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Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2

120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 635 870 34 1000 24 326 745 550 300 860 1650 2105 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 630 920 37 750 24 317 795 600 300 880 1410 1865 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 710 970 37 1000 24 394 795 600 300 880 1670 2125 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 735 970 53 750

KT-FGDC KT-FGDE KT-FGDT KT-FGDF Replacement parts A 1 kit for each of each one of seals q to t and gasket.

KT-FGDC KT-FGDE KT-FGDT KT-FGDF Replacement parts A 1 kit for each of each one of seals q to t and gasket.

IDF370B Compressed air inlet Compressed air outlet Port size (JIS 10K 6B) (400) (280) (310) Power supply cable entry 1670 Cooling water outlet (Rc 1 1/4) 100 (190) Cooling water inlet (Rc 1 1/4) (250) (90) (210) 75 650 (390) 1050 Rc 3/8 (800) 1810 Anchor bolt hole 4-20 18 Series IDU/IDF Option Specification Refer to pages 1, 5, 9, 13 and 16 for "How to order" of options.

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

B 8B () (+) Station 8 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL. A 9A () (+) SOL. B 9B () (+) Station 9 SOL. A 10A () (+) Note) There is no polarity. This device can also be used as a negative common. SOL.

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 Paddle Style Flow Switch Series

Bore size 5" lOSJ 15 st 20" 30" 5 s 1 I 10~1 JSS .I 2QS l 3Q" 5" 10s~ 15 91 20 91 30'" (mm) 6 35.5 40.5 45.5 SO.5 48.5 53.5 58.5 63.5 52.5 57.5 62.5 67.5 54 I 59 58 63 7M ' 75.5 8M 81 91 40.5 42 45.5 50.5 55.5 65.5 67 '61l 10 15 1).5 65.5 71 . 69 ~', 79 73 83 57 47 52 6B 66 78 . BOre size ' 1~ A ' Q K B C GB J MM . NN ' A' oD C~ IGA ; H I " 'R J, , SLD (Trol). " ... .

Refer to POINT of section 3.6.1 for logic of MELSEC iQ-R series/MELSEC-Q series/MELSEC-L series/MELSEC-F series.

oN Opd.tion: 360 it60 131) 130 360 360 130 150 150 r5n 150 1 1 0 150 150 i $'q (46.C) (4.5) 0,177 t'r.5) (10) 0.39,1 ool (5) (5) .) 0346 19.81 0.543 03.31 03.q M6di4 air {lub.i*td d 0ll.16}, .nd non.flflm.blo mn.torlci non{orcs!.

Motion controller Q series Programming Manual (COMMON) (Q173D(S)CPU/Q172D(S)CPU) (IB-0300134) "4.11.1 Connect/disconnect function of SSCNET communication" MELSEC-Q QD77MS Simple Motion Module User's Manual (IB-0300185) "14.12 Connect/disconnect function of SSCNET communication" MELSEC-L LD77MH Simple Motion Module User's Manual (IB-0300172) "14.13 Connect/disconnect function of SSCNET communication

PA01] ) [AL. 3E.1 ](J4/J3 ) 8.7 J3 J3MR-J3 (1)2 (_ _)3 (_ _._)(_ _)(._)(_ _) (2) ON/OFF /( ) Q (Q173D(S)CPU/Q172D(S)CPU) (IB-0300126) 4.11.1 SSCNET / MELSEC-Q QD77MS (IB-0300184) 14.12 SSCNET / MELSEC-L LD77MH (IB-0300162) 14.13 SSCNET / (3)J3 28 8.8 J3 PLC 8.8.1 J3 (1) .1J3 10s .1.2 .2 LEDAb.1b012 Ab. .1 () Q17_DSCPU Q17_DCPU Q17_HCPU Q170MCPU QD77MS_ QD75MH_ QD74MH

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

Features 3 Series IDF100FS/125FS/150FS Convenient functions Clear digital display (This displays the operation factor (dryer output) as an example.) q E02 Fan motor failure Example Easy-to-see LED even in a dark place Fault diagnosis with alarm codes Alarm name Alarm code Operation Main cause w E00 Stop Abnormal phase Phase sequence reversal or open phase E01 Stop Thermal trip Clogging of