5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

code O.D. 6 to 8 VFS Lead wire O.D.

VFS

Applicable cable: O.D. 6 to 8.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Cable Color List of Each Terminal No. 1 2 4 6 8 10 12 3 5 7 9 11 13 Terminal no. Lead wire color Dot marking 2 3 4 5 6 Pink 7 8 Terminal no.

VFR

Air release valve Air release valve 1 station 1 station Control unit Control unit 1 station 1 station Pressure switch Pressure switch Connector terminal no. 2 station 2 station 2 stations 2 stations 3 stations 3 stations 3 stations 3 stations 4 stations 4 stations 4 stations 4 stations 5 stations 5 stations 5 stations 5 stations 6 stations 6 stations 6 stations 6 stations Connector terminal

With Factory Installed

AW2001 AW3001 AW4001 6) Valve ass'y Brass NBR 1349160 131521 6A 13 16212A e Filter element Bronze 11 294-5B 11 1511-5B 11 104-5B Baffle ABS resin 11295 111522 111622 0 Diaphragm ass'y NBR 131445A 131 52 15A 1316211A Deflector ABS resin 112961 11158 11167 Ci) Bowl ass'y 1'<0'., Polycarbonate C200F C300F C400F 0 Valve spring Stainless steel 13491 58 131525 131625 C!!)

Filter Regulator IW Series

Description Material y Stainless steel 1301-002 1301-1202 1301-2502 1301-902 6 Pilot valve Stainless steel/NBR 1301207#1 1301207#1 u 7 Element Bronze 1301-5B 1301-5B !

AC Servo Motor Driver (Network card type ）

4 6.

AC Servo Motor Driver (Pulse input type/Positioning type ）

PF_ _ ]) . 5-63 6. NORMAL GAIN ADJUSTMENT 61 to 6-33 6.

KJ

360 around the stud axis For reducing R 1/8 female to M5. 1 8 For nylon tubing 1 8 R x M5 female M-5B 6/4 x R 6/4 x M5 M-01AN-6 P. 56 M-5HL-6 P. 58 P. 59 1 8 Plug Use to plug unused M5 port.

Base Mounted Metal Seal/Rubber Seal Series VQ

SI unit output and coil numbering 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.

Proposals for Energy Saving

8 @4 #3#0 #4$0#9@5#2w @6 @3ue !6!5 !1 !2 !0 #7@1#5@2 @8@7#6@0#8 End lock !3 !4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

Table of Contents

Note 6) When the current output is selected.

0.4

mA), Holding 1.26 VA (6 mA) 200 VAC N.C.

0.4

mA), Holding 1.26 VA (6 mA) 200 VAC 5(R1) 1(P) 3(R2) Inrush 1.38 VA (6 mA), Holding 1.38 VA (6 mA) 220 VAC 4-position dual 3-port valve Note) 2(B) 4(A) VQZ (B) Note 1) Use dry air to prevent condensation when operating at low temperatures.

Series VQ Base Mounted Metal Seal/Rubber Seal

(Except for L kit) Note 6) Indicate R for the valve with external pilot.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

mA), Holding 1.26 VA (6 mA) 200 VAC Inrush 1.38 VA (6 mA), Holding 1.38 VA (6 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

mA), Holding 1.26 VA (6 mA) 200 VAC Inrush 1.38 VA (6 mA), Holding 1.38 VA (6 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.

KR

4 x M5 MS-5B MS-5AU-6 P . 28 P . 27 Barb elbow for soft tube Plug Body rotates at 360 around the stud axis For soft nylon tube 3.18, 2.18 x M5 Use to plug unused M5 port.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

) M-5-4-P01 Cap nut C3604 (With electroless nickel plated) M-01H-6, M-5H-6 M-5HL-6, M-5HLH-6 M-5-6-P01 200

Stainless Steel One-touch Fittings Series KG

Body rotates at 360 around the stud axis. 6/4-M5 6/4-M5 MS-5ATHU-6 MS-5HLH-6 P. 133 P. 134 Applicable MS-5ALHU-6 MS-5HLH-4 MS-5HLH-6 MS-5ATHU-6 only Gasket Gasket(H) To seal M5 thread. M-5GH To seal M5 thread M-5G1 P. 134 P. 134 132 Miniature Fittings Series MS Barb fitting for soft nylon: MS-5AU-3, -4, -6 Effective orifice(mm 2) Weight (g) D L Part No.