2

Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3

155

2 3/4 1 3/8 1/2 3/4 1 3/8 1/2 3/4 1 4.6 6.5 11.8 18.3 3.5 4.8 7.1 11.0 1.25 2.7 4.5 7.3 0.5 MPa 1.0 MPa 1.6 MPa ( ): Mass including the bracket Add the mass of an auto switch additionally.

High Vacuum L Type Valve

Heater specifications Item XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 Rated voltage of the heater 90 to 240 ACV Heater assembly number XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Indicator Valve size 16 25 40 50 Without XLAV16-30-1-2 XLAV25-30-1-2 XLAV40-30-1-2 XLAV50-30-1-2 With XLAV16A-30-1-2 XLAV25A-30-1-2 XLAV40A-30-1-2 XLAV50A-30-1-2 Indicator Valve size 63 80 Without XLAV63-30-1-2 XLAV80-30-1-2 With XLAV63A-30-1-2 XLAV80A-30-1-2 Note 1) Add the seal material symbol shown on page 8 at the suffix of the model number.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Indicator Valve size 16 25 40 50 Without XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 With XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 Indicator Valve size 63 80 Without XLFV63-30-1-2 XLFV80-30-1-2 With XLFV63A-30-1-2 XLFV80A-30-1-2 Note 1) Add the seal material symbol shown on page 8 at the suffix of the model number.

Thermo-con

400 W Note 1) 320 W Note 1) Heating capacity 770 W Note 1) 0.018 to 0.054F (0.01 to 0.03C) Temperature stability Note 2) Pump capacity Refer to performance chart.

XL-OMY0001

16 25 40 50 XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 63 80 XLA63-30-1-2 XLA80-30-1-2 XLA63A-30-1-2 XLA80A-30-1-2 XLA63-30-1H-2 XLA80-30-1H-2 XLA63A-30-1H-2 XLA80A-30-1H-2 11,2 FKM:No.1349-80[ ]P8

XLGR Series

Dimensions E C D E E L (Width across flats) M (Width across flats) M8 (KF Flange) (K Flange) Fn Fd C Detail of (a) (a) M Rc1/8 J H K B A G A Model A B C D E Fn Fd XLGR-80*-1* 90 250 117 45.5 38.5 114 110 XLGR-100*-1* 108 270.5 154 55 38.5 130 102 XLGR-160*-1* 138 339 200 65 38.5 180 153 Model G H J K L M XLGR-80*-1* 83 105 44 9 13 4 XLGR-100*-1* 102 92 58 9 13 4 XLGR-160*-1* 153 124 62 12.5

XLA Series

size 63 80 100 160 General use without XLA63-30-1 XLA80-30-1 XLA100-30-1 XLA160-30-1 with XLA63A-30-1 XLA80A-30-1 XLA100A-30-1 XLA160A-30-1 High temperature without XLA63-30-1H XLA80-30-1H XLA100-30-1H XLA160-30-1H with XLA63A-30-1H XLA80A-30-1H XLA100A-30-1H XLA160A-30-1H Note1) The magnet for auto switch is not provided.

XLF Series

size 63 80 100 160 General use without XLF63-30-1 XLF80-30-1 XLF100-30-1 XLF160-30-1 with XLF63A-30-1 XLF80A-30-1 XLF100A-30-1 XLF160A-30-1 High temperature without XLF63-30-1H XLF80-30-1H XLF100-30-1H XLF160-30-1H with XLF63A-30-1H XLF80A-30-1H XLF100A-30-1H XLF160A-30-1H Note1) The magnet for auto switch is not provided.

