Applicable piping size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 2 2 3 1 2 3 2 3 4 B B C A B C B C D 6 x 4 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 1/4" x 5/32" 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 12 x 10 1/2" x 3/8" 19 x 16 3/4" x 5/8" 25 x 22 1" x 7/8" Dimensions Union Flange: LQ3F Metric Size (S) T P M L2 L2 L1 L1
(R2) 5 (R1) (A) 4 (B) 2 3 position double check 1 (P)3 (R2) 5 (R1) Blank plate assembly VVQ5000-10A-1 Individual SUP spacer VVQ5000-P-1Individual EXH spacer VVQ5000-R-1Throttle valve spacer VVQ5000-20A-1 03 04 03 04 Double check spacer with residual pressure release valve VVQ5000-25A-1 Release valve spacer VVQ5000-24A-1D SUP stop valve spacer VVQ5000-37A-1 SUP blocking plate VVQ5000-16A-1
) Fig. 2-2 Names of the parts Table 2-1: Accessory list (1) Alarm code list label (English) 1 pc. (2) Operation manual (English) 1 copy (3) Y strainer (40 mesh) 25A 1 pc. (4) Barrel nipple 25A 1 pc.
The anchor bolts are not 2 pcs. (1) Operation Manual (English 1 pc. /Japanese 1 pc.) (2) Y strainer (40 mesh) 25A 1 pc. (3) Barrel nipple 25A 1 pc. For HRS400-AF-46G thread adapter set 1 set (4) For HRS400-AN-46NPT thread adapter set 1 set (5) Anchor brackets 1 2 pcs. (M8 bolts) 6 pcs. (6) For option D. DI Filter 1 pc. attached.
voltage Valve size A: Non-locking extended type Nil Air operated Symbol Orifice size (mm) Symbol Port size Rc Valve size 1 1 2 4 1 2 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Symbol N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa B: Locking slotted type 3 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 4 7 1 5 6 24 VDC 12 VDC 7 240 VAC 50/60 Hz 15 (11) 2 Nil: Non-locking
6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !
Series: 6 (ø22mm), Valve Type: 0 (N.C.), Type: Standard, Tubing Size: 20A (ø26mm), Pilot Port Thread: N (NPT 1/8), Pilot Port Position: 2
Series: 6 (ø22mm), Valve Type: 0 (N.C.), Type: Standard, Tubing Size: 25A (ø32mm), Pilot Port Thread: 1 (Rc 1/8)
Series: 6 (ø22mm), Valve Type: 0 (N.C.), Type: Standard, Tubing Size: 20A (ø26mm), Pilot Port Thread: 2 (M5 x 0.8)
Series: 6 (ø22mm), Valve Type: 0 (N.C.), Type: Standard, Tubing Size: 20A (ø26mm), Pilot Port Thread: N (NPT 1/8)
Series: ø22mm, Valve Type: N.C., Type: Standard, Tubing Size: ø26mm, Pilot Port Thread: NPT 1/8, Pilot Port Position: 2, Material: -, Option: -
Series: ø22mm, Valve Type: N.C., Type: Standard, Tubing Size: ø32mm, Pilot Port Thread: Rc 1/8, Pilot Port Position: -, Material: -, Option: -
Series: ø22mm, Valve Type: N.C., Type: Standard, Tubing Size: ø26mm, Pilot Port Thread: M5 x 0.8, Pilot Port Position: -, Material: -, Option: -
Series: ø22mm, Valve Type: N.C., Type: Standard, Tubing Size: ø26mm, Pilot Port Thread: NPT 1/8, Pilot Port Position: -, Material: -, Option: -
Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40 Refer to page 38 for model selection. How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !
An analog voltage or current output is available. 25A-PFM5 is IP40 rated, CE and RoHS compliant. Compatible with the 25A-PFM3 monitor. Flow ranges (lpm): 0.2-10, 0.5-25, 1-50, 2-100; Port sizes: 1/8 or 1/4 (Rc, NPT, G); ø6 or ø8 one-touch fittings; Rated pressure range (MPa): -0.07 to 0.75; Output options: 1-5V or 4-20mA; Accuracy: ±3% F. S.; Repeatability: ±1% F. S.
An analog voltage or current output is available. 25A-PFM5 is IP40 rated, CE and RoHS compliant. Compatible with the 25A-PFM3 monitor. Flow ranges (lpm): 0.2-10, 0.5-25, 1-50, 2-100; Port sizes: 1/8 or 1/4 (Rc, NPT, G); ø6 or ø8 one-touch fittings; Rated pressure range (MPa): -0.07 to 0.75; Output options: 1-5V or 4-20mA; Accuracy: ±3% F. S.; Repeatability: ±1% F. S.
Applicable valve model Port size 1 100 VAC, 50/60 Hz Symbol Option Without sub-plate VP454 2 200 VAC, 50/60 Hz 00 3 110 VAC, 50/60 Hz VP474 4 220 VAC, 50/60 Hz (10A) 3 8 (15A) 1 2 03 04 5 24 VDC VP450 6 12 VDC 06 (20A) 3 4 10 (25A) 1 7 240 VAC, 50/60 Hz 9 Other 12 (32A) 1 4 1 14 (40A) 1 2 1 VP470 Option Note) There is no 3 position type for Series VP470.
Series Nil CD1 Note 1) 5 VQ5000 Cylinder port size CD2 Note 1) 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) 03T 04T BT 03 04 B CM Manifold type CU1 Note 1) 1 Plug-in unit CU2 Note 1) SB SD Note 1) Stations SU Note 1) 1 1 station D U D U Note 1) Combination of [C ] and [S ] is not possible.