Bore Size: 6mm, Stroke: 100mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bore Size: 6mm, Stroke: 100mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 6mm, Stroke: 100mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 6mm, Stroke: 100mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 6mm, Stroke: 100mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: A90V--Reed, DC Volt, AC Volt, Vertical, Lead Wire or Prewired Connector: 3m, Number: 1 pc.

Bore Size: 6mm, Stroke: 100mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire or Prewired Connector: 5m, Number: -

Bore Size: 6mm, Stroke: 100mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number: -

Bore Size: 6mm, Stroke: 100mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 6mm, Stroke: 100mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 6mm, Stroke: 100mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bore Size: 6mm, Stroke: 100mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 5m, Number: -

Bore Size: 6mm, Stroke: 100mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 5m, Number: -

1

dual 3-port valve Operating pressure range Internal pilot operating pressure range (MPa) 0.1 to 0.7 (High pressure type: 0.1 to 1) 100 kPa to 0.7 (4-position: 100 kPa to 0.6) 100 kPa to 0.7 (High pressure type: 100 kPa to 1) 2-position single 2-position double 3-position External pilot operating pressure range (MPa) Pilot pressure range 0.25 to 0.7 0.1 to 0.7 (High pressure type: 0.1 to

High Vacuum Angle Valve

XLC/XLCV Series How to Order XLC M9N A 16 Flange size 16, 25, 40 XLC M9N A 50 1 Flange size 50, 63, 80, 100, 160 q t y w e r u XLC16 to 40 q Flange size e Pilot port direction w Flange type Rear flange surface Applicable flange 16, 25, 40, 50, 63, 80 100, 160 63, 80, 100, 160 Type Symbol Size 16 25 40 50 63 80 100 160 Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear

Table of Contents

100 Gripping point L (mm) Gripping point L (mm) Misc.

Aluminum High Vacuum Angle Valve

A 16 Flange size 16, 25, 40 XLG M9N A 50 1 Flange size 50, 63, 80, 100, 160 XLG q t y w e r u e Pilot port direction w Flange type q Flange size Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear flange surface Right flange surface Size 16 25 40 50 63 80 100 160 Symbol Applicable flange 16, 25, 40, 50 63, 80, 100, 160 63, 80, 100, 160 Type Rear flange surface Nil

Table of Contents

) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

Air Cylinder

42 M5 x 0.8 4.8 9.5 M10 x 1.0 45.5 54 66 78 84 108 126 138 SA X Y Z ZA 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st Bore size D6 34.5 (

Compact Hydraulic Cylinder

100 + 100 (n 2) 10 CHKm Auto switches 2 pcs.

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.