Bore Size: 25mm, Control Method: Brake and Scale, Stroke: 1000mm, Stroke Adjusting Unit: L (Left: Shock Absorber + Adjuster Bolt; Right: Shock Absorber + Adjuster Bolt ), Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M

Bore Size: 25mm, Control Method: Brake and Scale, Stroke: 200mm, Stroke Adjusting Unit: L (Left: Shock Absorber + Adjuster Bolt; Right: Shock Absorber + Adjuster Bolt ), Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M

Bore Size: 25mm, Control Method: Brake and Scale, Stroke: 500mm, Stroke Adjusting Unit: L (Left: Shock Absorber + Adjuster Bolt; Right: Shock Absorber + Adjuster Bolt ), Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M

Bore Size: 25mm, Control Method: Brake and Scale, Stroke: 900mm, Stroke Adjusting Unit: L (Left: Shock Absorber + Adjuster Bolt; Right: Shock Absorber + Adjuster Bolt ), Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M

Bore Size: 25mm, Control Method: Brake and Scale, Stroke: 1000mm, Stroke Adjusting Unit: Left: Shock Absorber + Adjuster Bolt; Right: Shock Absorber + Adjuster Bolt , Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: -

Bore Size: 25mm, Control Method: Brake and Scale, Stroke: 200mm, Stroke Adjusting Unit: Left: Shock Absorber + Adjuster Bolt; Right: Shock Absorber + Adjuster Bolt , Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: -

Bore Size: 25mm, Control Method: Brake and Scale, Stroke: 500mm, Stroke Adjusting Unit: Left: Shock Absorber + Adjuster Bolt; Right: Shock Absorber + Adjuster Bolt , Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: -

Bore Size: 25mm, Control Method: Brake and Scale, Stroke: 900mm, Stroke Adjusting Unit: Left: Shock Absorber + Adjuster Bolt; Right: Shock Absorber + Adjuster Bolt , Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: -

Compact Cylinder/Guide Rod Type Series CQM

x 125L x 150L M10 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 130L x 155L M10 x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 140L x 165L 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 75 80 85 90 95 100 105 110 115 140 165 40 45 50 55 60 65 70 75 80 85 110 135 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Model L A B n D E F LEFS25lll-50l 210.5 56 160 4 20 LEFS25lll-100l 260.5 106 210 4 LEFS25lll-150l 310.5 156 260 4 LEFS25lll-200l 360.5 206 310 6 2 240 LEFS25lll-250l 410.5 256 360 6 2 240 LEFS25lll-300l 460.5 306 410 8 3 360 LEFS25lll-350l 510.5 356 460 8 3 360 LEFS25lll-400l 560.5 406 510 8 3 360 LEFS25lll-450l 610.5 456 560 10 4 480 LEFS25lll-500l 660.5 506 610 10 4 480 LEFS25lll-

AC

Then, the charging time (T) for a 100l tank, With the pressure increase ratio from 2 to 3, the time of 17060=110 sec.(t) is given for 10l tank by the graph. Then, the charging time (T) for a 100l tank, With the pressure increase ratio from 1.6 to 2.0, the time of 3.51.1=2.4 sec.(t) is given for 10l tank by the graph.

PA3000/5000/PAX1000

Use 0.75kW per 100l/min of air consumption as a guide for the relationship of the air consumption to the compressor.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Use 0.75kW per 100l/min of air consumption as a guide for the relationship of the air consumption to the compressor.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Use 0.75kW per 100l/min of air consumption as a guide for the relationship of the air consumption to the compressor.

4-channel Flow Monitor ( compatible)

Item Display Content Setting of connection product [4L] 4 L range [16L] 16 L range [40L] 40 L range [PFW] is selected [100L] 100 L range [250L] 250 L range [10L] 10 L range [rAnG] [50L] 50 L range Selection of flow range [100L] 100 L range [PFA] is selected [200L] 200 L range [500L] 500 L range [4L] 4 L range [PFd] is selected [16L] 16 L range [40L] 40 L range Press the SET button to set.

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

Secondary Batteries

10 Applicable Products Applicable Products Material restriction: 90series Material restriction + Lub-retainer: 91series Material restriction + Lub-retainer + Heavy-duty scraper: 91--XC4 series Material restriction + Vacuum port for vacuum suction: 92series Air Preparation Equipment : Available as standard Remarks Description Series 90With fittings for purge air discharge IDG50L to 100L

Table of Contents

less Switch Table specification Grease for dust seal application With dust seal Fluorine grease for vacuum equipment made by NOK Kluber Traveling distance of 4000km, 4 million reciprocations, or operation period of 6 months, whichever comes first Grease maintenance schedule Rc 1/4, one each on both axial surfaces Seal the unused port with a plug, suction at both ends Vacuum suction port 100l

Electric Actuators

Suction at both ends. 50l/min (ANR) 100l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 106 Made to Order/Clean Room Specification Series LJ1H20 Dimensions/LJ1H202 (X60) Scale: 15% When two dimensions are shown, the top dimension is for 100 to 600mm strokes, and the

LJ1H

less Switch Table specification Grease for dust seal application With dust seal Fluorine grease for vacuum equipment made by NOK Kluber Traveling distance of 4000km, 4 million reciprocations, or operation period of 6 months, whichever comes first Grease maintenance schedule Rc 1/4, one each on both axial surfaces Seal the unused port with a plug, suction at both ends Vacuum suction port 100l