Air Cylinder

D-Across Flats CD F CW CW CB 2-EE (NPTF) Q Width Across Flats KK C KK AA Bore 200 250 325 400 Q 3/4 3/4 1 1/16 1 1/16 MM B B EA LR A C DD FA G A J R LF + Stroke E L M ZB + Stroke XD + Stroke X119US Option (in) C Bore (in) AA Y A E LF XD WF B EA D CD P EE F CW MM ZB J M LR KK CB DD G L FA R 1/2 200 (2") 2.6 2.09 1 1/8 2 1/2 3 5/8 5 3/4 1 3/8 1 1/2 0.3 7/8 1/2 2.40 3/8 3/8 1/2 1 5 1/8 1.06

Base Mounted Metal Seal/Rubber Seal Series VQ

VQ5 VQZ VQD Type of connection 3(R) port A, B porting P port R port 1(P) port 4(A), 2(B) port Type of connection 2-4-187 VQ0/1000 Kit (D-sub connector) F The D-sub connector reduces installation labor for electrical connections.

Magnetically Coupled Rodless Cylinder

in Area C in the case of 15. 25, 32, 40, 50, 63 (mm) Auto switch model A B C D D-Y5 D-Y7P D-Y7W D-A9 D-Y5 D-Y7P D-Y7W D-A9 D-Y5 D-Y7P D-Y7W D-A9 D-Y5 D-Y7P D-Y7W D-A9 D-M9 D-F9W D-Z7 D-Z80 D-M9 D-F9W D-Z7 D-Z80 D-M9 D-F9W D-Z7 D-Z80 D-M9 D-F9W D-Z7 D-Z80 Bore size (mm) 25 32 40 50 63 18 21.5 23.5 27.5 29.5 99 108.5 124.5 148.5 158.5 43 46.5 48.5 52.5 54.5 74 83.5 99.5 123.5 133.5 23 26.5

Electric Slide Tables

R type Cable L type R type Table In-line Motor Type/D Type Width dimension shortened by up to 45% D type R type A A A Dimension (mm) R/L type 58.5 72.5 106 Size D type 8 16 25 32 45 61 How to Mount Side holder mounting Body tapped mounting Through-hole mounting (R/L/D type) (R/L/D type) (D type) Side holder Features 3 Step Data Input Type Series LECP6/LECA6 Simple Setting to Use Straight

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Initial value) Base mounted Solenoid specifications JIS Symbol Internal pilot Grommet(G)/(H), L plug connector (L), M plug connector (M), DIN terminal (D), M8 connector (W) Electrical entry 10-SYJ71 M 2 4 10-SYJ72 M 2 4 (A) 2 (A) 2 G, H, L, M, W D Coil rated voltage V DC AC 50/60Hz 24, 12, 6, 5, 3 24, 12 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation 1 (P) 3 (R) 1

SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) e r t q e r t q V100 (A) (A) SY 2 2 SYJ u u VK VZ 3 (R) 1 (P) 3 (R) 1 (P) w w VT VP y y VG Component Parts Replacement Parts VP Note Zinc die-casted Part no.

MY1

34 60 50 40 4.5 191 11.5 45 10 14.5 5 18 12 72 14 Y 2-d R S D WX Bottom ported (Applicable O-ring) Hole Sizes for Centralized Piping on the Bottom WX Y S d D R Model MY1C16 MY1C20 WX Y S d D R Applicable O-ring Model 30 6.5 9 4 8.4 1.1 32 8 6.5 4 8.4 1.1 C6 (Machine the mounting side to the dimensions below.) 8-11-61 59 Series MY1C Standard Type/Centralized Piping Type 25, 32, 40 Refer to

SX

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

Compact 5-Port Solenoid Valve

For D-sub Connector/Flat Ribbon Cable/Lead Wire pp. 21, 55, 119 1 3 5 JJ5SY 10 R For Terminal Block Box pp. 43, 119 1 3 5 T TC JJ5SY 10 R pp. 83, 73, 91, 119 For EX260/EX245/EX120 1 3 5 S S3 JJ5SY R 10 SUP/EXH block assembly R External pilot * The combination of external pilot type R and silencer type S is not available. * Only the JSY3000/5000 can be selected for the EX245.

Compact Hydraulic Cylinder

No. 1 1 Size M4 x 0.7 x 8L CHN BT-mm BT-03, BT-04, BT-05 BT-06, BT-08, BT-12 D-A5, A6 D-F5, J5 CHM D-Z7, Z8 D-Y5, Y6, Y7 BA4-040, BA4-063, BA4-080 BMB4-032, BMB4-050 2 Set screw M4 x 0.7 x 6L 2 CHSm D-A9 D-M9 BMB5-032 BA7-040, BA7-063, BA7-080 BBA1 CH2m D-A5, A6 D-F5, J5 BT-16, BT-18A, BT-20 CHA D-Z7, Z8 D-Y5, Y6, Y7 BS4-125, BS4-160 BS4-180, BS4-200 BS5-125, BS5-160 BS5-180, BS5-200 When

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Brake 50W 100W 200W 1 2 3 None With brake Nil K Power supply voltage Stroke 100/110VAC 50/60Hz 100/115VAC 50/60Hz 200/220VAC 50/60Hz 200/230VAC 50/60Hz Without motor Lead screw lead 1 H B C F A D E 8mm 12mm 20mm 5mm 10mm 25mm 40mm 2 0 Lead screw type The tables above show the definition for each symbol only and cannot

Electric Actuator

-m For three phase 200 VAC For single phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Three phase 200 to 230 VAC Single phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N () W M N W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should

MY1

WX S R D Bottom side (ZZ) piping (applicable O-ring) Y 2-d (Machine the mounting side to the dimensions below.)

Vacuum System Peripherals:

e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-A80 12 to 25 32 to 100 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NTL D-F7BAL 12 to 25 32 to 100 D-A73C D-A80C D-J79C 12 to 25 32 to 100 D-A79W D-F7WV D-F7V D-F7BAVL 32 to 100 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 7-6-22 23 Compact Cylinder with Auto Switch: Standard Type Double Acting, Single Rod Series CDQ2 Operating Range 180 200 Bore size (mm) Auto switch model

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

V

F S TAT I O N S 02 2 Stations 20 20 Stations H O W T O O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B O D Y P O R T E D P L U G L E A D T Y P E V A L V E 2 VQZ P O R T S I Z E 2(A) P O R T S E R I E S C3 One Touch Fitting for 3.2 (VQZ100) C4 One Touch Fitting for 4 (VQZ100/200) C6 One Touch Fitting for 6 (VQZ100/200/300) C10 One Touch Fitting for 10 (VQZ300) M5 M5 Thread (VQZ100/200

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

Z 50 100 150 200 300 400 500 3.02 3.31 3.56 4.04 3.02 3.23 3.52 4.00 3.04 3.25 3.54 4.02 4.44 5.06 5.83 D I M E N S I O N S ( I N C H) S TA N D A R D S I N G L E A C T I N G S P R I N G E X T E N D R O D S I D E F L A N G E T Y P E NCJ2F_-_T S Z T H MM NN NA NB 50 100 150 200 300 400 500 50 100 150 200 300 400 500 Bore Size* A B C D F GA FC FT FX FY FZ 0.12 1.10 No5-40UNC 1/4-28UNF 0.63 0.12

Table of Contents

D. Applicable tube O. D.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Order) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.74 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P