Compact 5-Port Solenoid Valve

CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 100 125 140 CS1 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 1000 mm 160 180 200 0 100 200 300 400 500 600 700 800 900 1000 Average speed [mm/s] ZK2 Combination Manifold Fittings, Replacement Parts, Tools Manifold Options Specific Product Precautions * Values at extension of a directly coupled cylinder when meter-out speed

Electric Rotary Table

/400 W) AC servo motor (100/200/400 W) AC servo motor (100/200/400 W) AC servo motor (100/200/400 W) Features 12 Series Variations Electric Rotary Table Series LER Max. speed [/s] Positioning repeatability [] Controller /Driver series Rotating torque [Nm] Reference page Type Basic High torque Basic High torque Basic High torque LER10 0.2 0.3 Series LECP6 280 420 0.05 (End: 0.01) Series LECP1

Electric Actuator / Low profile slider type

LEMH 25 25 LEMHT32 LEMH32 20 20 Workload m[kg] Workload m[kg] 15 15 LEMHT25 LEMH25 10 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 0 200 400 600 800 1000 1200 1400 Support spacing [mm] Support spacing [mm] 6.2 Handling Caution 1.

Series LC7R Dedicated Regenerative Absorption Unit

Applicable Controller Power Supply Voltage 100VAC Specification Series LJ1H10 Series LJ1H20 LJ1H1021H-K (8mm lead) LJ1H2021F-K (5mm lead) 250 400 225 350 12kg 6kg 200 300 175 250 Speed (mm/s) Speed (mm/s) 150 8kg 13kg 125 200 10kg 100 150 14kg 75 100 15kg 50 50 25 0 100 200 Stroke (mm) 300 400 0 100 200 300 400 500 600 Stroke (mm) When an actuator is operated under conditions that exceed

Air Slide Table Series MXQ

-150 0.06 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-150 0.08 MXQ20-30 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-20 MXQ20-100 MXQ20-10 0.04 0.02 MXQ20-10 0.02 0 0 0 100 200 300 100 200 300 400 500 600 100 200 300 Load (N) Load (N) Load (N) 25 25 25 Lr=200 mm 0.08 MXQ25-150 MXQ25-150 MXQ2550 MXQ2575 MXQ2510 MXQ2520 MXQ2530 MXQ2540 MXQ2550 MXQ2575 0.12 0.10 MXQ25-75 MXQ25-40 Table displacement amount (mm)

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEL25 Series LEL Electric Actuator/Guide Rod Slider Belt Drive Step Motor (Servo/24 VDC)

1 Made to Order Nil 1 3 5 Without cable 1.5 Nil D Screw mounting DIN rail mounting1 Nil X5 Standard product With magnet/switch rail 3 1 Only available for the controller types 6N and 6P 2 DIN rail is not included. Order it separately. 5 When Without controller is selected for controller types, I/O cable length cannot be selected.

Dedicated Controller Series LC1 Uniaxial Type

LC1-1-S1 (PC-98 (MS-DOS) edition LC1-1-W1 (Windows 95 edition) and LC1-1-R (dedicated communication cable) Power supply 1 2 Note 2) 100/110VAC 50/60Hz 200/220VAC 50/60Hz or LC1-1-T1(Teaching box) are required. For ordering information, refer to the option part numbers on page 62.

Compact Vacuum Ejector Series ZA

A C (+) White Reset (Vacuum suspension) B AC type Lead wire colors 100 VAC, 200 VAC Set (Vacuum generation) Yellow Yellow A 3. Suspension of operation for long periods of time Please use caution as detailed below when the vacuum equipment is turned off for periods in excess of 6 hours. Be sure to turn off the pressure supply to the vacuum equipment.

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Applicable stroke table Standard Model Stroke (mm) 100 200 300 400 500 600 700 800 900 1000 Manufacturable stroke range [mm] LEFS16 100 to 400 LEFS25 100 to 600 LEFS32 100 to 800 LEFS40 200 to 1000 Strokes are manufacturable in 1 mm increments. Refer to the manufacturable stroke range. However, strokes other than those shown above are produced as special orders.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

0 Actuator cable length [m] LEM R Robotic cable (Flexible cable) 1 1.5 A 10 3 3 B 15 5 5 C 20 8 8 Nil Without controller/driver 6N LECP6/LECA6 (Step data input type) NPN 6P PNP 1N LECP12 LEY Cable is shipped assembled. (Programless type) NPN 1P PNP LES Produced upon receipt of order. Refer to the specications Note 5) on page 488.

LEFS16, 25, 32, 40 Series LEFS Electric Actuator/Slider Type Ball Screw Drive Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Applicable stroke table )Standard Stroke Manufacturable stroke range [mm] Model 600 500 400 300 200 100 900 700 800 1000 LEFS16 LEFS25 LEFS32 LEFS40 ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) 100 to 400 100 to 600 100 to 800 200 to 1000 ) ) ) ) ) ) ) ) ) ) ) ) Consult with SMC for non-standard strokes as they are produced as special orders.

Size: 25, Bearing Type: L ( Ball Bushing Bearing), Motor Mounting: Top Mounting Type, Motor Type: A (Servo Motor, 24 VDC), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 200mm, Motor Option: w/o Option, Guide Option: w/o Guide, Actuator Cable Type: w/o Cable, Actuator Cable Length: w/o Cable, Controller Type for (LEC, JXC): 6P (LECA6, Step Data Input Type, PNP)

Size: 16, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 200mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Without Cable, Actuator Cable Length: Without Cable, Controller Type - LEC, JXC: 6P

Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 200mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Without Cable, Actuator Cable Length: Without Cable, Controller Type - LEC, JXC: 6P

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 200mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Without Cable, Actuator Cable Length: Without Cable, Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type)

Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 200mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Without Cable, Actuator Cable Length: Without Cable, Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type)