454 525 550 M30 x 1.5 8 9 0.2 stroke 184 98 393 30 to 1400 75 133 416 98 298 Up to 1400 M30 x 1.5 0.2 stroke 204 106 433 75 141 454 106 338 30 to 1400 Up to 1400 M36 x 1.5 25 31 41 0.2 stroke 228 111 503 85 153 521 115 402 30 to 1800 Up to 1500 M40 x 1.5 M12 x 1.75 0.2 stroke 257 111 523 90 153 541 120 427 30 to 1800 Up to 998

Cylinder with Lock Series CLS

30 to 1400 0.2 stroke M30 x 1.5 35 1/2 164 98 5 30 337 36 98 75 40 133 360 337 360 Up to 1400 30 to 1400 0.2 stroke M30 x 1.5 35 1/2 184 98 5 30 8 337 36 98 75 40 133 360 337 360 Up to 1400 30 to 1400 0.2 stroke M36 x 1.5 39 3/4 204 106 5 30 9 380 45 75 40 141 401 106 380 401 Up to 1500 M12 x 1.75 30 to 1800 0.2 stroke M40 x 1.5 25 39 3/4 228 111 439 45 457 115 461 85 45 153 443 Up to

Cylinder with Lock Series CLS

50 47 161 78 18 2 160 110 146 128 36 20 212 112 255 16 114 64 M14 x 1.5 to 1400 56 53 182 95 23 5 180 132 169 144 40 20 236 118 275 18.5 130 74 M16 x 1.5 to 1400 (mm) Bore size (mm) Stroke range (mm) 125 140 160 K KA M MM N P S W H ZZ 15 31 19 M30 x 1.5 35 1/2 98 110 337 to 1400 15 31 19 M30 x 1.5 35 1/2 98 8 110 337 to 1400 17 36 22 M36 x 1.5 39 3/4 106 9 120 380 to 1400 For long strokes

Table of Contents

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

Combination Cylinder

(mm) Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 AL B B1 BX BY BP C D EA EB F GA GB GC H1 J K KA LH FA LD With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to1400 30 to 1400 30 to 1400 Without rod boot to 500 to 600 to 600 to 750 to 750 to 1400 to 1400 to 1400 1 4 1 4 1 4 1 4 1 4 1 2 1 2 3 4 / / / / / / / / 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20

Environment

A Work load [kg] Work load [kg] LEJ LEJ 40 Lead 20: LEJS63A Lead 16: LEJS40A Lead 30: LEJS63H 30 Lead 24: LEJS40H LEL A 20 A LEM 10 A A 0 LEY 0 200 400 600 800 1000 1200 1400 1600 1800 0 200 400 600 800 1000 1200 1400 1600 1800 Speed [mm/s] Speed [mm/s] LES Vertical Vertical LEPY LEPS 10 20 Lead 10: LEJS63B Lead 8: LEJS40B A Area where the regeneration option is required.

Table of Contents

47.3 41 M14 x 1.5 52.5 30 7.5 23 32 40 50 to 100 Rc P EA Rc P EA GA NE 8-J GA WH ND H1 MM I D E E Effective thread K FA JC JC FB A NF C H S + Stroke B ZZ + Stroke H 50 0.042 GA 80 FB 16 FA 10 EA 23 D 62 C 20 A B 53 E Bore size (mm) Stroke range (mm) Eff. thread length 50 35 70 32 Up to 1200 0 63 80 16 10 23 58 20 60 35 80 32 Up to 1200 55 0.074 0 80 90 20 10 23 61 25 75 40 95 37 Up to 1400

Electric Actuator / Low profile slider type

LEMH 25 25 LEMHT32 LEMH32 20 20 Workload m[kg] Workload m[kg] 15 15 LEMHT25 LEMH25 10 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 0 200 400 600 800 1000 1200 1400 Support spacing [mm] Support spacing [mm] 6.2 Handling Caution 1.

