5 Port Solenoid Valve Series VQZ1000/2000/3000

closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (R2) (P) (R1) 5 3 1 (R2) (P) (R1) 5 3 1 (R2) (P) (R1) 5 3 1 (R2) (P) (R1) 5 3 1 (R2) (P) (R1) 5 3 1 (R2) (P) (R1) 5 3 1 Note) Except metal seal type of the VQZ1000.

Battery-less

2.96 3.30 3.56 2.96 3.20 3.75 4.81 4.98 5.47 5.91 Series LEYG16LmE LEYG25LmE LEYG32LmE Stroke [mm] 30 50 100 150 200 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Product weight [kg] 0.98 1.11 1.28 1.57 1.72 1.70 1.91 2.15 2.58 2.84 3.16 3.40 2.54 3.21 3.60 4.15 4.69 5.20 5.59 Series LEYG40MmE LEYG40LmE Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Product weight

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Port Symbol Caution VF1000 VF3000 VF5000 Supply P P (SUP) P Cylinder A, B A (CYL2) B (CYL1) A, B Connector R1 (EXH2) R2 (EXH1) R1, R2 EXH outlet EA, EB Lead wire JIS symbol Single solenoid Socket Hook 1: P (SUP) 2: B (CYL.1) 3: R2 (EXH.1) 4: A (CYL.2) 5: R1 (EXH.2) 1: P 2: B 3: R2 4: A 5: R1 Plug Connector Lead Wire Length 1: P 4: A 2: B 5: R1 3: R2 Standard length is 300 mm, but the following

VQZ1000/2000/3000

R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Piping specification A, B Port specification Applicable models Symbol P R1, R2 Description SI unit part no.

Metal Seal/Rubber Seal Series VQ Body Ported

170 225 235.5 10 139.5 159.5 225 232.5 9 129 149 212.5 223 8 118.5 138.5 200 210.5 7 108 128 187.5 198 6 97.5 117.5 175 185.5 5 87 107 162.5 173 4 76.5 96.5 150 160.5 3 66 86 150 160.5 2 55.5 75.5 137.5 148 L1 L2 L3 L4 34.5 54.5 112.5 123 Dimensions: Side Entry Connector [-FS] n L 1 137.5 148 2 150 160.5 3 162.5 173 4 175 185.5 5 187.5 198 6 200 210.5 7 200 210.5 8 212.5 223 9 225 235.5

0.4

) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQ1A01 VQ1B01 4 (A)

High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

0.4

)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1)

Air Cylinder Series CM2

R1 ND MM ND MM R1 MM E1 ND NX1 A U1 R2 H Z E1 NX U1 L1 A A NX A1 (Min.) A1 U1 L1 Applicable bore size 20 25, 32 40 MM NDH10 R1 L1 NX E1 MM NX1 U1 A1 U1 A R2 Y Z A H NDH10 Part no.

Refrigerated Air Dryers

IDF1E 0.75 Rc3/8 IDF2E 1.5 IDF3E 2.2 IDF4E 3.7 Rc1/2 IDF6E 5.5 Rc3/4 IDF8E 7.5 IDF11E 11 IDF15E1 15 Rc1 IDF22E 22 R1 IDF37E 37 R1 1/2 IDF55E 40C 0.7 MPa 55 R2 IDF75E 75 35C 0.7 MPa Model Rated inlet condition Applicable air compressor [kW] Port size IDF100F 100 R2 IDF125F 125 65 (2 1/2B) Flange IDF150F 150 80 (3B) Flange IDF190D 190 IDF240D 240 100 (4B) Flange IDFlE 40C 0.7 MPa IDF370D 35C

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

Base Mounted Metal Seal/Rubber Seal Series VQ

VQ0 L VQ4 kit VQ5 VQZ VQD P. 2-4-146 P. 2-4-150 P. 2-4-154 Terminal block box L Enclosure IP65 compliant kit Enclosure IP65 compliant Enclosure IP65 compliant W type only P. 2-4-146 P. 2-4-150 P. 2-4-154 P. 2-4-158 C kit P. 2-4-196 P. 2-4-200 P. 2-4-204 Terminal block C kit P. 2-4-196 P. 2-4-200 P. 2-4-204 Terminal block 2-4-117 2-4-118 Cylinder Speed Chart Use as a guide for selection.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 3) Value for quick response type Symbol 2 position single 3 position closed center 3 position exhaust center 3 position pressure center 2 position double (Double solenoid) 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) Manifold Specifications Piping specifications Note 4) 1 station weight (g)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

AC Servo Motor Driver (Pulse input type/Positioning type ）

[degree] speed [r/min] [ms] [ms] 1 120.000 1000 100 150 100 1 05 2 -320 .000 500 150 100 200 1 10 3 -230.000 3000 200 300 150 3 15 4 70.000 1500 300 100 Disabled 0 (Note) 20 Note.

Refrigerated Air Dryers Series IDF/IDU

Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.

VFS

VVFS5000-22A-1 VVFS5000-22A-2 VFS5410-D VFS5410-E Applicable valve model Check valve Cylinder side pressure VFS5400-F Solenoid one side energized A B R2 R1 R2 R1 R2 R1 320 or less 320 or less P Leakage (cm3/min) P Solenoid both sides de-energized Piston SUP side pressure (P1) 0 SUP side pressure P1 (MPa) Supply pressure: 0.5 MPa Operating range Caution Double check spacer In the case of