VXA21/22

1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

VXA31/32

A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

Clean Exhaust Filter

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

VXA21/22

4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

Symbol: 20R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material/Port Size: w/o Sub-plate, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 6 (600mm)

Symbol: 20R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material/Port Size: w/o Sub-plate, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: Q (CE Compliant)

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size: w/o Sub-plate, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 600mm, CE Compliant: -

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: Others, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 2, Insulation Class: B, Pipe opening type (details): Base Mounted Type, Voltage: 24 V DC, Power

Safety Instructions

Take measures to prevent moisture from freezing in circuits when below 5C, since this may cause damage to the O-ring and lead to a malfunction. The installation of an air dryer is recommended for eliminating condensate and moisture.

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Series D 10-SY3000 SY3000-52-6A A 10-SY5000 SY5000-52-4A L Dimensions 10-SY7000 SY7000-70-2A EXH block disc Model A L D 16 18 20.5 22 24 16 18 20.5 22 Applicable fitting size d 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-10 10-KQP-12 10-KQP-03 10-KQP-07 10-KQP-09 10-KQP-11 6 8 10 12 14 6 8.5 10 11.5 32 35 39 43 45.5 32 35 39 43 By installing an EXH block disk in

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

AC Servo Motor Driver (Network card type ）

20 40 70 100 200 Bend radius [mm] 10 7 10.

AC Servo Motor Driver (Pulse input type/Positioning type ）

OUTLINE DRAWINGS 91 to 9-5 9.1 Driver . 92 9.2 Connector. 95 10. CHARACTERISTICS 101 to 10-7 10.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Free Mount Cylinder Series CU

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

Free Mount Cylinder

1 pc. 10 5 10 2 pcs.

Magnetically Coupled Rodless Cylinder

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Air Cylinder Series CM2

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.