Made to Order

absorber SD Stroke adjustment unit FA FB W Adjustment bolt ED TT h E EA EC ED EY FA FB h S T SD TT W Shock absorber model Adjustment range Adjusting bolt Applicable cylinder MY2H16 MY2H25 MY2H40 RB0806 5.6 M5 x 0.8 x 25L 15.8 8.4 6.2 5 28 12.4 30 3.2 40.8 6 1.3 4.2 (Max. 9.8) 34.5 RB1007 11.5 M8 x 1.0 x 35L 19.6 10.6 10 5.5 37 19.3 44.8 4 46.7 7 5 (Max. 16.5) 47.3 RB1412 16 M10 x 1.0 x 50L

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

Table of Contents

Vacuum suction port 50l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 104 105 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order

Electric Actuators

Suction at both ends. 50l/min (ANR) 100l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 106 Made to Order/Clean Room Specification Series LJ1H20 Dimensions/LJ1H202 (X60) Scale: 15% When two dimensions are shown, the top dimension is for 100 to 600mm strokes, and the

LJ1H

Vacuum suction port 50l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 104 105 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order

Hydraulic

Example: M5 x 50l 4pcs.

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

Compact Cylinder

(mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQB5010 CVQB325 M6 x 60L M5 x 45L 60 45 15 10 x 60L x 45L 60 45 20 15 x 65L x 50L 65 50 25 20 x 70L x 55L 70 55 30 25 x 75L x 60L 75 60 35 30 12.5 x 80L x 65L 80 65 9 40 35 x 85L x 70L 85 70 45 40 x 90L x 75L 90 75 50 45 x 95L x 80L 95 80 75 50 x 120L x 85L 120 85 -100 75 x 145L x 110L 145 110 CVQB6310

Digital Flow Switch (Integrated display type)

to 3 5, 10L range: -1 to 4 25, 50, 100, 200L range: 1300 0x0514 OUT1 uses the unit for accumulated output index value (When unit: "L" is selected) 2 R/W Accumulated output index L S16 0 Y 0 to 5 OUT1 uses the unit for accumulated output set value (When unit: "ft3" is selected) 1 R/W Accumulated output set value ft3 S16 0 Y Setting range 0 to 9 1310 0x051E Setting range 1, 2, 5, 10, 25, 50L

Compact Cylinder with Air Cushion Series RQ

Mounting bolt Example) Bolt M5 x 50L 4 pcs.

Compact Hydraulic Cylinder

Mounting bolt Example: M5 x 50L 4 pcs.

Compact Cylinder with Air Cushion Series RQ

Example) Bolt M5 x 50l 4pcs.

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

Compact Cylinder with Air Cushion

Example) Bolt M5 x 50l 4 pcs.

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

Table of Contents

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

RQ

Example) Bolt M5 x 50l 4 pcs.

4-channel Flow Monitor ( compatible)

Item Display Content Setting of connection product [4L] 4 L range [16L] 16 L range [40L] 40 L range [PFW] is selected [100L] 100 L range [250L] 250 L range [10L] 10 L range [rAnG] [50L] 50 L range Selection of flow range [100L] 100 L range [PFA] is selected [200L] 200 L range [500L] 500 L range [4L] 4 L range [PFd] is selected [16L] 16 L range [40L] 40 L range Press the SET button to set.

Digital Flow Switch (Remote type monitor unit)

PF2A30 series PF2A31 series 1 to 10 L/min type (PF2A510) 5 to 50 L/min type (PF2A550) [11L]: [21L]: [51L]: 10 to 100 L/min type (PF2A511) 20 to 200 L/min type (PF2A521) 50 to 500 L/min type (PF2A551) [10L]: [50L]: PF2W30 series PF2W33 series [11L]: 10 to 100 L/min type (PF2W511) 0.5 to 4 L/min type (PF2W504) [04L]: [20L]: [40L]: 2 to 16 L/min type (PF2W520) 5 to 40 L/min type (PF2W540) PF2D30

4-channel Flow Monitor (Remote type monitor unit)

PF2A20 series 1 to 5 to 10 L/min type (PF2A510) 50 L/min type (PF2A550) [10L]: [50L]: [11L]: [21L]: [51L]: 10 to 20 to 50 to 100 L/min type (PF2A511) 200 L/min type (PF2A521) 500 L/min type (PF2A551) PF2W20 series 0.5 to 4 L/min type (PF2W504) (PF3W504) [04L]: [20L]: [40L]: [11L]: 2 to 5 to 16 L/min type (PF2W520) (PF3W520) 40 L/min type (PF2W540) (PF3W540) 10 to 100 L/min type (PF2W511)