5

(mm) Stroke range (mm) Special cap bolt 32 5 to 50 50 33 60 43 5.5 8 48 56 65 75, 100 60 43 M FV 40 5 to 50 56.5 39.5 66.5 49.5 5.5 8 54 62 72 75, 100 66.5 49.5 FT L B + Stroke A + Stroke 50 10 to 50 58.5 40.5 68.5 50.5 6.6 9 67 76 89 75, 100 68.5 50.5 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 32 5 to 50 17 38.5 34 75, 100 40 5 to 50 17 38.5 40 75, 100 L1 50 10 to 50 18 43.5 50

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

M2 m2 M3 m3 25 32 40 23 26 23 27.5 27.5 27.5 MY1H 39 50 39 39.2 39.2 39.2 50 50 39 50 50 50 The above values are the maximum allowable values for moment and load mass.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.

Air Cylinder

, 50, 75, 100, 125, 150, 200 MB 40, 50, 63 25, 50, 75, 100, 125, 150, 200, 250, 300 Please consult with SMC for strokes which exceed the standard stroke length.

AR Series Modular Type Regulator

Refer to back page 50 for Safety Instructions and pages 387 to 391 for F.R.L. Precautions. E AV Selection Mounting/Adjustment Warning Warning AF 1. Although exhaust of the residual pressure to the inlet side is possible when eliminating the inlet pressure, exhaust is not possible when the set pressure is 0.15 MPa or less. Use the regulator with backflow function. 1.

NCG/CG1

speed 50 to 400 mm/s 50 to 1000 mm/s Relief port size Auto switch can be mounted.

Cylinder with Lock

1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg

AC Servo Motor Driver (Pulse input type/Positioning type ）

However, setting "0" will be 50%. Example: When you set "50" to the parameter, the filter will be readjusted at the 50 [%] time of 50% or more oscillation level.

AC Servo Motor Driver (Network card type ）

Note that setting "0" will be 50%. Example: When you set "50" to the parameter, the filter will be readjusted at the time of 50% or more oscillation level.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

1 Vibration frequency 50 60 50 Vibration suppression control 1 Resonance frequency 50 60 50 Vibration suppression control 1 Vibration frequency damping 0.20 0.15 0.20 Vibration suppression control 1 Resonance frequency damping 0.20 0.15 0.20 Vibration suppression control 2 Vibration frequency 20 30 20 Vibration suppression control 2 Resonance frequency 20 30 20 Vibration suppression

LEC-OM07605CN

4000 [rad/s] PB32 VICB 50 [ms] PB26 CDP 0003 () PB27 CDL 50 [pulse] PB28 CDT 100 [ms] 7 19 7.

Series SV

SV1000-50-3AFor single SV1000 SV1000-50-4AFor double C4: With 4 One-touch fitting N3: 5/32" One-touch fitting C6: With 6 One-touch fitting N7: 1/4" One-touch fitting C8: With 8 One-touch fitting N9: 5/16" One-touch fitting (Gaskets and are included. ) SV2000-50-3AFor single SV2000 SV2000-50-4AFor double A SV 000 52U 2 Supply/Exhaust end block assembly SV 000 51D A Supply/Exhaust block assembly

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X

High Vacuum L Type Valve

H4 Initial power / 100 VAC 200/40 200/50 400/100 600/150 Power Symbol 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

High Vacuum L Type Valve

H4 Initial power / 100 VAC 200/40 200/50 400/100 600/150 Power Symbol 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

High Vacuum L Type Valve

Valve specifications Model XLFV-16-2 XLFV-25-2 XLFV-40-2 XLFV-50-2 XLFV-63-2 XLFV-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 50 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

High Vacuum L Type Valve

For size 25, 40, 50, and 160, remove the dust from the initial pumping valve seal O ring.

XLG Series

H 4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.