Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 63mm, Thread: NPT, Stroke: 100mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: Double Knuckle Joint, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

XMC/XYC Series

),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) ,CF KF(NW),K(D N) XYC KF(NW) KF(NW) KF(NW) KF(NW) K(DN) KF(NW) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa (G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3 At 0.5MPa 38 91 430 280 500 1000 Port size M5 Rc 1/8 XMC 0.36 (0.40) 0.62 1.40(1.76) 2.10 3.80

XMA/XYA Series

),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) KF(NW), K(DN) ,CF XYA KF(NW) KF(NW) KF(NW) KF(NW) KF(NW) K(DN) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa(G) 0.4 to 0.7 Air consumption At 0.5MPa 19 46 200 360 660 1350 cm3 Note 3 Port size M5 Rc 1/8 Weight kg Note 4 XMA 0.33 (0.37) 0.61 1.40 (1.76) 2.00

XMD/XYD Series

) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange type XYD KF(NW) KF(NW) KF(NW) KF(NW), K(DN) KF(NW), K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Actuation pressure MPa (G) 0.4 to 0.7 Main pumping 46 200 360 660 1350 Air consumption cm3 for 0.5MPa Note 3) Initial pumping 2.5 12 15.5 30 42 Port size M5

5

9 9 80 92 108 75, 100 74 56 M FV 80 10 to 50 73.5 53.5 83.5 63.5 11 11 99 116 134 75, 100 83.5 63.5 100 10 to 50 85 63 95 73 11 11 117 136 154 75, 100 95 73 FT L B + Stroke A + Stroke 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 63 10 to 50 18 43.5 60 75, 100 80 10 to 50 20 53.5 77 75, 100 100 10 to 50 22 53.5 94 75, 100 L1 Flange bracket material: Carbon steel Surface treatment:

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

speed should be 100 to 200mm per second.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

H unit Use this unit when the cylinder is operated in a load and speed range above the L unit limit line and below the H unit limit line. 100 3 5 10 20 50 100 1 2 3 4 5 10 20 30 30 100 200 40 50 MY1B m1,m2,m3 max. m1,m2,m3 max.

Air Cylinder

80, 100 @0 !

AR Series Modular Type Regulator

Nq Body size 10 20 25 30 40 Symbol Description Nw Pipe thread type Nil Metric thread (M5) V Rc V V V V N NPT V V V V F G V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + Ne Port size a Mounting Nil Without mounting option V V V V V B Note 2) With bracket V V V V V H With set nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge

AR20-B to AR60-B

Example) AR30-03BG-NR-B-X425 Symbol Description Nq Body size 25 30 40 50 60 Symbol Description Nq Body size 20 25 30 40 50 60 Nw Pipe thread type Nil Rc N NPT F G + Nw Pipe thread type Nil Rc N NPT F G + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without mounting option B*2 With bracket a Mounting Option *1 H With set nut (for

AC Servo Motor Driver (Pulse input type/Positioning type ）

[degree] speed [r/min] [ms] [ms] 1 120.000 1000 100 150 100 1 05 2 -320 .000 500 150 100 200 1 10 3 -230.000 3000 200 300 150 3 15 4 70.000 1500 300 100 Disabled 0 (Note) 20 Note.

AC Servo Motor Driver (Network card type ）

PF50 100 5 11 5.

Cylinder with Lock

100 63 63 50 50 40 40 80 80 100 100 100 100 Load mass m [kg] Load mass m [kg] 63 63 50 50 40 40 50 50 32 32 32 32 10 10 1 100 500 400 300 200 1000 1 100 500 1000 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph n Graph c 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32

NCG/CG1

bore size 80 and 100.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Servo motor Graph of overload protection characteristics LE-T5 T6 Characteristics a T7 T8 T9 Characteristics b The following graphs show overload protection characteristics. 1000 1000 Operating Operating Operating 100 100 Operation time [s] Operation time [s] Servo-lock Servo-lock 10 10 1 1 0.1 0.1 100 200 300 350 0 50 150 250 350 100 200 300 400 0 50 150 250 350 (Note 1, 2) Load ratio [%

LEC-OM07605CN

[r/min] 100% [0.1%] [0.1%] (1 pulse) 1 [pulse] (100 pulses) 100 [100 pulses] [r/min] [V] 15 [0.1%] ABS [rev] 1 1 [16 pulses] 1 [] 2 1 [] UF/B U VF/B V % [0.1%] [1.125 kpps] () [r/min] (100 pulses) [100 pulses] [r/min] (100 pulses) [100 pulses] [] [] %[AL. 50 1][AL. 51 2]0% [0.1%] 0 pulse [pulse] 1 1INCZ 0ABS [pulse] 2 [pulse] 1 [] 2 1 [] 8 69 8.

17

Maximum Allowable Moment MY1B/M1 MY1B/M2 MY1B/M3 200 300 400 500 40 50 100 30 200 20 50 40 30 100 10 20 40 50 3 4 5 30 10 20 Moment Nm Moment Nm Moment Nm 2 5 4 3 10 1 MY1B40 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B40 MY1B40 0.3 0.4 0.5 MY1B32 1 2 MY1B32 MY1B32 MY1B25 0.2 1 0.5 0.4 0.3 MY1B25 MY1B25 0.1 0.4 0.5 0.2 0.3 0.05 0.04 0.03 0.2 0.1 0.02 0.06 0.1 100 200 300 400 500 1000 1500 100 200 300

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

High Vacuum L Type Valve

H 4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.