XL-OMY0002

P19 6 XL-OMY0002 3. 3 5 P11 25 40 50 XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD25-30-1H XLD40-30-1H XLD50-30-1H 63 80 100 160 XLD63-30-1 XLD80-30-1 XLD100-30-1 XLD160-30-1 XLD63-30-1H XLD80-30-1H XLD100-30-1H XLD160-30-1H 1) M9// XLD25-30-1-M9// 2) 3) FKM:No.1349-80XLD25-30-1-XN1 4) S / 25 40 50 AS568-030V AS568-035V AS568-039V AS568-030 ** AS568-035 ** AS568-039 ** B2401-V24V B2401

XMA/XYA Series

Bonnet assembly/construction part number:1 Indicator Valve size Temperature specifications 16 25 40 50 General use without XLA16-30-1 XLA25-30-1 XLA40-30-1 XLA50-30-1 with XLA16A-30-1 XLA25A-30-1 XLA40A-30-1 XLA50A-30-1 High temperature without XLA16-30-1H XLA25-30-1H XLA40-30-1H XLA50-30-1H with XLA16A-30-1H XLA25A-30-1H XLA40A-30-1H XLA50A-30-1H Indicator Valve size Temperature specifications

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Specifications 3-1.

LEC-OM02704CN

RYnE RYnE 4 0 0 0 0 0 1 0 0 6 RY(n+2)3 7 RY(n+2)4 8 RY(n+2)5 254 1 1 1 1 1 1 1 0 255 1 1 1 1 1 1 1 1 1. 0OFF 1ON 2.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VFS 1 4 S mount VV5F3-70 Individual Side Side plate Bottom Valve Top Valve 1 8 1 4 1 4 VF370 VS4 1 4 VV5F3-71 Individual Side Side plate Side Valve Side Valve 1 8 VF3170 (Single solenoid only) 1 4 1 4 1 4 VQ7 Note 1) Supply (P port) is common.

Title not found

dE, Lr MM R, v, dND NX NZ 0 4 7 + 0 0 0 3 1 0 6 M 1 8 x 1 5 2 3 6 1 0 6 1 1 0 1 5 0 v v v + 0 m 3 q (16j3i) 50mfr Y-O5A (38) (27) ( 1 2 + 0 0 7 0 ) (1 5) (27] (60) (28) 0 6 3 o 0 1 2 o @39 3ir ( 1 6 1 5 0 0 4 7 + 0 0 0 3 1 0 6 1 1 0 M 1 8 x 1 5 0.59 1 0 6 236 63mr Y-O5A (27\ (28) (1 5) (27\ ( 1 2 + 0 0 7 0 ) (38) (60) 0 6 3 a o 1 2 0 @39 M22x1 5 o75 1 1 0 0 7 1 + 0 0 0 3 2 1 7 1 4 6 1 4 2

Air Cylinder CP Series Cylinder Positioner Assembly

5) 3 . 1 5 tBo\ 5.43 '135) 7 9 9 t203) E t 1 1 6 1 3.62 1 . 1 8 2.05 152\ o55 0.83 121\ Ml2x1 75 0.43 1 1 1 ) M26x1 5 1.57 (40) 4.S6 {126) 1.97 6.38 i162) 5.35 t136) 8.74 t222) 2.83 <72) 5.31 1135) 4 . 1 1 1206) 2.55 (65) 0.55 N4.0) 1 . 1 9 (41) 5 6 7 1215t 'Min.

SMC Basic Pneumatics

F 3 COMPRESSED AIR THEORY Units Pressur Prooerties of Gases lsothermic change (Boyle's Law) lsobaric change Charles Law Law of Gay Lussac lsochoric change Adiabatic (lsentropic) change Standard Volume Flow Bernoulli's Equation Air Humidity Relative humidity Pressur and Flow Use of the diagram: Formulae: 6 6 I 1 0 1 0 1 1 1 1 1 1 1 1 1 2 1 2 1 2 1 2 1 2 1 3 1 5 1 6 1 6 AE 36 36 5 AIR TBEATMENT

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F 3 COMPRESSED AIR THEORY Units Pressur Prooerties of Gases lsothermic change (Boyle's Law) lsobaric change Charles Law Law of Gay Lussac lsochoric change Adiabatic (lsentropic) change Standard Volume Flow Bernoulli's Equation Air Humidity Relative humidity Pressur and Flow Use of the diagram: Formulae: 6 6 I 1 0 1 0 1 1 1 1 1 1 1 1 1 2 1 2 1 2 1 2 1 2 1 3 1 5 1 6 1 6 AE 36 36 5 AIR TBEATMENT