CS1

Stroke (mm) Tube material Aluminum alloy Carbon steel tube Mounting bracket Basic Rear flange Single clevis Double clevis Center trunnion Basic Rear flange Single clevis Double clevis Foot Front flange Foot Front flange Bore 125 1000 or less 1400 or less 1000 or less 1600 or less 140 1000 or less 1400 or less 1000 or less 1600 or less 160 1200 or less 1400 or less 1200 or less 1600 or less

Cylinder with Lock Series CNS

to 1600 Individual -X 551 0.2 stroke 133 36 184 30 to 1400 1401 to 1600 612 0.2 stroke 141 45 204 30 to 1400 1401 to 1600 Not available with auto switches. 765 Series CNS Dimensions Rod side flange style (F): CNSF M Rc BQ plug with breathing hole BC element T GB GA FA 4 x J 4 x FD Width across flats KA BP (Rc, NPT, G) Unlocking port 2 x P (Rc, NPT, G) Cylinder port GL GR G G MM Q D EA E

33

Q = qm x C x (T2 T1) r x qv x C x iT 60 = 1 x 10 x 4.2 x 103 x 2.0 60 = Q = qm x C x (T2 T1) 860 = 1400 [J/s] 1400 [W] g x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 1400 [W] x 1.2 = 1680 [W] 1 x 10 x 60 x 1.0 x 103 x 2.0 860 = qv: Circulating fluid flow rate Q: Heat generation amount Users equipment T2: Return temperature 120 [cal/h] 860 = Thermo-chiller

CL

Up to 1400 Up to 1400 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 59 44 52 64 78 92 115 128 144 30 35 35 40 40 50 50 56 6.5 6.0 6.0 8.0 8.0 43 43 43 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1400 30 to 1400 30 to 1400 69 16 20 20 25 30 36 36 40 27 32 32 37 37 47 47 53 14 14 14 40 50 55 65 80 90 90 90 60 70 86 102 116 145 161 182 15 17 17 21 21 16 16 18.5 32

CL

Up to 1400 Up to 1400 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 59 44 52 64 78 92 115 128 144 6.5 6.0 6.0 8.0 8.0 43 43 43 30 35 35 40 40 50 50 56 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1400 30 to 1400 30 to 1400 69 16 20 20 25 30 36 36 40 14 14 14 27 32 32 37 37 47 47 53 40 50 55 65 80 90 90 90 15 17 17 21 21 16 16 18.5 60 70 86 102 116 145 161 182 32

CNS

15 31 19 M30 x 1.5 35 1/2 343 20 28 110 472 95 93.5 35 35 35 M16 x 1.5 17 36 22 M36 x 1.5 39 3/4 396 25 35 120 538 109 104 With Rod Boot Long Stroke Stroke range (mm) Stroke range (mm) Bore size (mm) Bore size (mm) l ZZ1 h RT RY 125 140 160 125 140 160 455 0.2 stroke 133 36 164 Up to 1400 1401 to 1600 495 0.2 stroke 133 36 184 Up to 1400 1401 to 1600 559 0.2 stroke 141 45 204 Up to 1400

Cylinder with Lock Series CNS

31 19 M30 x 1.5 35 1/2 93.5 343 95 20 28 110 472 35 35 35 M16 x 1.5 17 36 22 M36 x 1.5 39 3/4 104 396 109 25 35 120 538 With rod boot (mm) For long strokes (mm) Stroke range (mm) Stroke range (mm) Bore size (mm) Bore size (mm) l ZZ1 h RT RY 125 140 160 125 140 160 455 0.2 stroke 133 36 164 to 1400 1401 to 1600 495 0.2 stroke 133 36 184 to 1400 1401 to 1600 559 0.2 stroke 141 45 204 to 1400

0.5

1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm] IZF10R 25 IZF10R IZF10R 25

Mechanically Jointed Rodless Cylinder Series MY1

) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1CW32 MY1CW32 l l (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1CW25 MY1CW25 (1000) (1000) (1000) (1000) MY1MW20 MY1MW20 30 30 (1000) (900) (1000) (900) (1000) (900) (1000) (900) Caution MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) (900

Digital Flow Switch (Integrated display type) ( compatible)

0x055F 0x006A to 0x055F 0x0057 to 0x055F 0x0046 to 0x0578 0x0050 to 0x0578 (n1L/n2L) (87 to 1375) (106 to 1375) (87 to 1375) (70 to 1400) (80 to 1400) P1H/P2H 0x0057 to 0x055F 0x006A to 0x055F 0x0057 to 0x055F 0x0046 to 0x0578 0x0050 to 0x0578 (n1H/n2H) (87 to 1375) (106 to 1375) (87 to 1375) (70 to 1400) (80 to 1400) H1/WH2 0x0 to 0x0284 0x0 to 0x027A 0x0 to 0x0284 0x0 to 0x0299 0x0 to