NCQ8

L M9NL 197in (5 m) .

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Lead wire length symbols:0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-4 5 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 30 Model/Specifications Nominal size 10 15 20 Action Double acting Gripping force (N) (1) External grip 12 24 33 58 (Effective value) at 0.5 MPa Internal grip 12 34

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL 5 m Z (Example) M9NZ MA D491 Series MHR2/MDHR2 Model/Specifications Nominal size 20 10 15 30 Double acting Action Gripping force (N) (1) External grip 33 12 58 24 (Effective value) at 0.5 MPa Internal grip 34 12 59 25 Finger closing width (mm) Finger opening width (mm) 16 10 19 14 Opening/ Closing

Rotary Gripper Series MRHQ

L M9NL 5 m . Z M9NZ Refer to page 731 for further information on auto switches. Order with an auto switch part number when ordering a single auto switch unit. Auto switches marked with a "" are made upon receipt of order.

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Table of Contents

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.

Table of Contents

, 12 V A93 A90 M9N M9P M9B F9NW F9PW F9BW A93V A90V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC IC circuit 100 V or less No 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V Grommet Relay, PLC Yes 24V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Solid state switch Yes Yes Grommet Relay, PLC A93 A93V 2-wire 12 V 24 V 100 V M9N M9NV 3-wire (NPN) IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) Relay, PLC M9B M9BV 2-wire 12 V 24 V Grommet F9NW F9NWV 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL

PAB-OM-O003

port Rc,NPT,G 1/8 Female thread, 1/4 PFA tube, LQ1 size 2 with nuts, LQ3 size 2 with nuts Port size Pilot air Supply / Exhaust port Rc,NPT,G 1/8 Female thread Body wetted areas New PFA Diaphragm PTFE Material Check valve New PFAPTFE Liquid contact seals PTFE Maximum discharge rate 1000mL/min Note1) Average discharge pressurer 0 to 0.4MPa Pilot air pressure 0.2 to 0.5MPa Air consumption 15L

Process Pump

Specifications and how to order Specifications Model PAF3413 Actuation Air operated Main fluid: Suction/Discharge port RcGNPT 3/8 Female thread, 1/2 Tube extension, With nut (size 4, 5) Port size Pilot air: Supply/Exhaust port Rc, G, NPT 1/8 Body wetted areas newPFA Material Diaphragm/Seal PTFE Check valve newPFA, PTFE Discharge flow rate 1 to 15L/min Average discharge pressure 0 to 0.4MPa

Microspeed Cylinder

Measuring conditions 10-CQSXB20-50D Chamber volume Cleanliness of air supplied to chamber 15l (0.53ft3) Same quality as supply air Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia. 0.1m Intake rate 28.3l/min (0.99CFM) Sampling time: 5min Interval time: 55min Operation frequency: 30cpm Average piston speed: 100mm/s (3.9inls) Mounting: Horizontal no-load Supply

Table of Contents

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

ZR

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

PFMV5

PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) For 2 stations 2 L-type brackets, 2 mounting screws M3 x 25L PF2W For 3 stations 2 L-type brackets, 2 mounting screws M3 x 35L For 4 stations 2 L-type brackets, 2 mounting screws M3 x 45L PF2D For 5 stations 2 L-type brackets, 2 mounting screws M3 x 55L IF 951

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

Measuring conditions 10-CQSXB20-50D Chamber volume Purity of air supplied to chamber 15l Same quality as supply air Evaluation of air purity inside chamber 100 Particle concentration (particles/cf) Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia.: 0.1m Intake rate: 28.3l/min 10 Laser dust monitor 1 Sampling time: 5min Interval time: 55min Operation frequency

Flow Sensor Series PFMV

PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) 2 L-type brackets, 2 mounting screws M3 x 25L For 2 stations PF2W 2 L-type brackets, 2 mounting screws M3 x 35L For 3 stations 2 L-type brackets, 2 mounting screws M3 x 45L For 4 stations PF2D 2 L-type brackets, 2 mounting screws M3 x 55L For 5 stations IF 951 Series

！ Contact our sales office regarding a delivery date or a price since this is a special model. SP158X-002E P.G.Information (Specialized Product) P: TS SMC Corporation Liquid Dispense Pump (Solenoid type) 4-14-1, SOTO-KANDA

Fluid Note4) PEEKPP Body Diaphragm Check valve Fluid contact material EPDMFKM EPDMFKM Repeatability Note1) 1%(2% when the dispense volume is 5 to 15L) *Under SMC's measuring conditions Dispense pressure Note2) 10kPa 15kPa 35kPa Suction pressure Dry Wet Max.operating frequency Note3) 2Hz(Minimum ON time 200msec/Minimum OFF time 300msec) Fluid temperature 10 to 50(No freezing) Ambient temperature

CLA

. '/4 92 CX cz Without boot With boot H Z ZZ os f h , i9"'" size MM N P PG PH PL PW RR S U W .co 1110 (mm) X1US Z ZZ i 40 7 115 20 27 Y. 42 11 20 45 10 153 16 8 10'g' '-'"'' 15l:'. 29.5 51 234 244 43 112 59 242 252 50 30 % 46 10 21 50 12 168 19 0 'v 0 63 V. 16 31 % 48.5 13 23 60 16 182 23 0 W O , 80 37 'I, 55 15 23 70 20 208 28 0 I "u', '0 OJ 38 58 261 273 52 11 .2 66 1/4 "'M 49 58 280 296

MTS

Stroke (mm) Pulling force (N) Thread size Bore size (mm) M2 x 0.4 x 15l or more 12, 16 20, 25, 32 40 1.5 2 M3 x 0.5 x 30l or more 3 2 M3 x 0.5 x 30l or more 4 3 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. Operating Pressure Caution 1. Apply air pressure of at least that shown in the table below to the port on the lock mechanism side.