Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).

Digital Flow Switches, Series PF2A, Series PF2W

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 AC100~240V Pulse counter M/C Flow control for each branch line For Air P.2 50l/min 10l/min 500l/min 200l/min 100l/min 12000l/min 6000l/min 3000l/min Flow rate measurement range l/min Integrated display type Remote type Output specifications Port size (Rc, NPT, G) 1/8 1/4 3/8 1/2 11/2 1 2 Switch output Analog output Accumulated pulse

Slider Type Ball Screw Drive/11-LEFS Series

[mm] Dimensions Model L A B n D E Without lock With lock 11-LEFS32l-50l 332 384 56 180 4 11-LEFS32l-100l 382 434 106 230 4 11-LEFS32l-150l 432 484 156 280 4 11-LEFS32l-200l 482 534 206 330 6 2 300 11-LEFS32l-250l 532 584 256 380 6 2 300 11-LEFS32l-300l 582 634 306 430 6 2 300 11-LEFS32l-350l 632 684 356 480 8 3 450 11-LEFS32l-400l 682 734 406 530 8 3 450 11-LEFS32l-450l 732 784 456

Table of Contents

Vacuum suction port 50l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 104 105 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order

Electric Actuators

Suction at both ends. 50l/min (ANR) 100l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 106 Made to Order/Clean Room Specification Series LJ1H20 Dimensions/LJ1H202 (X60) Scale: 15% When two dimensions are shown, the top dimension is for 100 to 600mm strokes, and the

LJ1H

Vacuum suction port 50l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 104 105 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order

Hydraulic

Example: M5 x 50l 4pcs.

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

Digital Flow Switch (Integrated display type)

to 3 5, 10L range: -1 to 4 25, 50, 100, 200L range: 1300 0x0514 OUT1 uses the unit for accumulated output index value (When unit: "L" is selected) 2 R/W Accumulated output index L S16 0 Y 0 to 5 OUT1 uses the unit for accumulated output set value (When unit: "ft3" is selected) 1 R/W Accumulated output set value ft3 S16 0 Y Setting range 0 to 9 1310 0x051E Setting range 1, 2, 5, 10, 25, 50L

Compact Cylinder with Air Cushion Series RQ

Example) Bolt M5 x 50l 4pcs.

Compact Cylinder with Air Cushion

Example) Bolt M5 x 50l 4 pcs.

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

Table of Contents

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

RQ

Example) Bolt M5 x 50l 4 pcs.

Mounting: L (Axial Foot), Bore Size: 12mm equiv., Stroke: 50mm, Connector: w/Connector, Sensor Cable Length: L (3m), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP

Mounting: L (Axial Foot), Bore Size: 20mm equiv., Stroke: 50mm, Connector: w/Connector, Sensor Cable Length: L (3m), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP

Mounting: Axial Foot, Bore Size: 12mm equiv., Stroke: 50mm, Connector: w/Connector, Sensor Cable Length: 3m, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: -, Number: -

Mounting: Axial Foot, Bore Size: 20mm equiv., Stroke: 50mm, Connector: w/Connector, Sensor Cable Length: 3m, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: -, Number: -

Guide Suffix: T (Linear Guide, Double Axis), Bore Size: 25mm, Port Thread: TF [G (Ø25 & 40)], Stroke: 50mm, Stroke Adjusting Unit: L (Left Side Stroke Adj., w/Low Load Shock Absorber; Right Side Stroke Adj., w/Low Load Shock Absorber), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

[Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 2 axis, Table Size Width W(mm): 176, Table Size Height H(mm): 37, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 38, Piping Format: Centralized piping type, Port Screw Type: G, Specification: Magnet built-in, Auto Switches: M9PW