Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

Measuring conditions 10-CQSXB20-50D Chamber volume Purity of air supplied to chamber 15l Same quality as supply air Evaluation of air purity inside chamber 100 Particle concentration (particles/cf) Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia.: 0.1m Intake rate: 28.3l/min 10 Laser dust monitor 1 Sampling time: 5min Interval time: 55min Operation frequency

Flow Sensor Series PFMV

PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) 2 L-type brackets, 2 mounting screws M3 x 25L For 2 stations PF2W 2 L-type brackets, 2 mounting screws M3 x 35L For 3 stations 2 L-type brackets, 2 mounting screws M3 x 45L For 4 stations PF2D 2 L-type brackets, 2 mounting screws M3 x 55L For 5 stations IF 951 Series

！ Contact our sales office regarding a delivery date or a price since this is a special model. SP158X-002E P.G.Information (Specialized Product) P: TS SMC Corporation Liquid Dispense Pump (Solenoid type) 4-14-1, SOTO-KANDA

Fluid Note4) PEEKPP Body Diaphragm Check valve Fluid contact material EPDMFKM EPDMFKM Repeatability Note1) 1%(2% when the dispense volume is 5 to 15L) *Under SMC's measuring conditions Dispense pressure Note2) 10kPa 15kPa 35kPa Suction pressure Dry Wet Max.operating frequency Note3) 2Hz(Minimum ON time 200msec/Minimum OFF time 300msec) Fluid temperature 10 to 50(No freezing) Ambient temperature

CLA

. '/4 92 CX cz Without boot With boot H Z ZZ os f h , i9"'" size MM N P PG PH PL PW RR S U W .co 1110 (mm) X1US Z ZZ i 40 7 115 20 27 Y. 42 11 20 45 10 153 16 8 10'g' '-'"'' 15l:'. 29.5 51 234 244 43 112 59 242 252 50 30 % 46 10 21 50 12 168 19 0 'v 0 63 V. 16 31 % 48.5 13 23 60 16 182 23 0 W O , 80 37 'I, 55 15 23 70 20 208 28 0 I "u', '0 OJ 38 58 261 273 52 11 .2 66 1/4 "'M 49 58 280 296

MTS

Stroke (mm) Pulling force (N) Thread size Bore size (mm) M2 x 0.4 x 15l or more 12, 16 20, 25, 32 40 1.5 2 M3 x 0.5 x 30l or more 3 2 M3 x 0.5 x 30l or more 4 3 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. Operating Pressure Caution 1. Apply air pressure of at least that shown in the table below to the port on the lock mechanism side.

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: C (110VAC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Mounting: XB (w/Bracket)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: C (110VAC; Grommet w/Surge Voltage Suppressor)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1W (24VAC; Conduit Terminal w/Surge Voltage Suppressor), Other Options: B (NPT Thread)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: C (110VAC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: A (24VDC; Grommet), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: E (Oil-free, NPT Thread), Mounting: XB (w/Bracket)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: E (Oil-free, NPT Thread)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: Rc, Mounting: XB (w/Bracket)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: A (24VDC; Grommet), Other Voltages and Electrical Options: None, Other Options: E (Oil-free, NPT Thread)

Compact Cylinder with Linear Guide, MXS, GUIDED CYLINDER, 0.00000 lb

Compact Cylinder with Linear Guide, MXS, GUIDED CYLINDER, 0.00000 lb

Bore Size: 12mm, Pilot Port Location: Front, Stroke: 20mm

Bore Size: 12mm, Pilot Port Location: Front, Stroke: 10mm