Compact Vacuum Unit Ejector/ Vacuum Pump System

(with polarity protection) Current consumption 40mA or less Switch output NPN or PNP open collector 2 outputs (To be selected) Maximum load current 80mA Max. applied voltage 28V (NPN output) Residual voltage Max. 2V (at 80mA load current) Response time 2.5 ms or less (response time available for anti-chattering function: 20, 100, 500, 1000 or 2000 ms) Short circuit protection Provided Repeatability

Electrostatic Sensor Monitor

. or less, Chattering-proof function working, Response time is 500 ms, 1 s, 2 s or less Short circuit protection Short protection equipped Voltage output Output voltage: 1 to 5 V (within rated measurement range) Output impedance: Approx. 1 k Accuracy (to display value 25 oC) 1%F.S.

IZ-OMU0031-CN

() 200 ms() 1.5 s() 0.5F.S. 1 digit 3+1/2 7 2 (/)5 /1s OUT1ON ()OUT2ON () IP40 050 -1060 () 3585R.H.() AC1000 V 1 50 M (DC500 V ) 0.5%F.S.(25 ) 5P 4P PBTPBT 30 g() CEUL/CSA 12 5 2 -32No.IZ*-OMU0031 (ZS-28-A) 2 0.2 mm 0.58 mm 1.12 mm 4.1 -33No.IZ*-OMU0031 0.56 mm R R2 2 (n ) <> <> 31Xn +3.5X(n -1) 31Xn +3.5X(n -1) -34No.IZ*-OMU0031 Revision history A 4-14-1, Sotokanda

Series VQ Base Mounted Metal Seal/Rubber Seal

P.1.10-196 Manifold Options VZS VFS Name plate [-N] VVQ0-57A-5 DIN rail mounting bracket [-D] Blank plate assembly VVQ0-10A-5 VVQ0-N5-Station (1 to Max. stations) Silencer AN103-X233 VS VS7 SUP/EXH block plate VVQ0-16A-5P R PR Blank plug KQP-X19 Built-in silencer, Direct exhaust [-S] 23 04 06 08 Double check block VQ1000-FPGIndividual EXH spacer VVQ0-R-5-C4 Individual SUP spacer VVQ0-P-5-

LFE-OMZ0013

Operation LED Output 1 and 2: Orange Power supply voltage 24VDC10 Current consumption 50 mA or less Connection method Power supply output 5P connector, sensor connection 4P connector (e-con) -62No.LFE*-OMZ0013 Model LFE0 Enclosure IP40 (Note that the display front is only certified as IP65 by using optional parts (panel mount adapter and waterproof seal).

Slide Unit Series CX2/CXWM/CXWL

Contents Nickel plated 11 Plug (M-5P) Brass CX2N10 CX2N10-PS 12 Magnet A set of @0, @1, @3 listed above CX2N15 CX2N15-PS 13 Nickel plated Ball fixing screw Chromium steel DCX2N25 CX2N25-PS 14 Spring Stainless steel Seal kit includes @0, @1, @3. Order the seal kit, based on each bore size. (The piston gasket @2 is not replaceable.)

Slide Unit Series CX2/CXWM/CXWL

Contents Nickel plated 11 Plug (M-5P) Brass CX2N10 CX2N10-PS 12 Magnet A set of @0, @1, @3 listed above CX2N15 CX2N15-PS 13 Nickel plated Ball fixing screw Chromium steel DCX2N25 CX2N25-PS 14 Spring Stainless steel Seal kit includes @0, @1, @3. Order the seal kit, based on each bore size. (The piston gasket @2 is not replaceable.)

CXWM/CXWL

Component parts Material CDPXW 10SM L CDPXW 16SM L CDPXW 20SM L CDPXW 25SM L CDPXW 32SM L 1 1 Aluminum alloy 1 Switch mounting block 1 1 2 2 2 Block mounting screw 2 2 Chrome steel/Nickel plated 2 2 2 Switch mounting screw 2 2 Chrome steel/Nickel plated 2 2 2 Hexagon nut 2 2 Carbon steel/Nickel plated 1 (2) (2) Magnet Rare earth magnet Socket Brass/Electroless nickel plated 2 2 Plug (M-5P

Air Slide Table Series MXP

This could cause auto switch malfunction. 2 x M3 x 0.5, depth 3 MXQ MXP10-10 A 4 x M3 x 0.5, depth 4 MXF (Plug: M-5P) 2 x M5 x 0.8 Piping port Width across flats 5.5 Width across flats 1.5 H 13 M3 x 0.5 7 6.5 16.4 MXW 4 MXJ 3.7 21 20 MXP 8.5 MXY 3 0 +0.030 , depth 2.5 MTS 4 x M4 x 0.7 A 3 0 +0.030 , depth 2.5 0.5 19 200.05 Pilot hole diameter 3.3 15 Piping port W 2 x M5 x 0.8 0.50.05 D B

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

-10B CY A Width across flats 12 H MA 12.5 M8 x 1 MG 5.3 14.4 7 6.5 40.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX 11 8.5 D17.8 -X 21 20 20Data 19 0.5 A Piping port 2-M5 x 0.8 15 4-M4 x 0.7 4-M3 x 0.5, depth 4 Bottom hole diameter 3.3 20 0.05 W (Plug: M-5P

MXW

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 4-M4 x 0.7 thread depth 6 (Helisert) 5H9 +0.030 depth 4.5 0 Operating port M5 x 0.8 Operating direction (A) (Plug: M-5P) 49 46 38 5 22 12 19 4 40 25 (Y) (Y) 5.5 Operating port M5 x 0.8 Operating direction (B) 24 84 (Plug: M-5P) Operating direction (

Air Slide Table Series MXW

Width across flats 8 5H9 + 0.030 0 depth 4.5 Operating port M5 x 0.8 6 x M4 x 0.7 thread depth 6 Note) A Operating direction (Insert) 6 (Plug: M-5P) 58 27 46 5 24 26 29 26 103 6.5 Operating port M5 x 0.8 Y Y 26 B Operating direction 5H9 + 0.030 0 depth 4.5 (Plug: M-5P) Operating direction B A 9 8 10 15 15 10 7.5 19.2 A 35 26.5 20 Z A Cross section AA 3 4 x M5 x 0.8 thread depth 10 3 x H G

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

x 0.4 depth 2.2 For rail mounting (mm) F Model H J M S Z AA 12 2-M2 x 0.4 depth 3 For magnet mounting MXP65 25 38 33.5 37 5 45 2 35 53 48.5 47 10 60 9.5 MXP6-10 8 Series MXP Dimensions MXP10 2-M3 x 0.5 depth 3 Z 3 With metal stopper 2-M3 x 0.5 depth 5 V K 5 4 G Max. 5.5 Max. 3.5 N 20 M Stroke: S MXP10-10 Width across flats 1.5 Width across flats 5 A Piping port H 13 2-M5 x 0.8 (Plug: M-5P

MXW Series Long Stroke Slide Table

) 58 46 27 24 5 26 29 26 6.5 Operating port M5 x 0.8 Y Y 26 103 Operation direction B 5H9 +0.03depth 4.5 0 (Plug : M-5P) Operation direction B A 9 8 10 15 15 10 7.5 19.2 A 35 26.5 20 Z A Cross section AA (scale 50%) 4-M5 x 0.8 thread depth 10 3 x H G Bottom through hole 4.2 H 6 depth 4.5 5H9 +0.03 0 F E 5H9 +0.03depth 4.5 0 Model Z J H G F E MXW12-50 205 84 35 50 88 58 MXW12-75 230 89 40

Connection Type: Others, Connection screw: M, Shape Type: Plug, Material: [Stainless Steel] 316 Stainless Steel, Gasket Material: PVC, Made to Order Specifications: N/A

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M-5P (Width across flats 7) 32 : Hexagon socket head taper plug (Width across flats 5) Refer to Figure 1 for G thread.

Escapements Series MIW/MIS

M-5P) 8 Bumper Urethane rubber (MIW32 ... Rc1/8) 9 Hexagon socket taper plug Head bumper 18 Urethane rubber (MIW8 to 20) 10 Needle roller High carbon chromium bearing steel Description Material Note Option: adjuster Description Material Note Option: scraper No. No.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M-5P (Width across flats 7) 32 : Hexagon socket head taper plug (Width across flats 5) Refer to Figure 1 for G thread.

Suction cups with flange

M-5P Part No. M-3P When Rc1/8 port use as vacuum pressure supply port. Used for decreasing the number of (Mount to unused port.) suction cups. -4No. TQ1230001-OM107 2.

IZ-OMK0015

These wires should not be short-circuited with other wires. 17 Doc.No.IZ-OMK0015D (7) Air pressure piping -For single side piping, plug the unused port with M-5P delivered with the product. (8) LED indication POWER LED: Indicates the state of power supply input and sensor connection. Model Nu File 00 LED name Function POWER MAIN Indicate that the power is supplied.