Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 42 42 42 64 63 62 130 129 127 248 243 238 465 454 443 58 59 71 74 145 168 268 288 478 524 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster unit 30 47 90 150 203 30 47 90 150

Electric Actuator/Slider Type

communication 50 100 150 SSCNET#/H and SSCNET#products are compatible.

MXQ

(mm) MXQ20-40 MXQ20-75 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 MXQ20-30 MXQ20-75 MXQ20-30 0.06 MXQ20-40 MXQ20-40 MXQ20-100 MXQ20-125 MXQ20-150 MXQ20-100 MXQ20-100 MXQ20-125 MXQ20-125 MXQ20-150 MXQ20-150 0.06 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-150 MXQ20-150 MXQ20-150 0.08 MXQ20-30 MXQ20-30 MXQ20

Cylinder with Turntable Series MGT

Note 4) 1 m (M): D-M9(W)(V) only Model Lead wire length D-LC05 0.5 m D-LC30 3 m D-LC50 5 m Lead wire length Tolerance 15 mm 0.5 m 30 mm 1 m 90 mm 3 m 150 mm 5 m 1728 Solid State Auto Switch Direct Mounting Style D-M9N(V)/D-M9P(V)/D-M9B(V) Refer to SMC website for the details of the products conforming to the international standards.

e-Rodless Actuator

(Wn) Weight (mn) Y-axis Yn Z-axis Zn X-axis Xn Z X Wa 5 mm 0.88 kg 0 mm 65 mm 111 Wb 42.5 mm 4.35 kg 0 mm 150 mm Y 210 Y Wc 42.5 mm 0.795 kg 111 mm 150 mm Wd 42.5 mm 1.0 kg 210 mm 150 mm n = a, b, c, d 3 Calculation of composite center of gravity m3 = mn = 0.88 + 4.35 + 0.795 + 1.0 = 7.025 kg 1 m3 X = x (mn x xn) 1 7.025 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.0 x 150) = 139.4 mm 1

Air Slide Table Series MXQ

24.5 37.5 55.5 55.5 30.5 20.5 MXQ20 47.5 37.5 27.5 37.5 43.5 75.5 78.5 81.5 35.5 33.5 65.5 68.5 73.5 37.5 27.5 17.5 27.5 25.5 23 MXQ25 56.5 46.5 36.5 36.5 50.5 64.5 92.5 92.5 50.5 40.5 54.5 82.5 73.5 46.5 36.5 26.5 26.5 40.5 27 Solid State Auto Switch: D-M9BV, D-M9NV, D-M9PV, D-M9BWV, D-M9NWV, D-M9PWV Stroke B Stroke E Model A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

L With lock 32 Equiv. 32 piston area S Nil Without auto switch (Unclamping side) Guide pin diameter D-M9NV: D-M9PV: D-M9BV: M9NV: M9PV: M9BV: For guide pin diameter, Guide pin shape refer to Table 1 below.

CJ2X/CUX/CQSX/CQ2X/CM2X

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1. It might not be able to control CUX10 by meter-out at a low speed operation. DCaution -X 1.

Compact Cylinder

140 160 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 100 110 130 150 C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40

CJ2X/CUX/CQSX/CQ2X/CM2X

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1. It might not be able to control CUX10 by meter-out at a low speed operation. DCaution -X 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1. It might not be able to control CUX10 by meter-out at a low speed operation. DCaution -X 1.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

e

(Wn) Mass (mn) Y-axis Yn Z-axis Zn X-axis Xn LXS LXS Z X Wa 5 mm 0 mm 0.88 kg 65 mm LC6m LC6m 111 Wb 42.5 mm 0 mm 4.35 kg 150 mm Y 210 Y Wc LZm LZm 42.5 mm 111 mm 0.795 kg 150 mm Wd 42.5 mm 210 mm 1.0 kg 150 mm LC3F2 LC3F2 n = a, b, c, d 3 Calculation of Composite Center of Gravity Xm Xm m3 = mn = 0.88 + 4.35 + 0.795 + 1.0 = 7.025 kg D-m D-m E-MY E-MY 1 m3 X = x (mn x xn) 1 7.025 = (0.88

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

In the case of MVGQM50-40 st, an interface of 10 mm wide is installed inside of the MVGQ50-50 st, and thus the full length dimension of the body is the same as 50 st. 20, 30, 40, 50, 75, 100 125, 150, 175, 200 25 M L MVGQ 25, 50, 75, 100, 125, 150, 175, 200 M L 32, 40 MVGQ 50, 63 Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

Rotary Clamp Cylinders

Graph (2) MK50/63 When arms moment of inertia is 3 x 104 kgm2, cylinder speed should be less than MK20/25: 65 mm/s MK32/40: 150 mm/s. For calculating moment of inertia, refer to front matter 1, 2, back page 8. Note) Maximum piston speed is equivalent to approximately 1.6x the average piston speed.

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

NCM

There are no flats on the E type 150 bore rear tang. Note 2) FF dimension for NCMC 150 is not applicable. There are no threads on the C type 150 bore rear tang.

Cylinder with Lock

JA50-16-150 JAH50-20-150 JAH50-20-150 32 Load mass [kg] 50 30 40 *1 Order two foot brackets per cylinder. * Accessories for each mounting bracket are as follows.

Rotary Table/Rack & Pinion Style Series MSQ

MSZ Mass CRQ2X MSQX (g) MRQ 1 2 3 7 Size Basic type 75 105 150 250 High precision type 80 115 165 265 Note) Excluding the mass of auto switches Clean Series Prevents dispersion of the particles generated inside of the product into the clean room by sucking them out of the vacuum port on the body side.

Compact Rotary Actuator Series CRQ2

150 D100 100 100 80 60 40 20 0 50 40 30 20 10 0 Load (N) Load (N) 329 Series MSQX Construction o i w@3 r !