Flow Range: 1 (PF2A511: 10-100l/min, PF2A521: 20-200l/min, PF2A551: 50-500l/min), Output Specification: 1 (PNP Open Collector 2 Outputs)

Flow Range: 1 (PF2A511: 10-100l/min, PF2A521: 20-200l/min, PF2A551: 50-500l/min), Output Specification: 1 (PNP Open Collector 2 Outputs), Unit: M (S1 Fixed Unit)

Solid State Vacuum Regulator

Pressure characteristics Flow rate characteristics Set pressure: 20kPa Supply vacuum pressure: 100kPa Flow rate characteristic measurement conditions 0 1.0 Exhaust flow rate of the vacuum pump used for measurement: 500l/min (ANR) 10 Set point Upstream vacuum pressure: 100kPa (when downstream flow rate is 0l/min (ANR)) 20 0.5 Output deviation (%F.S.) 30 Maximum flow rate: 132l/min (ANR)

VCA

Material HNBR: Nitrile hydride rubber 500 700 500 1000 1500 800 1000 1200 1000 500 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 500l/min (ANR) is P = 0.64MPa for a 3 orifice, and P = 0.35MPa for a 4 orifice.

Thermo-dryer

(0.5 MPa) 1.16 0.88 Outlet air set temperature Outlet air set temperature 68F (20C) 77F (25C) Check the coefficient. 3 Correction factor = 1.36 1.07 0.50 1.16 = 0.84 Correction factor = 1.11 1 0.67 0.88 = 0.65 Calculate the corrected air flow capacity. 4 Corrected air flow capacity = 10.6 scfm (300L/m) 0.84 = 12.6 scfm (355 L/min [ANR]) Corrected air flow capacity = 17.7 scfm (500L

Exhaust Cleaner for Clean Rooms AMP Series

from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow speed meter 0.03 AMP320 AMP220 0.02 0.01 0 200 400 600 800 1000 1200 Exhaust flow rate l/min (ANR) 1MPa = 145 psi 1 l/min = 0.035 SCFM Viewing the graph: When using AMP320 at a flow rate of 500l

Air Preparation Equipment

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

Low Maintenance Filter Series FN1

Filtration Note) Only 5m of filtration is available. 005 020 5m (Cylindrical type, Step type) 20m (Cylindrical type) Element length 1 250mm 2 500mm Element material S Stainless steel SUS304 Seal material Port size N NBR V FPM 10 Rc 1 Specifications Filter FN1101 FN1 FN1102 FN1112 Model Element dimension Fluid Operating pressure 65 x 250l Cleaning solvent, Coolant MAX. 1.0MPa MAX. 80C 65 x 500l

Solid State Vacuum Regulator Series ITV2090/2091

Pressure characteristics Flow rate characteristics Set pressure: 20kPa Supply vacuum pressure: 100kPa Flow rate characteristic measurement conditions 0 1.0 Exhaust flow rate of the vacuum pump used for measurement: 500l/min (ANR) 10 Set point Upstream vacuum pressure: 100kPa (when downstream flow rate is 0l/min (ANR)) 20 0.5 Output deviation (%F.S.) 30 Maximum flow rate: 132l/min (ANR)

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Auto Drain: C (N.C. Auto Drain)

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: N (NPT), Port Size: 02 (1/4)

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: N (NPT), Port Size: 02 (1/4), Accessory: B (Bracket), Auto Drain: C (N.C. Auto Drain), Rubber Material: Standard, Air Pressure: Standard, Drain Guide: None, IN-OUT Direction: Standard, Pressure Switch 125VAC, 30VDC: None, Element Service Indicator: T (Yes)

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Auto Drain: D (N.O. Auto Drain)

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: N (NPT), Port Size: 03 (3/8), Accessory: B (Bracket)

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: N (NPT), Port Size: 03 (3/8), Accessory: B (Bracket), Auto Drain: Drain Cock w/o Auto Drain, Rubber Material: Standard, Air Pressure: Standard, Drain Guide: None, IN-OUT Direction: Standard, Pressure Switch 125VAC, 30VDC: None, Element Service Indicator: T (Yes)

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: N (NPT), Port Size: 03 (3/8), Accessory: B (Bracket), Auto Drain: C (N.C. Auto Drain), Rubber Material: Standard, Air Pressure: Standard, Drain Guide: None, IN-OUT Direction: Standard, Pressure Switch 125VAC, 30VDC: None, Element Service Indicator: T (Yes)

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: N (NPT), Port Size: 03 (3/8), Accessory: None, Auto Drain: C (N.C. Auto Drain)

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: N (NPT), Port Size: 03 (3/8), Accessory: None, Auto Drain: C (N.C. Auto Drain), Rubber Material: Standard, Air Pressure: Standard, Drain Guide: None, IN-OUT Direction: Standard, Pressure Switch 125VAC, 30VDC: None, Element Service Indicator: T (Yes)

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: Rc, Port Size: 02 (1/4), Accessory: B (Bracket), Auto Drain: C (N.C. Auto Drain), Rubber Material: Standard, Air Pressure: Standard, Drain Guide: None, IN-OUT Direction: Standard, Pressure Switch 125VAC, 30VDC: None, Element Service Indicator: T (Yes)

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: N (NPT), Port Size: 02 (1/4), Accessory: B (Bracket), Auto Drain: Drain Cock w/o Auto Drain, Rubber Material: Standard, Air Pressure: Standard, Drain Guide: J (Drain Guide 1/4 Female Threaded)