IZ-OMK0015 These wires should not be short-circuited with other wires. 17 Doc.No.IZ-OMK0015D (7) Air pressure piping -For single side piping, plug the unused port with M-5P delivered with the product. (8) LED indication POWER LED: Indicates the state of power supply input and sensor connection. Model Nu File 00 LED name Function POWER MAIN Indicate that the power is supplied.
Number of tightening rotations Thread Model MS-5AUMS-5HMS-5P MS-5J MS-5N MS-5UN MS-5ALHU-6 MS-5HLHMS-5ATHU-6 MS-5ALHU-3, 4 MS-5UL MS-5UT MS-5ATHU-3, 4 Approx. 1/6 to 1/4 rotation Note) Use of Tube with Barb Fitting Caution 1. Cut the tube perpendicularly to the tube axis to a little longer length than required (use tube cutter TK-1, TK-2 or TK-3). 2.
10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-15 30 60 98 40 42 49 60 23 25 89 75 106 11-/22-MXP12-25 103 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP16 3 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2-M5 x 0.8 depth 8 Stroke: S 2-M4 x 0.7 depth 6 11-/22-MXP16-20 Width across flats 8 Width across flats 3 A 4-M5 x 0.8 depth 7 (Plug: M-5P
Weight: 12 g KM KF Bushing: M-5B Plug: M-5P M M Width across flats 10 M5 x 0.8 Width across flats 7 H/DL L/LL M5 x 0.8 10.1 KC R 1 8 Weight: 5.8 g Weight: 1.3 g KK Precautions KK130 DM Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions.
3H9 depth 3 +0.025 0 4 3H9 depth 3 +0.025 0 (mm) N H I J M Z ZZ Model MXF12-20 4 22 11 36 65 65 76 MXF12-30 4 30 12 45 75 75 86 MXF12-50 6 65 13 80 111 111 122 142 Low Profile Slide Table Series MXF Dimensions: MXF16 Stroke adjuster at retraction end Stroke adjuster at extension end Width across hexagon socket hole 3 Width across flats 8 MXH N 2 ( 1) x 35 24 MXU Note) Blanking plug (M-5P
Piping port 13.5 2-M30.5 170.05 (Plug:M-3P) Base side for mounting B D M 1 Stroke : S 5 J Z 2.4 Piping port 2-M30.5 (mm) Model F H J M S Z MXPJ65 25 38 27 37 5 44 MXPJ6-10 35 53 42 47 10 59 167 Series MXP Precision Air Slide Table Dimensions 10 MXP10 Scale: 70% Z 3 V 2-M30.5, 5 deep 2-M30.5, 3 deep K 5 4 G Max. 3.5 M N Stroke:S MXP10-10 Width across flats 1.5 Piping port 2-M50.8 (Plug:M-5P
Note 3) 5P flashes. Note 4) Selected bar (high voltage power supply module) ION/HV to display is turned off.
pitches 18.5 5.5 J I Z 3 ZZ Max. 10.5 H 25 3H9 depth 3 +0.025 0 23 4 3H9 depth 3 +0.025 0 (mm) Z M J I H N ZZ Model MXF12-20 65 65 36 11 22 4 76 MXF12-30 75 75 45 12 30 4 86 MXF12-50 111 111 80 13 65 6 122 8-6-11 12 Series MXF Dimensions: MXF16 Stroke adjuster at retraction end Stroke adjuster at extension end Width across flats 3 Width across flats 8 N 2 ( 1) x 35 24 Blanking plug (M-5P
Flash (green) At that time, "5p" is displayed in the frequency display and the ION/HV LED of the selected CH is turned off. [Ion generation stop release] To release the mode, press the S button once to return to the previous setting mode.
Note Parts list Description Material Note No. 1 2 No. 12 13 14 Aluminum alloy Aluminum alloy Stainless steel Carbon steel Aluminum bearing alloy Aluminum alloy casting Lead bronze casting Hard anodized Chromated 12 to 25 32 to 100 12 to 40 50 to 100 50 to 100 Body Piston Urethane Urethane Synthetic rubber Brass Carbon steel Lead bronze casting Felt Resin Bumper A Bumper B Magnet Plug (M-5P
FD N KB PD PC KA FG FF PA PB A 3 4 Groove position for auto switch mounting 4-MA thread depth MB HB depth HC Mounting thread HD ME HE HA depth HC MC MD Only one side is sealed with a plug (M-5P) at the time of shipment. Supply ports are provided on both sides.
1, @2 and @6 each. 12 MXY12-PS 8-9-11 11 Series MXY Dimensions 2-M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M-5P) 2-M5 x 0.8 (Plug: M-5P) 2-M5 x 0.8 Piping port FL 21 21 FH 2-M thread depth MM +0.03 0 Width across flats MB (lock plate fixing bolt) R 4-M thread depth MM PR RL PR +0.03 0 MA (Stroke
Barb fitting for soft tubing M-01AU-4 Hose elbow (H) M-5HLH-4 4/2.5 x M5 4/2.5 x R For soft nylon and polyurethane tubing M-5P 1 8 R P. 59 1 8 6/4 x M5 6/4 x R Gasket M-01AU-6 P. 56 M-5HLH-6 P. 58 1 8 To seal M5 thread Material: PVC M-5G1 Hose nipple M-01H-4 Elbow For nylon, soft nylon and polyurethane tubing 4/2.5 x R P. 59 1 8 M-5AL-6 M-5ALH-6 M-5HL-4, 6 M-5HLH-4, 6 Gasket (H) One-sided
Order a plug (M-5P) separately in order to plug the PD and PS ports that are no longer used due to the addition of function plate. How to order Indicate the model numbers of the vacuum module and the function plate. Example) ZR100-K15MZ-E 1 ZR1-RV3 1 971 Series ZR Valve Unit : ZR1-V-Specifications ZR1-V-Valve unit part no.
1.4 2.5 Model L A lB C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 M5 x 0.8 Universal Elbow: MS-5UL Universal Tee: MS-5UT Width across flats 7 Width across flats 7 M5 x 0.8 2-M5 x 0.8 M5 x 0.8 M5 x 0.8 Effective area: 2.4 mm2 Weight: 4.5 g Effective area: 2.4 mm2 Weight: 4.5 g 15-3-27 4 Series MS Bushing: MS-5B Plug: MS-5P
2 MY1 Bolt for plate mounting Retaining ring Retaining ring Magnet Plug(M-5P) Replacement Parts: Seal Kits Bore size (mm) Bore size (mm) Kit No. Parts No. Contents 16 20 to 100 Contents Nickel plated Nickel plated !
New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer
1, @2 and @6 each. 12 GR-S-020(20g) MXY12-PS GR-S-050(50g) 223 Series MXY Dimensions 2 x M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M 5P) 2 x M5 x 0.8 Piping port FL (Plug: M-5P) 2 x M5 x 0.8 21 21 FH 2 x M thread depth MM +0.03 0 R RL Width across flats MB (lock plate fixing bolt) PR MA (Stroke
SUP/EXH block plate VVQ0-16A-5P (SUP) R (EXH) PR (SUP/EXH) SUP port block 1(P) (For SUP) When different pressures, high and low, are supplied to one manifold, block a plate is inserted between the stations under different pressures.
supply voltage Current consumption Connection Variable Voltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer Input for copy mode 2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White), Display values updated 5 times per second Output 1, Output 2: Orange 12 to 24 VDC p10% 50 mA or less Power supply output 5P