New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Construction Wetted Parts Material AK3542 Wetted Parts S Body 316 SS Diaphragm Ni-Co Alloy Seat PCTFE (Option: Polyimide) Diaphragm Seat Body 1 Diaphragm Valves for General Applications Air Operated Type Series AK3542 & 4542 Specications Operating Parameters AK3542 AK4542 Status Normally closed (N.C.)

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/1283 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS15, CXSL15 10-/11221221S ZZ SS 20 10 9 2-4.3 through Z 28 counter bore depth 4.4 18 5 30 1 M6 x 1.0 x 5L (Hexagon socket

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS25-10 S SS ZZ Z 10 94 118 30 20 104 128 40 30 114 138 40 40 124 148 40 21-/2210-/11-/12CXS25-20 CXS25-30 CXS25-40 CXS25-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 134 158 60 21-/2210-/11-/12100 184 208 80 CXS25-75 CXS25-100 21-/2210-/11-/1275 159 183 60 21-/2210-/11-/12858 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS32, CXSL32 10-/11221221S ZZ SS 38 16 14 2

Process Gas Diaphragm Valve

Please refer to page 1114. 2 ports Wetted Parts Material Specifications Operating Parameters Status Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Wetted Parts Body Surface finish Diaphragm Seat S 316L SS Electropolish + Passivation Ni-Co Alloy PCTFE (Option: Polyimide) AZ4542 AZ3542 Normally closed (N.C.)

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

2-3.4 through 2-6.5 counter bore depth 3.3 2-2.5 x 14l AW (spring pin) 20 Z 9 5 1 35 0.2 35 0.2 33.6 46 44 20 6.3 5 2.1 2-M4 x 0.7 (through) M4 x 0.7 x 14.5l and M4 x 0.7 (hexagon bolt) (hexagon nut) 7.5 2-M3 x 0.5 (through) 20 (Z) 4-M3 x 0.5 thread depth 4.5 (same on reverse side) 4-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 7 3 8.5 30 8 Model S ZZ Z SS CXS10-10-XB19

MY1

NE RR2 SS H PP2 QQ PP1 QQ NH NC P (Port) P (Hexagon socket head taper plug) Back port (Refer to page 39.)

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

NE CX RR2 SS H PP2 QQ PP1 QQ Back port NH NC (Refer to P. 8-12-3.)

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

NE RR2 SS H PP2 QQ PP1 QQ NH NC P (Port) P (Hexagon socket head taper plug) Back port (Refer to page 39.)

EXxx-OMZ0016

Problem 3 Red ON OFF Red Flashing W-SS W-SS LED flashes red or orange or is off Problem 4 Orange Flashing OFF Green Flashing Red Flashing Red ON W-NS W-NS LED does not turn on green. Problem 5 Red Green Alternate Flashing OFF Red Flashing W-MS W-MS LED does not turn on green.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Y S Applicable O-ring C6 C6 WX 30 32 Bore size (mm) 16 20 9 6.5 6.5 8 8-12-18 19 Series MY1W Mechanically Jointed Rodless Cylinder With Protective Cover Dimensions: 25, 32, 40 L (LL) PA 4-MM depth M 4-B counterbore depth C LD through-hole bottom side J depth K YW MX PB QW LW MTS MY Q + Stroke PG CY P (Hexagon socket head taper plug) P (Port) W MG CH LH RR1 SS NE CX RR2 SS H PP2 QQ PP1 QQ

MY1

GR-S-010 (10 g), GR-S-020 (20 g) Technical Data 1353 MY1W Series Dimensions: 16, 20 (LL) L 4 x MM depth M 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW Q+ Stroke PG M5 x 0.8 M5 x 0.8 (Hexagon socket head plug) (Port) W CH LH RR SS NE H RR SS NH HH QQ NC M5 x 0.8 M5 x 0.8 2 x 2 x M5 x 0.8 PP TT UU (Port) This port is not available for use.

MY2

XX SS RR NE QQ PP H UU TT RW PH G A N UU VV T-slot for body mounting Z + Stroke (mm) Model MY2C16G MY2C25G MY2C40G LB 72.4 108.7 135.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 MW 64.6 97.5 121.5 C 3.3 5.4 8.6 M 7 9 13 B 6.5 9.5 14 L 80 110.8 180 LW 104 158 214 A 80 105 165 LC 6 7 7 (LL) 40 49.6 75 LD 3.4 5.5 9 LE 5 5 5 MM M4 x 0.7 M5 x 0.8 M6 x

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T-slot for body mounting MY2C16G NC GB Cushion needle 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 1 1 SS XX SS RR NE QQ PP H UU TT RW PH G A N UU VV T-slot for body mounting Z + Stroke

Support Guide/11-LEFG Series

Vacuum suction from the vacuum port minimizes external particle generation from the ball screw and guide. 25AVacuum suction LEC Vacuum suction LEC S LEC SS-T LEC Y Support Guide/11-LEFG Series Page 527 Motorless A support guide is designed to support workpieces with significant overhang.

Clean Gas Filter

IDG IDK AMG AFF <1/4"> Nut Swagelok fittings by Swagelok Company VCR female nut (SS-4-VCR-1) Gland Swagelok fittings by Swagelok Company VCR gland (SS-4-VCR-3) Gasket Swagelok fittings by Swagelok Company VCR gasket retainer assembly (SS-4-VCR-2-GR) AM AMD AMH AME Fluid AMF Warning ZFC 1.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

QQ PP SS RR 1 NH NE H QQ P (Port) G UU (Hexagon socket head taper plug) TT TT UU YH H2 H1 2 x P PP NC Cushion needle G GB N A 2 x P P (Hexagon socket head taper plug) (Hexagon socket head taper plug) Z + Stroke 2 x 2 x J depth K 2 x ZZ VV 2 x ZZ VV WW XX WW XX (Hexagon socket head taper plug) (Hexagon socket head taper plug) Long hole for stroke adjustment (Adjustment range: 0 to TL mm)

NCA1

HOW TO O R D E R X T A1 NC A U T O S W I T C H C O N S T R U C T I O N T Y P E (PLEASE SEE PAGE 1 FOR CONSTRUCTION DETAILS) Standard D Auto Switch capable (Stainless and Steel Construction (1.5~14) All Stainless Steel (1.5~14) Steel w/ Composite Tube (1.5 14) Stainless Steel w/ Composite Tube (1.514) ST SS SCT SSCT ...

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

NE PP QQ RR SS H SMC TT UU VV UU PH A G RW T-slot for body mounting N Z + stroke J M4 x 0.7 M6 x 1 M8 x 1.25 MM M5 x 0.8 M8 x 1.25 M10 x 1.5 Model MY2HT16G MY2HT25G MY2HT40G L 80 110.8 180 H 28 37 58 GB 17 19.5 31.5 LA 70 100 158 NT 4.7 6.5 9 NH 3 4 5 NE 27 35.5 56.5 NC 14 21.3 32.4 N 20 25 40 M 9 12 16 LW 120 176 229 G 8.5 10.7 15.5 C 5.4 8.6 10.8 LB 87.4 124.7 148.3 B 9.5 14 17.5 (LL)

Air Cylinder NCA1 Series

HOW TO O R D E R X T A1 NC A U T O S W I T C H C O N S T R U C T I O N T Y P E (PLEASE SEE PAGE 1 FOR CONSTRUCTION DETAILS) Standard D Auto Switch capable (Stainless and Steel Construction (1.5~14) All Stainless Steel (1.5~14) Steel w/ Composite Tube (1.5 14) Stainless Steel w/ Composite Tube (1.514) ST SS SCT SSCT ...