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A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

LG1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

LJ1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

JXCx-OMU0004

30 400 15 400 8 400 3 40 500 20 500 10 500 4 50 600 25 600 13 600 5 60 700 30 700 15 700 6 80 800 40 800 20 800 7 100 900 50 900 25 900 8 150 1000 75 1000 38 1000 9 200 1200 100 1200 50 1200 10 250 1400 125 1400 63 1400 11 300 1600 150 1600 75 1600 12 350 1800 175 1800 88 1800 13 400 2000 200 2000 100 2000 14 450 2500 225 2500 113 2500 15 500 3000 250 3000 125 3000 57 No.JXC-OMU0004-A LEY25A

Programless controller Step motor (servo 24 VDC)

300 10 300 6 300 2 30 400 15 400 8 400 3 40 500 20 500 10 500 4 50 600 25 600 13 600 5 60 700 30 700 15 700 6 80 800 40 800 20 800 7 100 900 50 900 25 900 8 150 1000 75 1000 38 1000 9 200 1200 100 1200 50 1200 10 250 1400 125 1400 63 1400 11 300 1600 150 1600 75 1600 12 350 1800 175 1800 88 1800 13 400 2000 200 2000 100 2000 14 450 2500 225 2500 113 2500 15 500 3000 250 3000 125 3000 LEY25A

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY25A-100, I/O cable length / communication plug(m): 1.5, Controller/driver mounting method: DIN rail mounting type

CV/MVGQ

Dd9 Knuckle 40, 50, 63 80 100 3 x 18l 3 x 18l 4 x 25l 4 x 25l 4 x 30l 4 x 36l CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 10 0.046 0.076 12 0.050 0.093 16 0.050 0.093 18 0.050 0.093 20 0.065 0.117 25 0.065 0.117 46 55.5 71 76.5 83 88 4 4 5 5 5 6 3 3 4 4 4 4 38 47.5 61 66.5 73 78 Material: Rolled steel Applicable bore size (mm) 40 50, 63 80 100 d D H B C Part no.

CV/MVGQ

Dd9 Knuckle 40, 50, 63 80 100 3 x 18l 3 x 18l 4 x 25l 4 x 25l 4 x 30l 4 x 36l CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 10 0.046 0.076 12 0.050 0.093 16 0.050 0.093 18 0.050 0.093 20 0.065 0.117 25 0.065 0.117 46 55.5 71 76.5 83 88 4 4 5 5 5 6 3 3 4 4 4 4 38 47.5 61 66.5 73 78 Material: Rolled steel Applicable bore size (mm) 40 50, 63 80 100 d D H B C Part no.

LEJ-OM004xx

LECSC-S5 LECSS-S5 40 AC servo motor (absolute encoder) S6 100 *3 (6) Vacuum port direction Left side Nil LECSB-S7 LECSC-S7 LECSS-S7 AC servo motor (absolute encoder) S7 Right side R 63 200 Both side D *1 Fo r mo tor type S 2 and S6, note that the com patible driv er part number suffix is S1, S5. *3When v acuum ov er 50L/m in( ANR), select D. *2 (4) S troke [mm] Standard Produced upon receipt

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor ( 100/200 W )

LECSC;-S5 LECSS;-S5 LECSB;-S7 LECSC;-S7 LECSS;-S7 3: Refer to the table below for details.

Electric Actuator/Slider Type

LECSC -S5 LECSS -S5 Motor mounting position S6 Nil Without option B With lock 100 100 to to 1000 1000 Refer to the applicable stroke table.

Slider Type Ball Screw Drive/11-LEFS Series

LECSC-S5 LECSS-S5 S6* Nil Without option B With lock 25 32 40 u Vacuum port* R: Right S7 200 32 LECSB-S7 LECSC-S7 LECSS-S7 AC servo motor (Absolute encoder) Nil Left R Right D Both left and right S8 400 40 LECSB2-S8 LECSC2-S8 LECSS2-S8 Nil: Left * For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively. !

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LECSS-S5 200 to 1500 *3 Refer to the applicable stroke table for details.

HRX-OM-K003

40 40 (1.1 [gal]/min) (7.9 [gal]/min) (10.6 [gal]/min) (10.6 [gal]/min) Facility water minimum necessary flow rate L/min 10 20 25 40 (2.6 [gal]/min) (5.3 [gal]/min) (6.6 [gal]/min) (10.6 [gal]/min) Operating temperature range C 20 to 90 Temperature stability *1 C 0.3 Circulating fluid *2 Galden HT200 or FluorinertTM FC-40 0.40 / 0.60 0.45 / 0.65 0.40 / 0.60 0.40 / 0.60 (At 4L/min) (At 30L

Hydraulic

SWRM A Polished round 20SPCC 100, 125 all types 100 82 5 20 72 5 5 x 30l SWRM Polished round 22SPCC 160 all types 160 94 5 20 79 7.5 Knuckle Material: Carbon steel d (H8) L (F8) Applicable cylinder type Order no.

Compact Hydraulic Cylinder

SWRM 100 Polished round 20SPCC 82 5 20 72 5 5 x 30l SWRM 160 Polished round 22SPCC 94 5 20 79 7.5 Note) Does not come with other accessories.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

SWRM 100 Polished round 20SPCC 100, 125 all types 82 5 20 72 5 5 x 30l SWRM 160 Polished round 22SPCC 160 all types 94 5 20 79 7.5 Knuckle Material: Carbon steel d (H8) L (F8) Applicable cylinder type Order no.