Integrated Controller

300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Product weight [kg] 3.09 3.29 3.49 3.69 3.89 4.09 4.29 4.49 4.69 4.89 5.09 5.29 5.49 5.69 5.89 6.09 6.29 6.49 6.69 6.89 Additional weight with lock [kg] 0.58 Series EQFS40R L Stroke [mm] 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 Product weight [kg] 5.15 5.43 5.71 5.99 6.27 6.55 6.93 7.11

IZx-OMT0049

fr om ioniz er to workpiec e [ mm] mm mm 250 200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50

Electric Actuator / Low profile slider type

Stroke Standard/Produced upon receipt of order 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1100 1200 1300 1400 1500 LEMH25 LEMH32 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1100 1200 1300 1400 1500 LEMH25 LEMH32 Please consult with SMC as all non-standard and non-made-to-order strokes are produced as special orders.

LG1H

Applicable strokes: 450, 550, 650, 750, 850, 950 Example) LG1H2021PC-550-F2-X2 500 8.5 13.3 600 9.3 14.5 700 10.1 15.8 800 10.9 17.1 900 11.7 18.3 1000 12.5 19.6 mm kg kg Standard stroke Aluminum Stainless steel Body weight Operating temperature range 5 to 40 (with no condensation) 30 90 C kg N mm/s mm Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 Positioning

15

LAT LZ LC3F2 Weight Model LEFS25 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 Product weight [kg] 1.50 1.70 1.80 2.00 2.10 2.25 2.40 2.55 2.70 2.80 2.90 3.10 3.35 3.50 3.65 3.80 Model LEFS32 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Product weight [kg] 2.40 2.60 2.80 3.00 3.20 3.40 3.60 3.80 4.00 4.20 4.40 4.60

Electric Actuator/Slider Type

Weight Series LEFS25 V6 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 Product weight [kg] 2.06 2.20 2.34 2.50 2.62 2.75 2.90 3.05 3.18 3.30 3.46 3.60 Additional weight with lock [kg] 0.3 Series LEFS32 V7 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 Product weight [kg] 3.40 3.60 3.80 4.00 4.20 4.40 4.60 4.80 5.00 5.20 5.40 5.60 5.80 6.00 6.20 6.40

Magnet: None, Mounting: F (Front Flange), Bore Size: 63mm, Port Thread: TN (NPT), Stroke: 100mm, Rod Boot: None, Lock Style: HL (With Rear End Lock Locking Style)

Magnet: None, Mounting: F (Front Flange), Bore Size: 63mm, Port Thread: TN (NPT), Stroke: 500mm, Rod Boot: J (Nylon Tarpaulin), Lock Style: RL (Rod Side Lock/Locking)

Magnet: None, Mounting: F (Front Flange), Bore Size: 63mm, Port Thread: TN (NPT), Stroke: 550mm, Rod Boot: J (Nylon Tarpaulin), Lock Style: RL (Rod Side Lock/Locking)

Magnet: None, Mounting: Front Flange, Bore Size: 63mm, Port Thread: NPT, Stroke: 100mm, Rod Boot: None, Lock Style: With Rear End Lock Locking Style, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Front Flange, Bore Size: 63mm, Port Thread: NPT, Stroke: 500mm, Rod Boot: Nylon Tarpaulin, Lock Style: Rod Side Lock/Locking, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Front Flange, Bore Size: 63mm, Port Thread: NPT, Stroke: 550mm, Rod Boot: Nylon Tarpaulin, Lock Style: Rod Side Lock/Locking, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Membrane Air Dryer

rate 1L/min (ANR) {In case of inlet air pressure 0.7 MPa} 1/4 3/8 Port size 0.78 (0.91) 0.81 (0.94) 0.78 (0.91) 0.81 (0.94) 0.78 (0.91) 0.8 (0.94) Mass kg (With bracket) Model Specifications IDG60LA IDG75LA IDG100LA IDG60SA IDG75SA IDG100SA Compressed Air Fluid Range of operating conditions Inlet air pressure MPa 0.31.0 -550 -550 Inlet air temperature oC Ambient temperature oC Standard

2/3 Port Valve

Cv Effective area (mm2) Model Construction/Components AC AC, DC 1.0 0.5 0.3 1.0 0.5 0.3 VX311 -01 0 2 4 VX312 -01 0 2 4 VX313 -01 VX311 -02 1.5 2.2 3 1.5 0.08 0.16 0.24 0.08 0.16 1.4 2.8 4.3 1.4 2.8 0.6 0.3 0.2 0.6 0.3 0.6 1.0 0.2 0.3 0.6 0.15 0.3 0.6 1.0 0.3 0.6 0.15 0.3 1 8 (6A) 0 2 4 0 2 4 0 2 4 VX312 -02 330 2.2 VX3224-02 VX3324-02 550 700 330 550 700 550 700 550 700 550 700 550 700

0.4

Flow rate Power consumption Operating frequency 100 Hz 500 Hz 1000 Hz 80 W 1200 Hz Low flow type 50 L/min 40 W 1000 Hz 10 W 550 Hz 4 W 350 Hz 80 W 650 Hz Medium flow type 100 L/min 40 W 550 Hz 10 W 300 Hz 4 W 200 Hz 80 W 600 Hz High flow type 150 L/min 40 W 500 Hz 10 W 250 Hz 4 W 150 Hz VCH VDW SX10 SX10 Select a model according to applications and purposes.

LEH_C

LEHS 4.1 LEHS10 LEHS20 LEHS32 LEHS40 / (mm) 4 6 8 12 (mm) 255/76 235/56 235/40 235/40 2.25.5 922 3690 52130 (N) 40100 1) 3) 1.43.5 717 /(mm/s) 2) 3) 570 /550 580 /550 5100 /550 5120 /550 (mm) 4) 0.02 (mm) 5) 0.05 /(mm) 6) 0.5 / (m/sec 2) 7) 150 30 (c.p.m) 60 () 540 (%RH) 90 () 185 410 975 1265 (g) 150 345 20 28 42 (DC24V) () A/B (800 /) (V) DC2410% 11/7 28/15 34/13 36/13 /

Proposals for Energy Saving

with M5 thread Flow direction: Right to left With element service indicator Size 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 01 02 03 04 06 10 14 20 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B, 650 75B, 850 Rc NPT G 1/8 1/4 3/8 1/2 3/4 1 1 1/2 Nil J M R T Nil B C D Option Accessory Size Bore size RT T R JR JRT MR J MRT JT MT M 03 06 04 01 02 20 14 Size 10 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B

Slider Type Ball Screw Drive/11-LEFS Series

Motorless LAT LZ LC3F2 Weight Series 11-LEFS25S Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 Motor type S2 2.00 2.14 2.28 2.44 2.56 2.69 2.84 2.99 3.12 3.24 3.40 3.54 S6 2.06 2.20 2.34 2.50 2.62 2.75 2.90 3.05 3.18 3.30 3.46 3.60 Additional weight with lock [kg] S2: 0.2/S6: 0.3 Series 11-LEFS32S Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 Motor

DOC1023125

Applicable stroke table Size Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 25 32 40 25 - .

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

10 to 300 Actuator specification Electric 401 to 500 10 to 600 5 to 300 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 800 16 to 620 8 to 310 30 to 750 20 to 550 10 to 300 Parallel Stroke 701 to 800 20 to