Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: NPT3/8, Digital Flow Switch: Without Digital Flow Switch, Regulator: With Regulator, ON/OFF Valve: Without ON/OFF Valve, Restrictor: With Restrictor, Filter: With Filter

Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: NPT3/8, Digital Flow Switch: Without Digital Flow Switch, Regulator: With Regulator, ON/OFF Valve: With Air Operated, Restrictor: With Restrictor, Filter: With Filter

Compressed Air Quality: General Dry Air, Treatment Air Flow Rate(l/min): 500, Connection Type: [NPT] NPT, Plumbing Thread Nominal: 3/8, Connecting Tube Diameter: -, Filtration Level: 0.01μm, Operating Environment: Clean Room Specifications (Prevent dust), Operating Pressure Range(MPa): null～0.7, Drain Cock: No, Bowl Material: [Resin] Nylon Case, Bowl Guard: No, Specification: With filter,

Gun Type Ionizer

Modularized digital flow switch, regulator, ON/OFF valve, restrictor, and filter SFD Series LLB Series LLB4 LLB3 * Please contact SMC for clean room compatible ionizers. Related Products Polyurethane Coil Tubing S Couplers Finger Valve Flexible Max. operating pressure: 0.8 MPa (at 20C) For moving applications * Colors other than black are available as made-to-order specifications.

Table of Contents

Plug-in type Non plug-in type Applicable terminal: 1.253, 1.25-3S, 1.25Y-3N, 1.25Y-3S, but in the case of with DIN connector board, is not a terminal structure.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Applicable terminal: VFR2000, VFR3000: 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S VFR4000: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M 7 mm or less 7 mm or less VQC Corresponding to R1.25-3 of JIS C 2805 Position Model Left Center Right 4 mm or more VQZ VFR610 A side COM VFR620 SQ A side COM B side Series VFR5000 J.S.T. Mfg. Co., Ltd.

Booster Regulator/Air Tank

VBAT5A-Y-3N VBAT10A-Y-3N VBAT20A-Y-3N VBAT5S-Y-4N VBAT10S-Y-4N VBAT20S-Y-4N VBAT5A-Y-3 VBAT10A-Y-3 VBAT20A-Y-3 VBAT5S-Y-4 VBAT10S-Y-4 VBAT20S-Y-4 Quantity Model No.

VFS

Plug-in type Non plug-in type Applicable terminal: 1.253, 1.25-3S, 1.25Y-3N, 1.25Y-3S, but in the case of with DIN connector board, is not a terminal structure.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Applicable terminal: VFS3000: 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S VFS4000/5000/6000: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M There is no polarity.

VFR

Applicable terminal: VFR2000, VFR3000: 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S VFR4000: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M 7 mm or less 7 mm or less Position Model Left Center Right Corresponding to R1.25-3 of JIS C 2805 VFR610 A side COM 4 mm or more VFR620 A side B side COM Series VFR5000 3 VFR640 5 A side B side COM J.S.T. Mfg. Co., Ltd.

G15/G27

.: G36-00-00-3N) Polycarbonate (Part no.: G46-00-00-3) Nylon (Part no.: G46-00-00-3N) Clear cover Material Stud Bourdon tube Brass Brass 0.04 0.05 Mass (kg) Note 1) When mounting a pressure gauge, use caution not to tighten excessively. Excessive tightening will cause product to be damaged. Use a pipe tape for sealing.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

Principal Parts Material C3604 (Electroless nickel plate) (Nipple M-3N, M-5N: Stainless steel 303) Nylon 66: GF30%, Stainless steel 304: NBR (PVC for M3) Material Body Gasket Body of M-5E, M-5ER, M-5M is not surface-treated. Electroless nickel plate treated is available as option -X2.

42

Applicable terminal: 1.25-3s, 1.25Y-3, 1.25Y-3N, 1.25Y-3.5 533 VQ4000/5000 Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 3 to 9 for 3/4/5 Port Solenoid Valve Precautions.

5 Port Solenoid Valve

Applicable terminal: 1.25-3s, 1.25Y-3, 1.25Y-3N, 1.25Y-3.5 642 A VQC4000 Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 3 to 9 for 3/4/5 Port Solenoid Valve Precautions.

VFR2000 Series

Applicable crimp terminal Applicable crimp terminal Type E, T: 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S (Round 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S shape or Y shape crimp terminal cannot be used for Type D.) 8 VFR2000-OMH0002-A VFR2000 Series 5 Port Solenoid Valve / Specific Product 2 9 Be sure to read before handling. Attaching and Detaching Connectors Crimping the Lead Wire and Socket 1.

Air Fittings & Tubing

Accepts Many Styles of Plastic Tubing Hose nipple and hose elbow accepts nylon, soft nylon, and polyurethane tubing. 1 8 M3, M5, R(PT) Port size JIS B0209 Class 2 (Metric coarse thread), JIS B0203 (Taper pipe thread) Thread Component Materials PVC, Nylon66: GF30% Body Gasket C3604BD (Nipple M-3N, M-5N: Stainless steel (SUS 303)) Material Fitting Markings for Applicable Tube Material (Barb

KJ

Principal Parts Material C3604BD (Nipple M-3N, M-5N: Stainless steel 303) PVC, Nylon 66: GF30%, Stainless steel 304, NBR Material Body Gasket Fitting Markings for Applicable Tubing Material (Barb fitting, Barb elbow, Barb elbow (H)) Tubing material determines the compatible fittings. (Refer to the table below.)

Table of Contents

Principal Parts Material C3604BD (Nipple M-3N, M-5N: Stainless steel 303) PVC, Nylon 66: GF30%, Stainless steel 304, NBR Material Body Gasket Fitting Markings for Applicable Tubing Material (Barb fitting, Barb elbow, Barb elbow (H)) Tubing material determines the compatible fittings. (Refer to the table below.)

VER2000/4000

Stations 3 8 1 2 Port size Rc , Composed of basic unit (VER 000-A, VS7-8-FG-S-3N) Refer to Best Pneumatics Vol. 2 for details about solenoid valve. 4 2 F.R.L.

VER2000/4000

(Third station of manifold where 1 piece of VS7-8-FG-D-3M is added to the basic unit of VER2000-A and VS7-8-FG-S-3N.) Dimensions IC PVQ VEF VEP DXT334-X72-04R-04U VER Mounting section (For M8) L side VEA VY2 VBA VBAT U side D side AP100 1 2 2 x Rc Exhaust port R side Rc 1/2 supply port (L side) 2 x Rc 1/2, Output port 709