ZP

), Thin flat with ribs (CT) Thin flat Thin flat with ribs ZP 10 UT N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Profi-E

Com m uni cat i on dat a al l ocat i on Set t arget val ue Resol ut i on : 12bi t ( 100% F. S. ) , O ccupi ed byt e : 2 Byt e Target val ue ( 0 area) 12bi t 0 0 0 0 Target value(Lower 12 bits) * b0 b15 b11 Put 0 i n upper 4 bi t s ( N ot e) M oni t or t he out put pressure. Resol ut i on : 12bi t ( 100% F.

Table of Contents

Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide With coupling LC1-1B2H(Refer to page 185 for details.)

Electric Actuators

Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 Positioning repeatability Motor Encoder Lead screw Guide Motor/Screw connection Model 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide

2

175 190 75 75 75 90 120 120 100 170 140 230 175 265 190 265 IDU-FL210 220 IDU8E 310 375 340 375 440 420 550 720 610 IDU-FL211 IDU11E 195 IDU-FL212 IDU15E1 265 370 315 365 400 560 IDU-FL215 IDU22E IDU-FL216 IDU37E IDU-FL217 IDU55E A filter set for the IDF-FL200 to 214 consists of 1 filter.

LJ1H

Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 Positioning repeatability Motor Encoder Lead screw Guide Motor/Screw connection Model 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide

Table of Contents

AC DC Cv converted Av x 106 (m2) C.O. 0 2 4 0 2 4 0 2 4 0 2 4 0 2 4 0.6 0.3 0.2 0.6 0.3 0.6 1.0 0.2 0.3 0.6 0.15 0.3 0.6 1.0 0.3 0.6 0.15 0.3 1.5 1.0 0.5 0.3 1.0 0.5 1.9 3.8 5.8 1.9 3.8 0.08 0.16 0.24 0.08 0.16 VX311 -01 VX312 -01 VX313 -01 VX311 -02 R P 1/8 (6A) 2.2 3 1.5 N.O. 330 A VX312 -02 VX3224-02 550 700 330 550 700 550 700 550 700 550 700 550 700 2.2 R P 4.6 0.19 C.O. 0.3 VX3324

Battery-less

10 to 300 Actuator specifications 451 to 500 10 to 600 5 to 300 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 800 16 to 620 8 to 310 30 to 750 20 to 550 10 to 300 Parallel Stroke range 701 to 800 20

Table of Contents

391 80 540.5 80 11B 450 550 650 850 22B 37B 75B 1 2 1 2 14-20-55 Water Separator, Oil Mist Separator, Deodorizer Made to Order Specifications: Please consult with SMC for detailed specifications, size and delivery. 3.

Compact

250, 300, 350, 400, 450, 500, 550, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 48 20 1000 Page 170 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 10 25 LEMH Linear guide single axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000),

ZP

M6 x 1 A6 Mounting M8 x 1 A8 U C Flat Flat with ribs M4 x 0.7 B4 M5 x 0.8 B5 D Deep M6 x 1 B6 B Bellows UT Thin flat CT Thin flat with ribs M8 x 1.25 B8 Material N S NBR Silicon rubber Table (1) Pad Diameter/Pad Type Dia.

E-ITV-STD-RF-A

P_1P_2 P_1P_2 W i ndow com parat or m ode H yst eresi s m ode O ut put pressure of E/P regul at or P_2 P_1 P_1 P_2 O N O FF O N O FF Sw i t ch out put P_1P_20 O ut of range m ode The sw i t ch out put t urns on w hen set pressure i s achi eved.

Single Axis Electric Actuator Series LJ1H

Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide With coupling LC1-1B2H(Refer to page 185 for details.)

LJ1H

Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 Positioning repeatability Motor Encoder Lead screw Guide Motor/Screw connection Model 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide

Thermo-chiller/Rack Mount Type

500 (100 V type) 450/500 (200 V type) Air-cooled refrigeration With electric conductivity control function, Applicable to DI water piping HRR018 1600/1800 Watercooled refrigeration Particle filter element for replacement (UL Standards) Applicable to DI water piping Air-cooled: Option U (Water-cooled: Standard) HRR024 2000/2400 Tap water 15% ethylene glycol aqueous solution 550

LG1H

Applicable strokes: 450, 550, 650, 750, 850, 950 Example) LG1H2021PC-550-F2-X2 500 8.5 13.3 600 9.3 14.5 700 10.1 15.8 800 10.9 17.1 900 11.7 18.3 1000 12.5 19.6 mm kg kg Standard stroke Aluminum Stainless steel Body weight Operating temperature range 5 to 40 (with no condensation) 30 90 C kg N mm/s mm Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 Positioning

Integrated Controller

300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Product weight [kg] 3.09 3.29 3.49 3.69 3.89 4.09 4.29 4.49 4.69 4.89 5.09 5.29 5.49 5.69 5.89 6.09 6.29 6.49 6.69 6.89 Additional weight with lock [kg] 0.58 Series EQFS40R L Stroke [mm] 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 Product weight [kg] 5.15 5.43 5.71 5.99 6.27 6.55 6.93 7.11

IZx-OMT0049

fr om ioniz er to workpiec e [ mm] mm mm 250 200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50

ZP

), Thin flat with ribs (CT) Thin flat Thin flat with ribs ZP 10 UT N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU A A B B Y Y Model Model ZP10UT ZP10CT 10 10 11 11 1 0.8

ZP

), Thin flat with ribs (CT) Thin flat Thin flat with ribs ZP 10 UT N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU A A B B Y Y Model Model ZP10UT ZP10CT 10 10 11 11 1 0.8