VXZ

width across flats 22 Cable 6 to 12 Hexagon width across flats 22 LVQ Model N N.C.

1

Connector for unit (Plug) 6 y t y t EX600-DXB EX600-DYB EX600-DXC q w q w e q w er e y t y t y t EX600-DXD EX600-DXE EX600-DYE EX600-DME EX600-DXF EX600-DYF EX600-DMF Analog Unit q w e q w e No.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Note Description SY940 M2: 0.15Nm M3: 0.6Nm M4: 1.4Nm SY5000-27-1*-Q Rc 1/4: SY7000-27-1*-Q Rc 3/8: SY7000-27-2*-Q SY3000-27-1*-Q Rc 3/8: SY9000-27-1*-Q Rc 1/2: SY9000-27-2*-Q 6 Die-cast aluminum Sub-plate *Thread Pilot valve assembly Refer to "How to Order Pilot Valve Assemblies" on page 1.2-32.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Note Description SY940 M2: 0.16 Nm M3: 0.8 Nm M4: 1.4 Nm Aluminum die-casted 1 4 3 8 3 8 1 2 SY5000-27-1 (-Q) : SY7000-27-1 (-Q) : SY7000-27-2 (-Q) SY3000-27-1 (-Q) : SY9000-27-1 (-Q) : SY9000-27-2 (-Q) Sub-plate Note) 6 Pilot valve assembly Refer to How to Order Pilot Valve Assembly on page 130.

Table of Contents

(mm) Model L Q Weight (g) 2-applicable tubing M2 D KGL04-00 18 4 6 8 10 16 17 18.5 21 10.4 4.5 4.2 4.2 6 KGL06-00 20 12.8 5.3 11.4 9.0 6 KGL08-00 23 15.2 6 21.6 14.9 10 KGL10-00 26.5 18.2 6.8 35.2 25.0 17 KGL12-00 28.5 20.9 7.5 50.2 39.7 21 12 22 KGL16-00 34 26.5 10 100 (84) 29 16 25 K Note 1) D: Max. diameter Note 2) ( ): Values for nylon.

ZP

6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 119 137.5 141 6 13.5 25 28 50 53 ZPT32F10-0-A14 16 36.5 49 115.5 134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q

SY

Specification Standard/Internal pilot Internal pilot/Built-in silencer Symbol Nil Applicable tube size SY5000 SY3000 4 4 4 6 6 4 6 6 8 4 8 Mixed 6 Mounting position Applicable stations Symbol U Symbol The type of lead wire assemblies included is different.

Air Cylinder Series CM2

(mm) (mm) (mm) Bore size Bore size NN NA KA N Z ZZ P S MM K Bore size N1 Q P WA G 8 1 20 20 20 24 6 15 107 116 62 5 21.5 13 6 17.5 8 M8 x 1.25 M20 x 1.5 8 1 25 25 25 30 8 15 111 120 62 5.5 24.5 13 6 17.5 8 M26 x 1.5 M10 x 1.25 8 1 32 32 32 34.5 10 15 113 122 64 5.5 27 13 6 17.5 8 M26 x 1.5 M10 x 1.25 4 1 40 40 40 42.5 12 21.5 143 154 88 M32 x 2 7 32.5 16 8 21.5 11 M14 x 1.5 With Rod Boot

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Magnetically Coupled Rodless Cylinder

6@4 @6!0i q !4 !2 r @3 @7 o u y t @8 !8 !9 @2 CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t @0 !8 !9 @2 CY3R15 to 63 2a 3a @0 @4 @9 @6 !5 !6 !3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

Table of Contents

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

NCQ8

Q J E D-rod Dia.

Mechanically Jointed Rodless Cylinder Series MY1

-X D 11.4 11.4 13.4 d 6 6 8 Y 9 11 14 S 4 6 9 Applicable O-ring C9 C9 C11.2 WX 38 48 54 Bore size (mm) 25 32 40 Individual -X Technical data 1073 Series MY1W Dimensions: 50, 63 MM M (LL) L B ! " C LD # $ % " J K PA YW QW LW PB Q& ' ( PG ) ! *+*%*"% , . . /*#! ( * * % # 0 W CH LH RR SS NE RR SS H HH NH PP QQ NC . 0 ! !% GA TT UU UU TT . GC . /*#! ( * * % # . /*#!

2/3 Port Valve

steel body Aluminium body S B Refer to table q for application.

MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Refrigerated Air Dryers Series IDF/IDU

Note 6) JIS 10K FF is used as a flange. IDF120D to IDF240D Construction Principle (Air/Refrigerant Circuit) w Air cooler q Air re-heater Compressed air inlet High temperature humid air from the air compressor passes through the air re-heater q and is pre-cooled by dehumified cool air.

ZP

8 7 9 3.3 4.7 9.1 10.1 2.5 4 5 4 ZQ 5 6 8 32 34 29 39 57 ZPY32B Applicable Tubing Applicable Tubing ZF Q R Applicable tube P Q R Applicable tube P N4 (Nylon tube, 4/2.5) N6 (Nylon tube, 6/4) U4 (Urethane tube, 4/2.5) U6 (Urethane tube, 6/4) 13.5 15.5 5 7 1.8 2.5 ZP N4 (Nylon tube, 4/2.5) N6 (Nylon tube, 6/4) U4 (Urethane tube, 4/2.5) U6 (Urethane tube, 6/4) 14.5 16.5 5 7 1.8 2.5 13.5 15.5

VM

8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective