LJ1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

CRBU

550 62.2 289 504 63.2 77 81 151 Body of rotary actuator Auto switch unit + 2 switches Angle adjuster 30 60 46.5 30 50 30 150 203 47 90 11-3-3 Series CRBU2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except standard shaft type (W).

Electric Actuator

(Absolute encoder) Motor option AC servo motor S7 200 63 (Absolute encoder) Without lock Nil B With lock 1: For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively.

ITV

(Error number 5) 4 points preset input type Brown Blue S1 White Vs Black S2 Vs: Power supply 24 VDC (Negative common) One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2. S1 OFF ON OFF ON S2 OFF OFF ON ON Preset pressure P01 P02 P03 P04 For safety reasons, it is recommended that one of the preset pressures be set to 0 MPa.

LEC-OM071xx

The station address is set using the rotary switches S1 and S2. (1) Settings of the Rotary Switches S1 and S2 Set the station address using the rotary switches S1 and S2. Station Address S1 S2 00H to 02H: Disabled (Do not use these addresses.) 0 0 to 2 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled (Do not use these addresses.)

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Table of Contents

Applicable strokes: 150, 250, 350, 450, 550, 650, 750, 850, 950, 1050 Example) LG1H2121SC-150-F2-X2 Allowable Moment (Nm) Allowable dynamic moment Allowable static moment LG1H21 Model Mounting orientation Load movement direction Pitching Rolling Yawing 142 79 150 a = 1000 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a 4000 a = 2000 L1 (mm) Pitching Mep m : Transfer load (kg) a

AC Servo Motor Driver (Pulse input type/Positioning type ）

[degree] speed [r/min] [ms] [ms] 1 120.000 1000 100 150 100 1 05 2 -320 .000 500 150 100 200 1 10 3 -230.000 3000 200 300 150 3 15 4 70.000 1500 300 100 Disabled 0 (Note) 20 Note.

AC Servo Motor Driver (Network card type ）

PA14] = 0) 360 = 0 360 = 0 360 = 0 360 = 0 50 50 50 50 330 330 330 330 150 210 150 210 150 210 150 210 Bit 7: 0 Bit 6: 0 Bit 7: 0 Bit 6: 1 Bit 7: 1 Bit 6: 0 Bit 7: 1 Bit 6: 1 The servo motor rotates in a direction specified with a sign of the position data.

ITV

(Error number 5) Blue S1 White Vs Black S2 Set Pressure Range Vs: Power supply 24 VDC 12 to 15 VDC The regulating pressure range, by unit of standard measured pressure, is shown in the table below. One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2.

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-S1 V V V V V V ZP3EA-S2 V V V V V V V V w Holder Form/Diameter Part no.

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

Proposals for Energy Saving

/KNL (mm) Model Nozzle size D Outside diameter L1 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Relative: 150 Numerical data defining operation The operation starts by changing the Movement MOD and Position in step data No.1 temporarily by defining numerical data from the PLC. 160 Operation t [Define numerical data in the Movement MOD and Position in Step No.1.] Movement MOD: 2 (Relative) and Position: 150 are defined from the PLC.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

203 30 47 90 150 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

CRB2/CRBU2/CRB1

203 150 90 47 30 3 Series CRB2 A shaft can be replaced with a different shaft type except for standard shaft type (W).

Table of Contents

203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor