Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 250mm, Motor Option: None, Rod End Thread: Male, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 250mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 500mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 350mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 250mm, Motor Option: with Lock/Motor Cover, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -,

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 500mm, Motor Option: with Lock/Motor Cover, Rod End Thread: Female, Mounting: Rod Flange, Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 500mm, Motor Option: with Lock/Motor Cover, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -,

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 30mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 50mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 30mm, Motor Option: None, Rod End Thread: M (Male), Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5m)

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 30mm, Motor Option: None, Rod End Thread: Male, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector

2/3 Port Valve

P1 P2 P1 P1 Wide selection of port sizes and variations Thread (6A to 50A) Flange (32F to 80F) VX VN VQ Low water hammer Max.1.2MPa In case of VNC211A(N.C. 0.5MPa) Cv0.7 to 100 Large flow capacity Conditions: Piping length/30m Steel tube, full pressure/0.5MPa 4.2-19 VNC How to Order Seal material Bracket A B NBR seal FPM seal B With bracket None Valve size: 1, 2, 3, 4. 2 0 1 A VNC 15A Air

Series VQ Metal Seal/Rubber Seal Body Ported

Air/Inert gas Air/inert gas Fluid (3) Max. operating pressure 0.7MPa (High pressure: 0.8MPa) 0.1MPa 0.15MPa Single Min. operating Double (Latching) 0.18MPa 0.18MPa pressure 3 position 0.15MPa 0.2MPa Valve Ambient and fluid temperatue 10 to 50C (1) Lubrication Not required Non-locking push style/Push-locking slotted, lever styles (option) Manual override (2) Impact/Vibration resistance 150/30m

AC Servo Motor Driver (CC-Link Type ）

Construction condition: One wire is constructed in the air Wire length: 30m or less (1) Wires for power supply wiring The following diagram shows the wires used for wiring.

Vacuum Manifold for fieldbus system

4 Ejector body assembly PBT HNBR and SUS are also used 5 Supply valve and release valve assembly Refer to Replacement Parts on Page 19 6 Pressure sensor assembly Refer to Replacement Parts on Page 19 One-touch fitting with filter element (with spring when exhaust sealing valve specification) 7 Vacuum port adapter assembly Refer to Replacement Parts on Page 19 Nominal filtration rating: 30m

C95

25 25 5 5 5 5 5 5 11.5 12 14 14 16 16 3 4 4 4 4 4 10 12 16 16 20 20 30 35 40 45 45 55 34 40 45 51 65 75 3.3 4.3 4.3 4.3 4.3 6.3 41 48 54 60 75 85 6.6 6.6 9 9 11 11 10.5 11 15 15 18 18 32.5 38 46.5 56.5 72 89 10 10 10 12 16 16 142 160 170 190 210 230 32 40 50 63 80 100 22 25 27 32 36 41 5.5 5.5 6.5 6.5 10 10 CP95 C95 C92 CA1 Counter pivot ES Counter pivot E CS1 Bore (mm) Bore (mm) d2 CK S5

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

l1 Clevis pivot bracket (E) [mm] Bore size [mm] Part no. d2 CK S5 K1 K2 (Max.) l3 (Max.) G1 l1 G2 EM G3 (Max.)

Series LECSB/LECSC/LECSS Absolute Type Series LECSA (Pulse Input Type/Positioning Type) Incremental Type AC Servo Motor Driver (Pulse Input Type) (CC-Link Direct Input Type) (SSCNET III Type)

A LECSA LECSB LECSC LECSS Pulse input type (For absolute encoder) B Compatible motor type CC-Link direct input type (For absolute encoder) Encoder Capacity 100 W 200 W 400 W 100 W 200 W 400 W Type AC servo motor (S2) AC servo motor (S3) AC servo motor (S4) AC servo motor (S6) AC servo motor (S7) AC servo motor (S8) Symbol C S1 S3 S41 SSCNET III type (For absolute encoder) Incremental S S5

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Clevis pivot bracket with ball joint (ES) [mm] Bore size [mm] Part no. d3 CN S5 K1 K2 (Max.) l2 G1 G2 G3 (Max.)

C95

CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5