A_HEC-OM-J017

Host SOH UT ENQ 32H Check sum CR () () Thermo-con SOH UT STX 32H Internal sensor ETX Check sum CR 101 100 10-1 10-2 () () Host ACK UT CR (Possible to omit) Note2DH is entered in101 digit is attached to temperature data.

ZP

Form w 1 Material 12 N S U F GN GS 10 10 11 1 ZP UT 13 13 14 1.5 16 16 17 Y 2.5 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber A B Construction p. 115 Mounting Bracket Assembly From p. 121 With adapter 10 to 16 w q ZPT UT N A5 10 e Vacuum inlet (Male thread) B Width across flats D 15.5 C A5 M5 x 0.8 A6 M6 x 1 A Model A B C D

HEC-OM-S008

Host SOH UT ENQ 32H Check sum CR (H) (L) Thermo-con SOH UT STX 32H Internal sensor ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK UT CR (Possible to omit) Note) 2DH is entered in 101 digit is attached to temperature data.

ZP

), Thin flat with ribs (CT) Thin flat Thin flat with ribs ZP 10 UT N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU A A B B Y Y Model Model ZP10UT ZP10CT 10 10 11 11 1 0.8

Vacuum gripper

Weight by cup material (g/cup) N NBR S/SF (Silicone U (Urethan F (FKM ZP 08 U ZPT08U-A6 4 4 4 4 ZP08U ZP 08 B ZPT08B-A6 4 4 4 4 ZP08B ZPT1-A6 ZP 10 UT ZPT10UT-A6 4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2

Table of Contents

), Thin flat with ribs (CT) Thin flat Thin flat with ribs ZP 10 UT N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

ZP

), Thin flat with ribs (CT) Thin flat Thin flat with ribs ZP 10 UT N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Profi-E

Com m uni cat i on dat a al l ocat i on Set t arget val ue Resol ut i on : 12bi t ( 100% F. S. ) , O ccupi ed byt e : 2 Byt e Target val ue ( 0 area) 12bi t 0 0 0 0 Target value(Lower 12 bits) * b0 b15 b11 Put 0 i n upper 4 bi t s ( N ot e) M oni t or t he out put pressure. Resol ut i on : 12bi t ( 100% F.

Table of Contents

Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide With coupling LC1-1B2H(Refer to page 185 for details.)

Electric Actuators

Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 Positioning repeatability Motor Encoder Lead screw Guide Motor/Screw connection Model 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide

2

175 190 75 75 75 90 120 120 100 170 140 230 175 265 190 265 IDU-FL210 220 IDU8E 310 375 340 375 440 420 550 720 610 IDU-FL211 IDU11E 195 IDU-FL212 IDU15E1 265 370 315 365 400 560 IDU-FL215 IDU22E IDU-FL216 IDU37E IDU-FL217 IDU55E A filter set for the IDF-FL200 to 214 consists of 1 filter.

LJ1H

Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 Positioning repeatability Motor Encoder Lead screw Guide Motor/Screw connection Model 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide

Table of Contents

AC DC Cv converted Av x 106 (m2) C.O. 0 2 4 0 2 4 0 2 4 0 2 4 0 2 4 0.6 0.3 0.2 0.6 0.3 0.6 1.0 0.2 0.3 0.6 0.15 0.3 0.6 1.0 0.3 0.6 0.15 0.3 1.5 1.0 0.5 0.3 1.0 0.5 1.9 3.8 5.8 1.9 3.8 0.08 0.16 0.24 0.08 0.16 VX311 -01 VX312 -01 VX313 -01 VX311 -02 R P 1/8 (6A) 2.2 3 1.5 N.O. 330 A VX312 -02 VX3224-02 550 700 330 550 700 550 700 550 700 550 700 550 700 2.2 R P 4.6 0.19 C.O. 0.3 VX3324

Battery-less

10 to 300 Actuator specifications 451 to 500 10 to 600 5 to 300 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 800 16 to 620 8 to 310 30 to 750 20 to 550 10 to 300 Parallel Stroke range 701 to 800 20

Table of Contents

391 80 540.5 80 11B 450 550 650 850 22B 37B 75B 1 2 1 2 14-20-55 Water Separator, Oil Mist Separator, Deodorizer Made to Order Specifications: Please consult with SMC for detailed specifications, size and delivery. 3.

Compact

250, 300, 350, 400, 450, 500, 550, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 48 20 1000 Page 170 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 10 25 LEMH Linear guide single axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000),

ZP

M6 x 1 A6 Mounting M8 x 1 A8 U C Flat Flat with ribs M4 x 0.7 B4 M5 x 0.8 B5 D Deep M6 x 1 B6 B Bellows UT Thin flat CT Thin flat with ribs M8 x 1.25 B8 Material N S NBR Silicon rubber Table (1) Pad Diameter/Pad Type Dia.

E-ITV-STD-RF-A

P_1P_2 P_1P_2 W i ndow com parat or m ode H yst eresi s m ode O ut put pressure of E/P regul at or P_2 P_1 P_1 P_2 O N O FF O N O FF Sw i t ch out put P_1P_20 O ut of range m ode The sw i t ch out put t urns on w hen set pressure i s achi eved.

Single Axis Electric Actuator Series LJ1H

Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide With coupling LC1-1B2H(Refer to page 185 for details.)

LJ1H

Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 Positioning repeatability Motor Encoder Lead screw Guide Motor/Screw connection Model 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide