1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

Flange B O R E S I Z E 10 16 P O R T L O C AT I O N O N H E A D C O V E R S T D S T R O K E/H U N D R E D T H S O F A N I N C H R In-Line Perpendicular 10 (3/8) 050. 100. 150, 200 16 (5/8) 050, 100, 150, 200, 300, 400, 500 A C T I O N S Spring Return T Spring Extend T E C H N I C A L SPECIFICATIONS Fluid Air Proof Pressure 1MPa / 145 PSI MaxImum Operating Pressure 0.7MPa / 100 PSI Minimum

Compact Hydraulic Cylinder

2 @2 @4 t e !0 Series CH2G !3 @3 r @5 !

High Vacuum Angle Valve

r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Table of Contents

suppressor (Non-polar type) Vacuum switch None With vacuum switch Nil E Silencer Types R and U are DC only.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

location, P/R port with One-touch fitting for 6 VZ1000-3A-1D r VZ1000-3A-1U t SUP/EXH block assembly VZ1000-2A-1M y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Series SV

: SS5V2-W10SAWD Stations (S, R, RS) (-D) When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

smcmaintenancepartslist

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Part No.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Order) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.74 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P

Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Mechanically Jointed Rodless Cylinder Series MY1

MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

SV

7 w e r !8 @2 @1 SOL.B Station 11 SOL.A @5 Light/Surge voltage suppressor @1 @6 !

Electric Actuator

R chamfering.

4/5 Port Solenoid Valve

Port size For sub-plate, manifold type 40, 41, 42, 43 Nil: Without sub-plate R port P, E port 3: Common exhaust type for main and pilot valve D: Push-turn locking slotted type R port P, E port (With gasket and screws) 01: 1/8 With sub-plate Electrical entry 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24,12 VDC 100,110, 200, 220 VAC Grommet L plug connector M plug connector DIN terminal 24,

Table of Contents

0 IS1000 No. q w e r t y u i o !

1

st E HT Bore size (mm) 20 25 Over 100 st to 200 st 30 st or less Over 200 st Over 30 st to 100 st 10 16 27 32 51 51 69 68.5 80 93 Over 100 st to 200 st 73 79.5 90 95.5 114 114.5 132 132 50 st or less Over 200 st Over 50 st to 100 st E HT A Bore size (mm) 32 40 50 63 Over 100 st to 200 st 128 128 144 144 50 st or less Over 200 st Over 50 st to 100 st 21.5 15 21 16 Over 100 st to 200 st 91

MY1

3 e w !6 r !9 Note) With top cover removed !

MY1

Horizontal Vertical (downward) Vertical (upward) 100 10 20 30 40 50 100 200 500 Load weight kg m s m s Type of impact MY1HT63 Horizontal impact: P = 0.5MPa s 2000 1500 1000 m Impact speed mm/s L unit 1 m 2 Kinetic energy E 500 400 300 200 Thrust energy E Fs Fs + mgs Fs mgs Absorbed energy E E + E 100 10 20 30 40 50 100 200 300 5001000 Symbols : Speed of impacting object (m/s) m: Weight

Electric Actuator with Integrated Guide

Motor output (W) Motor model Compatible driver model Power supply voltage (V AC) Motor dimension (mm) 100/115 MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 95 MSM022P1A 200 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation 89 200 HC-PQ23 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yasukawa Electric Corporation 96.5 200/230 SGDE-02AP SGME-02AF12 Refer

Vacuum System Peripherals:

open collector, single output No analog output, 200 degree set Manual override 16 Nil Non-locking push type Push-locking slotted type D Manifold block 17 Nil None With manifold block MN Nozzle diameter 18 07 0.7 mm 1.0 mm 19 10 Max. vacuum pressure 55 S 53 kPa 84 kPa L Silencer r e w q (15 stations maximum) Nil None With silencer 1 t r e w q Number of ejector/valve station Alignment

Electric Slide Tables

J 6N LES 8 30 q w e r t y u i o !