0.4

w e q w VQ1100 VQ1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Modular Type Air Filters Series AF

Modular Type Air Filters Series AF Air Filter Series AF Filtration (m) Model Options Port size AF10 M5 x 0.8 AF20 1/8, 1/4 AF30 1/4, 3/8 Bracket AF40 1/4, 3/8, 1/2 5 Float type auto drain AF40-06 3/4 AF50 3/4, 1 AF60 1 Page 328 through to 336 Mist Separator Series AFM AFM20 1/8, 1/4 AFM30 1/4, 3/8 Bracket 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Page 338 through to 344 Micro

0.4

w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2

Table of Contents

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

Proposals for Energy Saving

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Construction Auxiliary Pneumatic Equipment Air Preparation Equipment i q u !3 !1 r t y !2 e !4 !5 !4 !5 !

KJ

Male thread type Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Part no.

Series VQ Base Mounted Metal Seal/Rubber Seal

() 7B 3 rows 9 to 12 stations (+) () 8A Sequence 3.

Base Mounted Metal Seal/Rubber Seal Series VQ

to 6 t t Pilot valve assembly Double/3 position Pilot valve assembly Double/3 position Note) (H): 1.5 W, (Y): 0.5 W Note) (H): 1.5 W, (Y): 0.5 W 2-4-223 Series VQ Construction: VQ0/Plug Lead Unit Metal seal Rubber seal type Component Parts Component Parts Note q w e Note q w e Material Material No.

Filter Regulator IW Series

Description Material y Stainless steel 1301-002 1301-1202 1301-2502 1301-902 6 Pilot valve Stainless steel/NBR 1301207#1 1301207#1 u 7 Element Bronze 1301-5B 1301-5B !

KR

Note) D1: Max. diameter 15-3-3 4 Series KR Union Tee: KRT Effective area (mm 2) FR soft nylon FR double layer Applicable tubing O.D.

AC Servo Motor Driver (Pulse input type/Positioning type ）

3.

Stainless Steel One-touch Fittings Series KG

A Weight (g) L1 L2 M D Q Part No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

1 3.

LEC-OM07605CN

-15 3.5.1 . 3-15 3.5.2 . 3-16 3.5.3 . 3-17 3.5.4 . 3-17 3.6 . 3-18 3.6.1 (SS1) . 3-18 3.6.2 . 3-19 3.6.3 . 3-20 3.6.4 EM2 . 3-20 3.7 . 3-21 3.7.1 . 3-21 3.7.2 . 3-22 3.8 . 3-23 3.8.1 . 3-23 3.8.2 . 3-24 3.8.3 . 3-26 1- 3.9 SSCNET . 3-27 3.10 . 3-29 3.10.1 . 3-29 3.10.2 . 3-30 3.11 . 3-34 4 41 4-18 4.1 . 42 4.1.1 . 42 4.1.2 . 43 4.1.3 . 45 4.2 . 45 4.3 . 47 4.3.1

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

(mm) Connection thread M3 x 0.5 M5 x 0.8 Weight (g) Connection thread H A B C D E F M Applicable tubing Model M q w e M-3AU-2 M-5AU-2 4.5 7 9 10 3 4 5 7.7 0.9 0.7 1.5 4 2 / 1 .2 4 2.5 Component Parts No. 1 2 3 Description Sleeve Barb fitting Gasket Material C3604 C3604 Note Electroless nickel plated Electroless nickel plated E D F NBR, Stainless steel 304 B C Width across flats H A Barb

5 Port Solenoid Valve, Series VQC

Values for double types are when the switch is ON. 1 5 3 N.C. N.C. 4-position dual 3-port valve (B) 4 2 1 5 3 N.O. N.O. 4-position dual 3-port valve (C) 4 2 1 5 3 N.C.

F

Applicable Model D L Q M Minimum Tube OD Hole Inch Diameter Applicable Model D L Q M Effective Tube OD mm Orifice (mm 2) Nylon/Urethane 1/8 KQL01-00 9.6 17.5 4.3 15.5 2.5 3.2 KQL23-00 9.6 17.5 4.3 15.5 3/2.5 5/32 KQL03-00 10.4 18 4.5 16 3 4 KQL04-00 10.4 18 4.5 16 4.2/4.2 3/16 KQL05-00 11.4 19.5 4.8 16.5 3.5 6 KQL06-00 12.8 20 5.3 17 11.4/11.4 1/4 KQL07-00 13.2 20.5 5.3 17 4.6 8 KQL08-00

VZS

For details, refer to pages 3-7-19 and 3-7-20.