Microspeed Cylinder Measuring conditions 10-CQSXB20-50D Chamber volume Cleanliness of air supplied to chamber 15l (0.53ft3) Same quality as supply air Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia. 0.1m Intake rate 28.3l/min (0.99CFM) Sampling time: 5min Interval time: 55min Operation frequency: 30cpm Average piston speed: 100mm/s (3.9inls) Mounting: Horizontal no-load Supply
Measuring conditions 10-CQSXB20-50D Chamber volume Purity of air supplied to chamber 15l Same quality as supply air Evaluation of air purity inside chamber 100 Particle concentration (particles/cf) Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia.: 0.1m Intake rate: 28.3l/min 10 Laser dust monitor 1 Sampling time: 5min Interval time: 55min Operation frequency
Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: C (110VAC; Grommet w/Surge Voltage Suppressor)
Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1W (24VAC; Conduit Terminal w/Surge Voltage Suppressor), Other Options: B (NPT Thread)
Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)
Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: Rc, Mounting: XB (w/Bracket)
Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: A (24VDC; Grommet), Other Voltages and Electrical Options: None, Other Options: E (Oil-free, NPT Thread)
Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3
Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3
Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: C (110VAC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Mounting: XB (w/Bracket)
Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor)
Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: C (110VAC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)
Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: E (Oil-free, NPT Thread)
Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: A (24VDC; Grommet), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)
Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: E (Oil-free, NPT Thread), Mounting: XB (w/Bracket)
Bore Size: 12mm, Pilot Port Location: Front, Stroke: 15mm, Mounting Bolt: w/o Mounting Bolt, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -
Bore Size: 12mm, Pilot Port Location: Front, Stroke: 30mm, Mounting Bolt: w/Mounting Bolt, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -
Bore Size: 12mm, Pilot Port Location: Front, Stroke: 30mm, Mounting Bolt: L (w/Mounting Bolt), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)
Bore Size: 12mm, Pilot Port Location: Front, Stroke: 15mm, Mounting Bolt: w/o Mounting Bolt, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)
Bore Size: 12mm, Pilot Port Location: Front, Stroke: 25mm, Mounting Bolt: L (w/Mounting Bolt), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)