Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 10, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 41.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 27, Table Size Height H(mm): 20, Table Parallelism(µm): 25, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 20, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 51.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 27, Table Size Height H(mm): 20, Table Parallelism(µm): 30, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 20, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 51.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 27, Table Size Height H(mm): 20, Table Parallelism(µm): 30, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 20, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 51.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 27, Table Size Height H(mm): 20, Table Parallelism(µm): 30, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 30, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 61.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 27, Table Size Height H(mm): 20, Table Parallelism(µm): 35, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 30, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 61.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 27, Table Size Height H(mm): 20, Table Parallelism(µm): 35, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 30, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 61.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 27, Table Size Height H(mm): 20, Table Parallelism(µm): 35, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 40, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 79.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 27, Table Size Height H(mm): 20, Table Parallelism(µm): 40, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 40, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 79.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 27, Table Size Height H(mm): 20, Table Parallelism(µm): 40, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 50, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 89.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 27, Table Size Height H(mm): 20, Table Parallelism(µm): 45, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 50, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 89.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 27, Table Size Height H(mm): 20, Table Parallelism(µm): 45, Table Surface Treatment

Table of Contents

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Table of Contents

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Process Valve Series VNA

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB4 -25A VNB5 -32A, 32F VNB5 4 -32A, 32F VNB6 -40A, 40F VNB6 4 -40A, -40F VNB7 -50A, 50F VNB7 4 -50A, 50F No.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Body type Body type Plug-in type Non plug-in type VVFS2000-20A-1 VVFS2000-20A-2 Part no. 1 8 Plug-in type Non plug-in type VVFS2000-P-01-1 VVFS2000-P-01-2 VVFS2000-P-02-1 VVFS2000-P-02-2 Rc Body type Plug-in type Non plug-in type VVFS2000-10A Part no. Part no.

Air Slide Table

For details, refer to page 126. 40 MXQA Series Dimensions: MXQ 20A [Standard] MXQ 20A-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.

VFR

Body type Plug-in type Non plug-in type 1 8 Plug-in type Non plug-in type Body type VVFS2000-20A-1 VVFS2000-20A-2 Part no. Body type Plug-in type Non plug-in type VVFS2000-10A Part no.

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2