High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. I High-temperature type (H0, H4, H5) 1. For models with a heater, take care not to damage the insulation components of the lead wires and the connector section. 2.

XMC/XYC Series

),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) ,CF KF(NW),K(D N) XYC KF(NW) KF(NW) KF(NW) KF(NW) K(DN) KF(NW) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa (G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3 At 0.5MPa 38 91 430 280 500 1000 Port size M5 Rc 1/8 XMC 0.36 (0.40) 0.62 1.40(1.76) 2.10 3.80

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

147 NH 60 70 Bore size (mm) 50 63 SS 10 13 NW 118 142 PA 120 140 PB 186 220 PG 10 12 PP 26 42 Q 380 436 QQ 28 30 QW 90 110 RR 35 49 TT 35 43 UU 24 28 VV 28 30 W 200 236 WW 22 25 YW 128 152 Z 424 490 Bore size (mm) 50 63 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)

MY1

290 11 14 57 65 168 200 15 16 M8 x 1.25 47 50 44 60 122 147 105 M10 x 1.5 PA NH NW PB PG PP Q QQ QW RR SS TT UU VV W WW YW Z XX Bore size (mm) 50 63 090 110 60 70 118 142 120 140 186 220 10 12 26 42 380 436 28 30 35 49 10 13 35 43 24 28 28 30 200 236 22 25 128 152 424 490 74 92 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Cushion needle TT UU TT UU 10 G NW A GB MW 2-P (Hexagon socket head taper plug) N Z + Stroke WW WW P (Hexagon socket head taper plug) P (Hexagon socket head taper plug) XX XX P (Port) P (Port) Centralized piping 2-ZZ (Hexagon socket head taper plug) VV VV Centralized piping 2-ZZ (Hexagon socket head taper plug) S 1.1 WX 11.4 Bottom port (ZZ) (Applicable O-ring) Y 2-d Bore size (mm) 25 32

MY1

Cushion needle TT UU TT UU 10 G NW A GB MW 2-P (Hexagon socket head taper plug) N Z + Stroke WW WW P (Hexagon socket head taper plug) P (Hexagon socket head taper plug) XX XX P (Port) P (Port) Centralized piping 2-ZZ (Hexagon socket head taper plug) VV VV Centralized piping 2-ZZ (Hexagon socket head taper plug) S 1.1 WX 11.4 Bottom port (ZZ) (Applicable O-ring) Y 2-d Bore size (mm) 25 32

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 25, 32, 40 50, 100, 150, 200, 250, 300 350, 400, 450, 500, 550, 600 1500 Stroke adjustment unit symbol For stroke adjustment unit, refer to page 1209. Intermediate fixing spacer is not available for end lock mounting side. Strokes are manufacturable in 1 mm increments, up to the maximum stroke.

10

, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 MB1 Up to 1800 CA2 Up to 1500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 125 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800,

Cylinder with Lock

, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Up to 2500 Cylinder model: MDWBD32-50-NW-M9BW * The manufacturing of intermediate strokes is possible.

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

400, 450, 500 CA2 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper -XC5 Heat resistant cylinder (10 to 110C) -XC6 Made of stainless steel*3 *4 Up to 2700 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 -XC7 Tie-rod

Magnet: D (Built-in Magnet), Mounting: T (Center Trunnion), Bore Size: 80mm, Thread: Rc, Stroke: 250mm

Magnet: Built-in Magnet, Mounting: Center Trunnion, Bore Size: 80mm, Thread: Rc, Stroke: 250mm, Rod Boot: -, Cushion: -, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

MWB

, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Up to 2500 Cylinder model: MDWBD32-50-NW-M9BW Double clevis The manufacturing of intermediate strokes is possible.

Air Cylinder

Standard Strokes/ (mm) Air cushion Bore size Standard stroke 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Made to 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Made to Order (For details, refer to pages 25 to 27.)

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

XLG Series

) KF(NW),K(DN) Main material Body : Aluminum alloy, critical part : SUS304, FKM (standard seal material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Pilot pressure MPa(G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3 0.5MPa 38 91 430 280 500 1000 2300 3700 Port size M5 Rc 1/8 Weight kg 0.28 0.46 1.1 1.4 2.3 4.1 7.6 14.9 8 XL*-OMI0010-E 3-2.

Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

LEFS Series LEFS25, 32, 40 How to Order LEFS 100 A 25 q e y NZ w r t H R q Accuracy r Motor type e Motor mounting position y Stroke [mm] t Lead [mm] Nil Basic type H High precision type 50 50 to to 1200 1200 Nil In-line R Right side parallel L Left side parallel Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting type X NW

4 Port Solenoid Valve Series VQD1000

M: Plug lead type M plug connector, With lead wire With light/ surge voltage suppressor Valve option Standard Vacuum For large flow(1) Nil V U W MO: Plug lead type M plug connector, Without connector With light/surge voltage suppressor For large flow, vacuum(1) Note 1) Latching type: U and W only Note 2) Latching type (-COM): NU and NW Note) When you expect to energize the unit for extended

XLAQ/XLDQ

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. Bellows side Chamber Vacuum pump 476 XLAQ/XLDQ Series Specific Product Precautions 2 Be sure to read this before handling the products. Maintenance Caution 1.