10

, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 MB1 Up to 1800 CA2 Up to 1500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 125 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800,

Cylinder with Lock

, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Up to 2500 Cylinder model: MDWBD32-50-NW-M9BW * The manufacturing of intermediate strokes is possible.

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

400, 450, 500 CA2 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper -XC5 Heat resistant cylinder (10 to 110C) -XC6 Made of stainless steel*3 *4 Up to 2700 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 -XC7 Tie-rod

Air Cylinder

Standard Strokes/ (mm) Air cushion Bore size Standard stroke 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Made to 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Made to Order (For details, refer to pages 25 to 27.)

MWB

, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Up to 2500 Cylinder model: MDWBD32-50-NW-M9BW Double clevis The manufacturing of intermediate strokes is possible.

Vacuum

Fluorine rubber How to Order ZPT Mounting thread (Applicalion: Fleler to Li$ e) Pad dia, (mm) 0 2 o 2 0 4 s 4 0 6 0 6 0 8 6 8 l 0 s 1 0 Vacuum enlry (Application: Reler to List O) U Flat type C Flat with rib D Deep type B Bellows type With standard bufter JO With butfer stroke 6mm (tot @2-s8l J10 With bufter stroke 1omm (tor o10-450) KE Non-rotation type with butfer stroke 6mm (for o2-o8)

Vacuum

Fluorine rubber How to Order ZPT Mounting thread (Applicalion: Fleler to Li$ e) Pad dia, (mm) 0 2 o 2 0 4 s 4 0 6 0 6 0 8 6 8 l 0 s 1 0 Vacuum enlry (Application: Reler to List O) U Flat type C Flat with rib D Deep type B Bellows type With standard bufter JO With butfer stroke 6mm (tot @2-s8l J10 With bufter stroke 1omm (tor o10-450) KE Non-rotation type with butfer stroke 6mm (for o2-o8)

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80: 1400 100: 1500 Refer to pages 19 to 23 for cylinders with auto switches. 80, 100 Intermediate strokes not listed above are produced upon receipt of order.

Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

LEFS Series LEFS25, 32, 40 How to Order LEFS 100 A 25 q e y NZ w r t H R q Accuracy r Motor type e Motor mounting position y Stroke [mm] t Lead [mm] Nil Basic type H High precision type 50 50 to to 1200 1200 Nil In-line R Right side parallel L Left side parallel Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting type X NW

4 Port Solenoid Valve Series VQD1000

Base Mounted Conditions Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Base mounted Series CJ2 Series CM2 Series CM2 Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm TU0425 x 1m VQD1151U AS1201F-M5-04 AS2201F-02-04 AN120-M5 Tube bore x Length Series Average speed (mm/s) Speed controller Silencer 6 10 16 20 25 32 40 400 450 500 Perpendicular, upward actuation Horizontal

CQS

F9BA * Lead wire length 0.5m (Example) A93 3m L (Example) A93L 5m Z (Example) F9NWZ * : Manufactured upon receipt of order. 2.2-2 Compact Cylinder/Standard: Double Acting Single Rod Series CQS Specifications Style Pneumatic (Non-lube) Action Double acting, single rod Fluid Air Proof pressure 1.5MPa Max. operating pressure 1.0MPa Without auto switch 10C to 70C (No freezing) Ambient & fluid

CQS

A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 12 V 2-wire 24 V Relay, PLC 3-wire (NPN) 3-wire (PNP) Grommet 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 12V 2-wire Water resistant (2-color indication) Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L

Microspeed Cylinder

L (Example) A93L 5m . Z (Example) F9NWZ Solid state auto switches with a "" symbol are produced upon receipt of order.

MXS

NPN) F9NV F9N 3 wire(NPN) Diagnostic indication (2 color) F9PV F9P 3 wire(PNP) P.5.3-39 F9BV F9B 2 wire Relay, PLC 24V Yes Grommet 12V F9NWV F9NW 3 wire(NPN) F9PWV F9PW P.5.3-66 3 wire(PNP) F9BWV F9BW 2 wire PLC: Programmable Logic Controller *Lead wire length 0.5m (Ex.) 3m L A93 A93L Specifications Specifications are same as the standard style.

Rotary Table/

A93 A93L F9NWZ (Example) (Example) (Example) 13 Rotary Table Series MSQ Specifications 10 20 30 50 70 100 200 Size Air (non-lube) Fluid Maximum operating pressure Minimum operating pressure 1MPa With adjustment bolt Note 1) 0.6MPa With internal shock absorber 0.1MPa Basic type 0.2MPa 0.1MPa High precision type 0 to 60C (with no condensation) Ambient and fluid temperature Rubber bumper With

MXS Series Air Slide Table

L A93L Note) Refer to P. 177 to 179 for further information of auto switch. PLC: Programmable Logic Controller Specifications Specifications are same as the standard type.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

wire length (m) Load voltage Auto switch model Electrical entry direction Wiring (Output) Special function Electrical entry Indicator light Style 0.5 (Nil) 3 (L) Applicable load AC DC 12V Horizontal 100V 24V Reed switch 2-wire Relay, PLC Grommet Yes A93 12V 3-wire (NPN) M9N 24V Solid state switch Relay, PLC Grommet Yes 12V 2-wire M9B Lead wire symbol 0.5mNil (Example) A93 3mL A93L

CRQ2

Indicator light Special function Electrical entry Wiring (output) Electrical entry direction 0.5 (Nil) 3 (L) 5 (Z) Applicable loads Type DC AC Perpendicular In-line A96 A96V 3 wire (NPN equiv.) 5V IC circuit A96L A96VL Reed switch Solid state switch Yes A93 A93V 100V Grommet A93L A93VL Relay, PLC 2 wire 24V A90 A90V 5V, 12V No 100V or less IC circuit A90L A90VL F9N F9NV

CU

L A93L 5m .

Compact Type

Lead wire length symbols 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Refer to page 14 for additional details and applicable auto switches other than the above types.