Electric Actuator/Slider Type

Nil Without connector H With connector Compatible drivers Power supply voltage (V) Size 25 32 40 Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 Applicable stroke table Standard C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 Model Stroke (mm) 100 200 300 400 500 600 700 800 900 1000 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to

Table of Contents

Note 2) Except double (latching). 5 6 Low wattage type Y (2) Note) 200/220 VAC models are applicable to the F and L kits.

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

Series VQ Metal Seal/Rubber Seal Body Ported

Kit/Electrical entry/Cable length F P Kit (Dsub connector) Kit (Flat cable connector) Connector location Top (vertical) Side (horizontal) Connector location Top (vertical) Side (horizontal) P .1.10-40 P .1.10-36 Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 stations Max.16 (2) Max.16 (2) F kit P kit P kit F kit With cable (1.5m) With cable (3m) With cable (5m

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

LJ1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

LG1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

Programless Controller Series LECP1

Incremental Type Series LECSA AbsoluteType Series LECSB Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) Model Selection Specific Product Precautions AC Servo Motor Specifications Model LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 Compatible motor capacity [W] 100 200 100 400 200 Incremental 17-bit encoder (Resolution: 131072 p/rev) Compatible encoder Power voltage [V] Allowable voltage

Title not found

Incremental Type Series LECSA AbsoluteType Series LECSB Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) Model Selection Specific Product Precautions AC Servo Motor Specifications Model LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 Compatible motor capacity [W] 100 200 100 400 200 Incremental 17-bit encoder (Resolution: 131072 p/rev) Compatible encoder Power voltage [V] Allowable voltage

Step Motor Controller

Incremental Type Series LECSA AbsoluteType Series LECSB Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) Model Selection Specific Product Precautions AC Servo Motor Specifications Model LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 Compatible motor capacity [W] 100 200 100 400 200 Incremental 17-bit encoder (Resolution: 131072 p/rev) Compatible encoder Power voltage [V] Allowable voltage

SX

supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) SG B A SG B A FG SG B A FG SG B A FG FG Power supply 24 V 0 V Twisted pair wire with shielding DG 1-6-115 116 SX3000: Serial Transmission Unit/Plug-in SS5X3-45SStations UC4 C6 (Pitch) P = 10.5 DIN rail release button 2-One-touch fittings (P , R port) Applicable tubing O.D

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Setting over 200 rev will be clamped with 200 rev. 0 0 to [rev] 1000 (Note) Note. Setting can be changed in [Pr. PC06].

0.4

Note 1) 25P Note 1) 26P Top entry 20P Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 17 P. 21 P. 25 P. 29 Top entry Side entry Top entry Top entry Side entry Side entry Without cable Without cable Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Note 2) Note 2) Note 2) Note

45

CC-LINK System Master unit: AJ61BT11 A1SJ61BT11 AJ61QBT11 A1SJ61QBT11 Uni-wire H System Send unit: SD-H2 SYJ No. of output points, 16 points SX No. of output points, 16 points No. of output points, 16 points a) 2-wire type DG Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B

Valve Single Unit

CC-LINK System Master unit: AJ61BT11 A1SJ61BT11 AJ61QBT11 A1SJ61QBT11 Uni-wire H System Send unit: SD-H2 SYJ No. of output points, 16 points SX No. of output points, 16 points No. of output points, 16 points a) 2-wire type DG Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B

Valve Single Unit

CC-LINK System Master unit: AJ61BT11 A1SJ61BT11 AJ61QBT11 A1SJ61QBT11 Uni-wire H System Send unit: SD-H2 SYJ No. of output points, 16 points SX No. of output points, 16 points No. of output points, 16 points a) 2-wire type DG Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable With cable (1.5 m) With cable (3 m) With

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable With cable (1.5 m) With cable (3 m) With

45

CC-LINK System Master unit: AJ61BT11 A1SJ61BT11 AJ61QBT11 A1SJ61QBT11 Uni-wire H System Send unit: SD-H2 SYJ No. of output points, 16 points SX No. of output points, 16 points No. of output points, 16 points a) 2-wire type DG Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B