Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 150mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 8m, Controller Type - LEC, JXC: JXCD1, DeviceNetâ„¢, I/O Cable Length for LEC: Without Cable, Controller

LEJ-OM004xx

LECSC-S5 LECSS-S5 40 AC servo motor (absolute encoder) S6 100 *3 (6) Vacuum port direction Left side Nil LECSB-S7 LECSC-S7 LECSS-S7 AC servo motor (absolute encoder) S7 Right side R 63 200 Both side D *1 Fo r mo tor type S 2 and S6, note that the com patible driv er part number suffix is S1, S5. *3When v acuum ov er 50L/m in( ANR), select D. *2 (4) S troke [mm] Standard Produced upon receipt

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor ( 100/200 W )

LECSC;-S5 LECSS;-S5 LECSB;-S7 LECSC;-S7 LECSS;-S7 3: Refer to the table below for details.

Electric Actuator/Slider Type

LECSC -S5 LECSS -S5 Motor mounting position S6 Nil Without option B With lock 100 100 to to 1000 1000 Refer to the applicable stroke table.

Slider Type Ball Screw Drive/11-LEFS Series

LECSC-S5 LECSS-S5 S6* Nil Without option B With lock 25 32 40 u Vacuum port* R: Right S7 200 32 LECSB-S7 LECSC-S7 LECSS-S7 AC servo motor (Absolute encoder) Nil Left R Right D Both left and right S8 400 40 LECSB2-S8 LECSC2-S8 LECSS2-S8 Nil: Left * For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively. !

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LECSS-S5 200 to 1500 *3 Refer to the applicable stroke table for details.

LEY-OM007

. -45- 6 /250km /500 1. 2. 3. 2 LEY16*A 2,000km LEY25*A 2,500km LEY32A 4,000km LEY16*B 1,000km LEY25*B 1,200km LEY32B 2,000km LEY16*C 500km LEY25*C 600km LEY32C 1,000km a. b. c. d. e. f. -46- 7.5. 1. 2. (1mm ) 3. 4. N Nm LEY16 LE-D-2-1 10 0.36 LEY25 LE-D-2-2 19 0.63 LEY32 LE-D-2-3 30 1.5 5. LEY32 Nm LEY16 0.63 LEY25 1.5 LEY32 5.2 6. -47- 8.

JXCx-OMU0004

300 2 36 400 18 400 9 400 3 48 500 24 500 12 500 4 60 600 30 600 15 600 5 72 700 36 700 18 700 6 84 800 42 800 21 800 7 100 900 50 900 25 900 8 150 1000 75 1000 38 1000 9 200 1200 100 1200 50 1200 10 250 1400 125 1400 63 1400 11 300 1600 150 1600 75 1600 12 350 1800 175 1800 88 1800 13 400 2000 200 2000 100 2000 14 450 2500 225 2500 113 2500 15 500 3000 250 3000 125 3000 LEY32A LEYG32A LEY32B

Programless controller Step motor (servo 24 VDC)

JXC-OMU0029-A LEY32A / LEYG32A LEY32B / LEYG32B LEY32C / LEYG32C Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 24 200 12 200 6 200 1 32 300 19 300 15 300 2 40 400 23 400 20 400 3 48 500 27 500 30 500 4 56 600 32 600 40 600 5 64 700 44 700 50 700 6 80 800 54 800 60 800 7 100 900 77 900 70 900 8 150 1000 90 1000 80 1000 9 200 1200 120

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: NPN, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY32B-150, I/O cable length / communication plug(m): 3, Controller/driver mounting method: DIN rail mounting type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY32B-450, I/O cable length / communication plug(m): 1.5, Controller/driver mounting method: DIN rail mounting type

JXCx-OMT0023

Servo motor Driver LE-LECSA-S5 S1 S2 LECSA-S7 S3 LECSA2-S8 S4 (2) Configuration The control circuit provides safe separation to the main circuit in the driver.

5-Port Solenoid Valve

Manifold Options 250 Type 50 Side Ported Metal Base Plug-in EX510 SY3000/5000/7000 Series Type 51 Bottom Ported How to Order Manifolds SS5Y 50 3 S5 C6 D 05 q w e r t y u i o q Series w Type t Valve stations 3 SY3000 5 SY5000 7 SY7000 50 Side ported 51 Bottom ported 50R Side ported, External pilot Symbol Stations Note Symbol Stations Note 02 2 stations All double wiring 02 2 stations All

Profile Design ISO/VDMA Air Cylinder Series CP95

3.3 32.5 3 11.5 41 5 5.5 22 10 30 10.5 6.6 10 142 40 55 16 40 4.3 38 4 12 48 5 5.5 25 10 35 11 6.6 12 160 50 65 21 45 4.3 46.5 4 14 54 5 6.5 27 10 40 15 9 16 170 63 75 21 51 4.3 56.5 4 14 60 5 6.5 32 12 45 15 9 16 190 80 95 25 65 4.3 72 4 16 75 5 10 36 16 45 18 11 20 210 100 115 25 75 6.3 89 4 16 85 5 10 41 16 55 18 11 20 230 Mounting type ES Piston rod ball joint to DIN 648K Bore d3 CN S5

C95

25 25 5 5 5 5 5 5 11.5 12 14 14 16 16 3 4 4 4 4 4 10 12 16 16 20 20 30 35 40 45 45 55 34 40 45 51 65 75 3.3 4.3 4.3 4.3 4.3 6.3 41 48 54 60 75 85 6.6 6.6 9 9 11 11 10.5 11 15 15 18 18 32.5 38 46.5 56.5 72 89 10 10 10 12 16 16 142 160 170 190 210 230 32 40 50 63 80 100 22 25 27 32 36 41 5.5 5.5 6.5 6.5 10 10 CP95 C95 C92 CA1 Counter pivot ES Counter pivot E CS1 Bore (mm) Bore (mm) d2 CK S5

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

l1 Clevis pivot bracket (E) [mm] Bore size [mm] Part no. d2 CK S5 K1 K2 (Max.) l3 (Max.) G1 l1 G2 EM G3 (Max.)

Series LECSB/LECSC/LECSS Absolute Type Series LECSA (Pulse Input Type/Positioning Type) Incremental Type AC Servo Motor Driver (Pulse Input Type) (CC-Link Direct Input Type) (SSCNET III Type)

A LECSA LECSB LECSC LECSS Pulse input type (For absolute encoder) B Compatible motor type CC-Link direct input type (For absolute encoder) Encoder Capacity 100 W 200 W 400 W 100 W 200 W 400 W Type AC servo motor (S2) AC servo motor (S3) AC servo motor (S4) AC servo motor (S6) AC servo motor (S7) AC servo motor (S8) Symbol C S1 S3 S41 SSCNET III type (For absolute encoder) Incremental S S5

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Clevis pivot bracket with ball joint (ES) [mm] Bore size [mm] Part no. d3 CN S5 K1 K2 (Max.) l2 G1 G2 G3 (Max.)

C95

CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5