4-channel Flow Monitor ( compatible)

Item Display Content Setting of connection product [4L] 4 L range [16L] 16 L range [40L] 40 L range [PFW] is selected [100L] 100 L range [250L] 250 L range [10L] 10 L range [rAnG] [50L] 50 L range Selection of flow range [100L] 100 L range [PFA] is selected [200L] 200 L range [500L] 500 L range [4L] 4 L range [PFd] is selected [16L] 16 L range [40L] 40 L range Press the SET button to set.

air-filter-e

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

Lubrication Equipment

size 06 10 12 14 20 3/4 ALDU600 (With panel) 1 11/4 11/2 2 Float switch specifications 200V AC, 200V DC 10W DC, 12V AC 0.6A AC, 0.5A DC 1a, 1b Bottom limit indication Voltage Max. cut off capacity Max. cut off current Contact point construction Level indication 1.17-16 ALD600/900 Piping example Flow Characteristics Condition: Primary pressure 0.5MPa, Pressure differential setting flow 250l

PA3000/5000/PAX1000

type PA3113 Symbol PA3213 PA5113 PA5213 Main fluid suction/ discharge port Rc 1/2, 3/4 Rc 3/8 FLUID OUT P1 P2 Port size Pilot air supply/ exhaust port Rc 1/4 Liquid contact areas ADC12 SCS14 SCS14 ADC12 FLUID IN Material Diaphragm PTFE Check valve PTFE, PFA Air operated type Discharge rate 0.1 to 12l/min 1 to 24l/min Average discharge pressure 0 to 0.4MPa Maximum 150l/min (ANR) Maximum 250l

Compact Hydraulic Cylinder

75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) M10 x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 125L x 150L x 175L x 200L x 225L x 250L

Air Preparation Equipment

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

Low Maintenance Filter Series FN1

Element type 0 Cylindrical type 1 Step type Note) Filtration Note) Only 5m of filtration is available. 005 020 5m (Cylindrical type, Step type) 20m (Cylindrical type) Element length 1 250mm 2 500mm Element material S Stainless steel SUS304 Seal material Port size N NBR V FPM 10 Rc 1 Specifications Filter FN1101 FN1 FN1102 FN1112 Model Element dimension Fluid Operating pressure 65 x 250l Cleaning

Process Pump Series PA3000/5000/PAX1000 Series PB1000

suction/ discharge port 1/2, 3/4 3/8 FLUID OUT P1 P2 Port size Pilot air supply/ exhaust port 1/4 Liquid contact areas ADC12 SCS14 SCS14 ADC12 FLUID IN Material Diaphragm PTFE Check valve PTFE, PFA Air operated type Discharge rate 0.1 to 12l/min (0.003 to 0.4SCFM) 1 to 24l/min (0.03 to 0.85SCFM) Average discharge pressure 0 to 0.4MPa (0 to 58psi) Maximum 150l/min (ANR) (5.3SCFM) Maximum 250l

Process Pump Series PA3000/5000/PAX1000 Series PB1000

type PA3113 Symbol PA3213 PA5113 PA5213 Main fluid suction/ discharge port Rc 1/2, 3/4 Rc 3/8 FLUID OUT P1 P2 Port size Pilot air supply/ exhaust port Rc 1/4 Liquid contact areas ADC12 SCS14 SCS14 ADC12 FLUID IN Material Diaphragm PTFE Check valve PTFE, PFA Air operated type Discharge rate 0.1 to 12l/min 1 to 24l/min Average discharge pressure 0 to 0.4MPa Maximum 150l/min (ANR) Maximum 250l

Battery-less

. *3 Position after returning to origin *4 [ ] for when the direction of return to origin has changed Dimensions [mm] Model L A B n D E F Without lock With lock LEFS25El-50l 285.5 330.5 56 160 4 20 LEFS25El-100l 335.5 380.5 106 210 4 LEFS25El-150l 385.5 430.5 156 260 4 LEFS25El-200l 435.5 480.5 206 310 6 2 240 LEFS25El-250l 485.5 530.5 256 360 6 2 240 LEFS25El-300l 535.5 580.5 306 410

CHKD/CHKG

(M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) CQ-M10 x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 125L x 150L x 175L x 200L x 225L x 250L

Hydraulic

L (Example) A93L 5m. Z (Example) F9NWZ Note) Solid state switches marked "" are produced upon receipt of order. Note) For cylinders with auto switches, the switches (already attached to mounting brackets) are packed together with the cylinder for shipment, but are not mounted on the cylinder.

Microspeed Cylinder

L (Example) A93L 5m . Z (Example) F9NWZ Solid state auto switches with a "" symbol are produced upon receipt of order.

MXS

NPN) F9NV F9N 3 wire(NPN) Diagnostic indication (2 color) F9PV F9P 3 wire(PNP) P.5.3-39 F9BV F9B 2 wire Relay, PLC 24V Yes Grommet 12V F9NWV F9NW 3 wire(NPN) F9PWV F9PW P.5.3-66 3 wire(PNP) F9BWV F9BW 2 wire PLC: Programmable Logic Controller *Lead wire length 0.5m (Ex.) 3m L A93 A93L Specifications Specifications are same as the standard style.

Rotary Table/

A93 A93L F9NWZ (Example) (Example) (Example) 13 Rotary Table Series MSQ Specifications 10 20 30 50 70 100 200 Size Air (non-lube) Fluid Maximum operating pressure Minimum operating pressure 1MPa With adjustment bolt Note 1) 0.6MPa With internal shock absorber 0.1MPa Basic type 0.2MPa 0.1MPa High precision type 0 to 60C (with no condensation) Ambient and fluid temperature Rubber bumper With

MXS Series Air Slide Table

L A93L Note) Refer to P. 177 to 179 for further information of auto switch. PLC: Programmable Logic Controller Specifications Specifications are same as the standard type.

Table of Contents

Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ In addition to the models in the above table, there are some other auto switches that are applicable.

Table of Contents

Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) M9NZ Refer to page 8-28-27 for additional details and applicable auto switches other than the above types.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

wire length (m) Load voltage Auto switch model Electrical entry direction Wiring (Output) Special function Electrical entry Indicator light Style 0.5 (Nil) 3 (L) Applicable load AC DC 12V Horizontal 100V 24V Reed switch 2-wire Relay, PLC Grommet Yes A93 12V 3-wire (NPN) M9N 24V Solid state switch Relay, PLC Grommet Yes 12V 2-wire M9B Lead wire symbol 0.5mNil (Example) A93 3mL A93L

CRQ2

Indicator light Special function Electrical entry Wiring (output) Electrical entry direction 0.5 (Nil) 3 (L) 5 (Z) Applicable loads Type DC AC Perpendicular In-line A96 A96V 3 wire (NPN equiv.) 5V IC circuit A96L A96VL Reed switch Solid state switch Yes A93 A93V 100V Grommet A93L A93VL Relay, PLC 2 wire 24V A90 A90V 5V, 12V No 100V or less IC circuit A90L A90VL F9N F9NV